摘要
在有限的教学经费及传统真空镀膜设备不报废的条件下,结合实际实验教学需要,对设备进行针对性的改造,使其能最大化使用。DM-240型真空镀膜机的扩散泵采用的是水冷却系统,但在实验结束过程中,需要人工判断扩散泵是否冷却,然后进行设备与水路系统的关闭操作,并且该过程占据相当的实验时间,影响到实验教学质量。针对扩散泵冷却控制系统进行温控自动化改造,利用温度控制和阀门控制设备,实现对扩散泵冷却系统温度的监控,并可自动关闭水冷却系统与机组设备,做到无人值守。不仅为实验教学提供了充足的实验时间,也可有效地避免因误操作而造成对设备的损坏。
Vacuum experiment is an important experiment. But facing on the heavy task of experimental teaching and stressful teaching hours,the traditional vacuum equipment cannot meet the experiment teaching work because of various reasons. In the condition of the limited funds and the vacuum equipments that cannot scrapped,the equipments should carry out targeted transformation due to the actual needs of experimental teaching. The diffusion pump of DM-240 uses a cooling water system,but in the end of the experiment process,it needs manually determine whether to cool,then the equipment and the water system can be shutdown. Because the process needs long time,it affects the quality of experimental teaching. Therefore the diffusion pump cooling control system should be transformed into temperature automation control system. Through to monitor the temperature of diffusion pump,it can automatically shut off the cooling water system and unit equipment. It not only ensures the experimental teaching hours,but also avoids the damage of the machine due to mishandling.
出处
《实验室研究与探索》
CAS
北大核心
2014年第12期49-53,共5页
Research and Exploration In Laboratory
关键词
真空镀膜
真空泵
扩散泵
vacuum coating
vacuum pump
diffusion pump
