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ZAO透明薄膜厚度对其导电膜性能的影响 被引量：1

Thickness of ZnO:Al Transparent Thin Films Influencing Its Conductance
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摘要 研究了薄膜的结构性质、光学和电学性质随薄膜厚度的变化关系.制备的ZnO:Al薄膜具有(002)面的单一择优取向的多晶六角纤锌矿结构,性能优良的薄膜电阻率为4.9×1 0-4Ω.cm,平均透射率达到了88%. The thickness dependence of structural,optical and electrical properties of the ZnO:Al films on glass substrates has been studied.Good films with resistivity as low as 4.9×10-4Ω·cm and 88 % transmittance in the visible region on glass are prepared.
作者 靳铁良 马勇
机构地区 平顶山学院电气信息工程学院 重庆师范大学物理学与信息技术学院
出处 《郑州大学学报（理学版）》 CAS 2007年第3期120-123,共4页 Journal of Zhengzhou University:Natural Science Edition
基金 重庆市教委科研基金资助项目 编号040810
关键词 直流反应磁控溅射 ZAO薄膜 厚度 光电性能 DC reactive magnetron sputtering ZAO film film thickness optical and electrical property
分类号 O484.4 [理学—固体物理]
  • 相关文献

参考文献14

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共引文献37

同被引文献10

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郑州大学学报（理学版）
2007年 第3期

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