摘要
库尔特原理是一种利用微粒随导电液通过电敏感区域时形成的脉冲信号来测量微粒的尺寸和数量的电学方法。目前库尔特计数器主要通过两种方法制作检测电极,一是直插法,二是利用微纳加工(MEMS)图形化工艺在微流道内部集成微电极。直插法常采用电化学稳定金属如铂丝插入开孔芯片作为检测电极,存在易引入气泡、检测灵敏度较低等缺点;微纳加工集成电极方式工艺复杂,制作成本高,且难与检测芯片流道集成。本文介绍了一种基于RPS(resistive pulse sensing)检测方式的新型微流控库尔特计数器。该芯片使用微管道直接灌注液态金属制作三维检测电极,通过微尺度下的毛细限制阀作用使液态金属电极凝固后精确限制在相关区域内。通过对检测区域的尺寸设计以及电极位置的精确控制,我们制作了秀丽隐杆线虫计数芯片。实验证明该方法制造工艺简单方便、电极位置准确性好、检测时稳定快、提高了检测信噪比。
The Coulter Principle is an electrical method that measures the size and number of particles by using pulse signals formed by the particles as they pass through the electrically sensitive regions.At present,the Coulter counter mainly uses two methods to make the detection electrode,one is the insertion method,and the other is to integrate the microelectrode inside the micro flow channel by using the micro-nano processing(MEMS)patterning process.The insertion method often uses an electrochemically stable metal such as platinum wire to insert into the chip as a detection electrode,which has the disadvantages of introduction of air bubbles,and low detection sensitivity;micro-nano processing integrated electrode method is complicated in process and high in cost,and difficult to integrate electrodes with the flow channel.This paper introduces a new microfluidic Coulter counter based on RPS(resistive pulse sensing)detection.A micro-pipe is used to directly inject liquid metal into the chip,which makes a three-dimensional detection electrode.And the liquid metal electrode is precisely confined in the relevant region by a capillary valve at a micro scale after the solidification.Through the size design of the detection area and the precise control of the electrode position,we have made the C.elegans counting chip.The experiment proves that the method is simple and convenient in manufacturing process,accurate in electrode position,stable in detection,and improved detection signal-to-noise ratio.
作者
高林耿
龙妍婷
吴佳颖
韩超
李栋基
何希文
杨光
陈翔
GAO Lingeng;LONG Yanting;WU Jiaying;HAN Chao;LI Dongji;HE Xiwen;YANG Guang;CHEN Xiang(National Key Laboratory of Science and Technology on Micro/Nano Fabrication,Department of Micro/Nano Electronics,Shanghai Jiao Tong University,Shanghai 200240,China;Hongqiao International Institute of Medicine,Faculty of Public Health,Shanghai Jiao Tong University School of Medicine,Shanghai,200025,China)
出处
《功能材料与器件学报》
CAS
2019年第4期264-270,共7页
Journal of Functional Materials and Devices
基金
上海市科委基础重大研发计划资助项目(17JC1401001).
关键词
库尔特原理
毛细限制阀
线虫计数
Coulter Principle
capillary valve
C.elegans counting
