摘要
电阻型MEMS半导体气体传感器在环境空气质量监测和有毒有害气体检测等领域得到了广泛应用,但是受限于功耗较高的原因,这类传感器难以广泛应用于便携式气体检测系统。文章综述了近年来低功耗电阻型MEMS半导体气体传感器的研究进展,分别从气敏材料、传感器结构和传感器模组的集成电路等方面探讨如何实现低功耗的电阻型MEMS半导体气体传感器的制备,并展望低功耗的电阻型MEMS半导体气体传感器未来的发展方向。
Resistive MEMS semiconductor gas sensors have been widely used in the fields of ambient air quality monitoring and toxic and harmful gas detection.However,due to the high power consumption,this kind of sensor is difficult to be applied to portable gas detection system.The research progress of resistive MEMS semiconductor gas sensor with low power consumption in recent years is reviewed in this paper.How to realize resistive MEMS semiconductor gas sensor with low power consumption from the aspects of gas sensing materials,sensor structure and sensor module integrated circuit are discussed.And the future development direction of resistive MEMS semiconductor gas sensor with low power consumption is prospected.
作者
赵利强
向星岩
王刚
李威
刘建钢
ZHAO Liqiang;XIANG Xingyan;WANG Gang;LI Wei;LIU Jiangang(College of Information Science and Technology,Beijing University of Chemical Technology,Beijing 100029,P.R.China;Hanwei Electronics Group Corporation,Zhengzhou 450001,P.R.China)
出处
《微电子学》
CAS
北大核心
2023年第4期716-722,共7页
Microelectronics
基金
国家重点研发计划课题(2021YFB3200403)
关键词
低功耗
微机电系统
半导体气体传感器
脉冲工作模式
low power
micro-electro-mechanical system
semiconductor gas sensor
pulse operation mode
