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传感器用薄膜循环吸脱氢性能设计

Research on cyclic hydrogenation performance of filmsfor sensors
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摘要 镁基薄膜在光纤氢气传感器中应用较为广泛,但氢化时镁基薄膜氢化Pd层容易破碎,以及Mg层内容易形成致密氢化层,使得镁基薄膜的使用寿命较短。Gd由于氢化时体积变化小,有望改善镁基薄膜的循环氢化性能。然而,不同Gd元素的添加对Pd/Mg-Gd薄膜吸脱氢循环性能影响的研究较为匮乏,使用磁控溅射制备Fluorocarbon(FC)/Pd/MgGd合金薄膜,并研究了其循环氢化性能。当Gd的原子数分数在0.27~0.8时,薄膜具有较好的循环氢化性能,在140次完全吸脱氢后吸脱氢速率和光学变化区间仍旧保持较好,这是由于此时Mg-Gd合金薄膜吸脱氢反应时体积变化与Pd层相近的缘故。此外,Mg-Gd合金随着添加的Gd量的增加,材料的晶格带隙变小,因而,介电函数的实部数值越小,反射率越小。 Magnesium-based films are widely used in optical fiber hydrogen sensors,but the hydrated Pd layer of magnesiumbased films is easy to breakduring hydrogenation,and dense hydrated layers are easy to form in the Mg layer,which makes the service life of magnesium-based films short.Due to the small volume change of Gd element during hydrogenation,it is expected to improve the cyclic hydrogenation performance of magnesium-based films.However,there is a lack of research on the effects of the addition of different Gd elements on the performance of the hydrogenation and dehydrogenation cycle of Pd/Mg-Gd films.FC/Pd/Mg-Gd thin films were prepared by magnetron sputtering,and their cyclic hydrogenation properties were studied.When the atomic number fraction of Gd is 0.27~0.8,the film has good cyclic hydrogenation performance,and the hydrogenation and dehydrogenation rate and optical change range are still good after 140 times of complete hydrogenation and dehydrogenation,which is due to the fact that the volume change of the Mg-Gd film during the hydrogenation and dehydrogenation reaction is similar to that of the Pd layer.With the increase of the amount of Gd added,the lattice band gap of the Mg-Gd alloy film becomes smaller,so the smaller the real part of the dielectric function,the smaller the reflectance.
作者 孙中华 邓南香 SUN Zhonghua;DENG Nanxiang(School of Mechanical Engineering,Tianjin Renai College,Tianjin 301636)
出处 《机械设计》 CSCD 北大核心 2024年第S02期128-131,共4页 Journal of Machine Design
关键词 循环吸脱氢 磁控溅射 Mg-Gd薄膜 氢气传感器 cyclic hydrogen loading/unloading process magnetron sputtering Mg-Gd film hydrogen sensor
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