摘要
对一种薄膜扭矩传感器的栅丝进行建模,从栅丝的宽度、长宽比和间距3方面对栅丝的几何尺寸进行了性能影响仿真分析。栅丝宽度、长宽比和间距影响到栅丝对基体应变的传递性能,通过建立等应变梁模型,选择合理的宽度、长宽比和间距参数,使得应变传递误差小于1%。据此分析数据设计制作了薄膜扭矩传感器,并测试了该薄膜扭矩传感器的环境适应性等性能。
One kind of grid wire of thin film torque sensor is modeled.Simulation analysis on the performance influence of grid wire’s physical dimension from three aspects of width,length-width ratio and space is carried out.The width,length-width ratio and space affect the transferability of matrix strain by grid wire.By building equal strain beam model,choosing reasonable width,length-width ratio and space parameters,the strain transfer error is controlled to less than 1%.Based on the data,a thin film torque sensor is made,and its environment adaptability and other capabilities are tested.
作者
顾凯荣
林杰俊
廖然
倪昔东
齐红丽
闫博
GU Kairong;LIN Jiejun;LIAO Ran;NI Xidong;QI Hongli;YAN Bo(Shanghai Marine Equipment Research Institute,Shanghai 200031,China;Department of Micro/Nano Electronics,Shanghai Jiao Tong University,Shanghai 200240,China)
出处
《船舶工程》
CSCD
北大核心
2021年第S01期295-298,共4页
Ship Engineering
关键词
薄膜
扭矩
传感器
栅丝
结构尺寸
thin film
torque
sensor
grid wire
structure size
