摘要
射频微机械 (RFMEMS)开关由于其优越的高频特性在微波和毫米波电路中表现出巨大的应用前景 .但是目前对微机械开关的研究主要都集中在开关梁的结构设计和力学分析上 ,对开关的电磁特性的研究 ,尤其是开关高频阻抗匹配分析的研究与验证比较少 .本文在高频传输线研究的基础上 ,推导出微机械开关的“开态”阻抗匹配模型 ,并利用HFSS软件对开关的高频特性进行模拟 .
Microelectromechanical switches have demonstrated great potential in microwave and millimeter-wave circuits for their superior high-frequency performance.Most of researches on MEMS switches were concentrated on the structural design and mechanical analysis of their beams.There are few researches that have been done to analyze the electromagnetic characteristics of the MEMS switches,especially the high-frequency impedance matching of the switches.In this paper,the on-state impedance matching formulation of MEMS switches is developed based on the results of the high-frequency transmission line,and the electromagnetic characteristics of MEMS switches are confirmed by using the HFSS software.This helps to design high-performance RF MEMS switches.
出处
《电子学报》
EI
CAS
CSCD
北大核心
2003年第z1期2213-2215,共3页
Acta Electronica Sinica
关键词
微机械膜开关
阻抗匹配
插入损耗
隔离度
MEMS membrane switches
impedance matching
insertion loss
isolation
