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Characterization of La-doped xBiInO_3(1-x)PbTiO_3 Piezoelectric Films Deposited by the Radio-Frequency Magnetron Sputtering Method 被引量:1
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作者 孙科学 张淑仪 +1 位作者 Kiyotaka Wasa 水修基 《Chinese Physics Letters》 SCIE CAS CSCD 2016年第6期49-52,共4页
La-doped and undoped xBiIn03-(1 - x)PbTi03 (BI-PT) thin films are deposited on (101)SrRuO3/(lOO)Pt/(lO0) MgO substrates by the rf-magnetron sputtering method. The structures of the films are characterized by... La-doped and undoped xBiIn03-(1 - x)PbTi03 (BI-PT) thin films are deposited on (101)SrRuO3/(lOO)Pt/(lO0) MgO substrates by the rf-magnetron sputtering method. The structures of the films are characterized by XRD and SEM, and the results indicate that the thin films are grown with mainly (100) oriented and columnar structures. The ferroelectricity and piezoelectricity of the BI-PT films are also measured, and the measured results illustrate that both performances are effectively improved by the La-doping with suitable concentrations. These results will open up wide potential applications of the films in electronic devices. 展开更多
关键词 of BI Characterization of La-doped xbiino3 x)PbTiO3 Piezoelectric Films Deposited by the Radio-Frequency Magnetron Sputtering Method in by La PT
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