摘要
类金刚石薄膜是８０年代初出现的新型非金属薄膜材料之一，目前已受到了人们广泛的注视并引起了人们的极大兴趣。本文重点介绍双离子束溅射方法，对该方法在不同条件下制备的类金刚石薄膜进行了部分性能测试，通过对测试结果的比较及深入讨论，获得了用双离子束溅射方法制备性能优异类金刚石薄膜的最佳条件及有用结论。
Diamond like films deposited at the beginning of 80 era was one kind of new nonmetal thin films materials,and this kind material has been interested and gazed widely.This article introduces the method of Dual Ion Beam Sputterring mainly.The partial properties of DlC films has been tested.The best conditions and helpful conclusions deposited DlC films has been gained by the comparison and discussion of results.
出处
《大自然探索》
1998年第4期72-75,共4页
Discovery of Nature
关键词
类金刚石薄膜
性能测试
最佳条件
发展前景
DLC films
test of properties
the best deposited conditions developing future
