摘要
为了改善多线切割机伺服电机控制系统的精度和稳定性,提高整机的加工精度,在走线系统控制模型的基础上,设计了伺服电机的模糊PID控制器,并在多线切割机样机上进行了SiC晶片切割试验。试验表明,所设计的控制系统和切割后SiC晶片表面质量参数较好,能够满足实际的生产要求。
In order to improve the precision and stability of the servo motor control system of the multi wire cutting machine and improve the machining precision of the whole machine,the control model of the multi-wire cutting and routing system is established,and the fuzzy PID controller is designed.The SiC wafer test is carried out on the prototype of the cutting machine.The experimental results show that the surface precision parameters of the SiC wafer obtained after cutting are better,which can meet the actual production requirements.
作者
李文广
冯国胜
LI Wenguang;FENG Guosheng(School of Traffic&Transportation,Shijiazhuang Tiedao University,Shijiazhuang 050043,China)
出处
《电子工艺技术》
2020年第1期5-7,11,共4页
Electronics Process Technology
基金
省级研究生创新资助项目(CXZZBS2017136).
关键词
模糊PID控制
多线切割机
伺服控制系统
精度
稳定性
fuzzy PID control
multi-wire cutting machine
servo control system
precision
stability
