摘要
超精加工技术的不断发展,对光滑表面粗糙度检测精度要求越来越高。采用显微相移干涉技术,设计软件算法实现超光滑表面任意横向或纵向截面线粗糙度以及面粗糙度在线检测与三维动态显示,初步实验表明,该系统测量精度达纳米量级,满足超光滑表面粗糙度检测性能要求。
With the development of super precision machining technology, the requirement for the precision of smooth surface measurement has reached ever-higher levels. The phase-shifting interferential microscope technology and the corresponding software design are adopted which can realize the measurement of the roughness at both transverse and lengthwise directions. The on-line detecting and dynamic three-dimensional displaying are also implemented. Primary experiments indicate that the accuracy of this system can attain nanometer magnitude which can meet the roughness measurement requirement for the ultra smooth surface.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2005年第z1期263-264,共2页
Chinese Journal of Scientific Instrument
基金
国家重点基础研究发展计划(973计划)的子课题(2003CB716201)资助项目
关键词
相移干涉
超光滑表面
粗糙度
Phase-shifting interference Ultra smooth surface Roughness
