摘要
光热微执行器广泛应用于光学微机电系统和微机器人。利用功能染料的窄带吸波特性制作可控制性强、位移大的波导式激发光热U型微执行器,并仿真了该执行器的温度和位移变化。制作了单臂长度和半径分别为5.8 mm和200μm的窄波段响应光热微执行器。实验结果表明,本方案制作的执行器具有位移响应大、能量利用率高、生产成本低以及集成度高的优势。在功率为100 mW激光的驱动下,该执行器自由端能在紫光(408 nm)或红光(638 nm)波段实现100~160μm的位移,远大于非对应波段光束产生的位移(20μm)。
Photothermal microactuators are extensively utilized in optical microelectromechanical systems and microrobotics. A waveguide-type excitation photothermal U-shaped microactuator, with strong controllability and large displacement, is constructed using the narrow-band wave-absorbing properties of functional dyes, and the temperature and displacement changes in the actuator are simulated in this paper. A narrow-band response photothermal microactuator with a single arm length and radius of 5. 8 mm and 200 μm, respectively, is constructed. The experimental findings indicate that the actuator produced using the proposed scheme has the benefits of large displacement response, high energy utilization rate, low production cost, and high integration. Driven using a 100 mW laser, the actuator’s free end can attain a displacement of 100-160 μm in the violet(408 nm) or red(638 nm) band, which is much greater than the displacement(20 μm) produced by the beam in the non-corresponding band.
作者
田志明
蔡腾
李若舟
方玉明
于映
Tian Zhiming;Cai Teng;Li Ruozhou;Fang Yuming;Yu Ying(College of Electronic and Optical Engineering&College of Microelectronics,Nanjing University of Posts and Telecommunications,Nanjing 210023,Jiangsu,China;National and Local Joint Engineering Laboratory of RF Integration and Micro-Assembly Technology,Nanjing University of Posts and Telecommunications,Nanjing 210023,Jiangsu,China)
出处
《激光与光电子学进展》
CSCD
北大核心
2023年第1期227-232,共6页
Laser & Optoelectronics Progress
基金
国家自然科学基金(61704090,11904177)
江苏省自然科学基金(BK20170908,BK20170903)
射频集成与微组装技术国家地方联合工程实验室开放课题(KFJJ20180201)
江苏省科研与实践创新计划(KYCX20_0805)
江苏省研究生科研与实践创新计划(SJCX21_0273)
关键词
激光光学
光热微执行器
窄带吸收特性
悬浮打印
水凝胶
laser optics
photothermal microactuators
narrow-band absorption characteristics
suspension printing
hydrogel
