摘要
采用水热腐蚀技术制备的铁钝化多孔硅表面具有可调超结构。详细研究了铁钝化多孔硅水热制备过程中单晶硅片表面的形貌演化。结果表明,在水热腐蚀过程中,存在两种同时发生的腐蚀机制:即对缺陷的化学腐蚀和通过形成微电池所发生的电化学腐蚀。在腐蚀发生的初期,化学腐蚀占主导地位;随后电化学腐蚀逐步起主导作用并对铁钝化多孔硅表面超结构的最终形成起关键作用。还讨论了发生在微电池中微型阳极和微型阴极上的化学反应。研究结果为实现铁钝化多孔硅表面形貌的人为控制提供理论指导。
Tunable superstructures were obtained in hydrothermally etched iron-passivated porous silicon (IPS). The morphology evolution of single crystal silicon wafers in the hydrothermal process was investigated. The morphologies observed at different etching stages indicated that there exist two co-occurring etching mechanisms: chemical etching (CE) of defects and electrolytic etching (EE) through forming local micro-electrolyzers. The etching process was dominated initially by CE and then by EE. EE played a key role to the formation of the final superstructures in IPS. The chemical reactions occurring on both the local micro-anodes and micro-cathodes were also discussed. This research might provide some useful information to the realization of the morphology control in IPS.
出处
《科学技术与工程》
2004年第2期61-65,共5页
Science Technology and Engineering
基金
国家自然科学基金(19904011)
河南省杰出青年科学基金(0014)
