摘要
根据行星夹具的膜厚理论模型,对半球透镜表面的膜厚分布进行理论分析研究。推算半球面上典型点的膜厚公式,用代入法对不同情况的膜厚分布进行计算,结果表明半球面上中心区域(90°张角内)的膜厚不均匀性可控制在10%左右,其边缘区域(张角大于90°)的膜厚不均匀性高达90%;改变蒸发源的位置对改善膜厚均匀性没有明显帮助,但改变蒸发源的形式能改善膜厚均匀性。该研究工作对半球透镜表面镀膜的膜厚均匀性分析及改善具有一定的理论指导意义。
Based on the film thickness theory model of planetary fixture,the film thickness distributions of hemispherical lens surface are studied theoretically.The film thickness formulas of typical points on the hemispherical surface are calculated,and then the thickness distributions in different situations are calculated by substitution method.The results show that the thickness non-uniformity in central region(within a 90-degreee angle)of the hemispherical surface could be controlled at about 10%,and that in edge region(over a 90-degreee angle)could be as high as 90%.Changing the location of evaporation source has no effect on improving the thickness non-uniformity of hemispherical surface.However,changing the evaporation source can improve the thickness non-uniformity.This research has certain theoretical guiding significance for the analysis and improvement of film thickness uniformity of hemispherical lens coating.
作者
朱元强
ZHU Yuan-qiang(Foctek Photonics,Inc.,Fuzhou 350100,China)
出处
《光学与光电技术》
2020年第1期59-62,共4页
Optics & Optoelectronic Technology
关键词
半球透镜
行星夹具
膜厚分布
不均匀性
蒸发源
hemispherical lens
planetary fixture
thickness distribution
non-uniformity
evaporation source
