摘要
硬脆材料和电难以加工材料如玻璃、陶瓷、人造宝石、半导体基板的微型孔、槽及微结构 ,通常采用超声波通过工具振动和工作液中磨粒的作用达到微加工的目的。为了保证加工精度和提高加工效率 ,工具和工件之间应保持一定的间隙。控制间隙的大小和精度直接影响加工质量。本文提出超声波谐振来测量工具与工件之间的间隙 。
Micro holes,micro slot and micro structure of rigid materials such as glass,ceramics,synthetic cut stone,semiconductor wafers which have difficult in being processed through electrical machining are usually processed with supersonic micro machining To make supersonic quivery among tool and abrasives that are suspended in work liquid,abrasives process workpiece in supersonic machining In order to get high accuracy and high efficiency,it becomes the key technology that measure and control the distance of clearance A supersonic resonance method is put forward with the theory about how to measure the size of the clearance between the tool and the workpiece,and the feedback control of machining parameters are carried out
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2002年第z1期367-368,共2页
Chinese Journal of Scientific Instrument
基金
厦门大学校自选课题 Y0 70 0 7资助项目
关键词
超声波
微加工
谐振
在线测量与控制
Supersonic Micro machining Resonance On line measurement and control
