System-in-packaging(Si P) can realize the integration and miniaturization of electronic devices and it is significant to continue Moore’s law.Through-X-via(TXV) technology is the cornerstone of 3 D-SiP,which enables ...System-in-packaging(Si P) can realize the integration and miniaturization of electronic devices and it is significant to continue Moore’s law.Through-X-via(TXV) technology is the cornerstone of 3 D-SiP,which enables the vertical stacking and electrical interconnection of electronic devices.TXV originated from through-hole(TH) in PCB substrates and evolved in different substrate materials,such as silicon,glass,ceramic,and polymer.This work provides a comprehensive review of four distinguishing TXV technologies(through silicon via(TSV),through glass via(TGV),through ceramic via(TCV),and through mold via(TMV)),including the fabrication mechanisms,processes,and applications.Every TXV technology has unique characteristics and owns particular processes and functions.The process methods,key technologies,application fields,and advantages and disadvantages of each TXV technology were discussed.The cutting-edge through-hole process and development direction were reviewed.展开更多
Interposers with through-silicon vias(TSVs)play a key role in the three-dimensional integration and packaging of integrated circuits and microelectromechanical systems.In the current practice of fabricating interposer...Interposers with through-silicon vias(TSVs)play a key role in the three-dimensional integration and packaging of integrated circuits and microelectromechanical systems.In the current practice of fabricating interposers,solder balls are placed next to the vias;however,this approach requires a large foot print for the input/output(I/O)connections.Therefore,in this study,we investigate the possibility of placing the solder balls directly on top of the vias,thereby enabling a smaller pitch between the solder balls and an increased density of the I/O connections.To reach this goal,inkjet printing(that is,piezo and super inkjet)was used to successfully fill and planarize hollow metal TSVs with a dielectric polymer.The under bump metallization(UBM)pads were also successfully printed with inkjet technology on top of the polymer-filled vias,using either Ag or Au inks.The reliability of the TSV interposers was investigated by a temperature cycling stress test(−40℃ to+125℃).The stress test showed no impact on DC resistance of the TSVs;however,shrinkage and delamination of the polymer was observed,along with some micro-cracks in the UBM pads.For proof of concept,SnAgCu-based solder balls were jetted on the UBM pads.展开更多
Flip chip die-to-wafer bonding faces challenges for industry adoption due to a variety of technical gaps or process integration factors that are not fully developed to high volume manufacturing(HVM)maturity.In this pa...Flip chip die-to-wafer bonding faces challenges for industry adoption due to a variety of technical gaps or process integration factors that are not fully developed to high volume manufacturing(HVM)maturity.In this paper,flip-chip and wire bonding are compared,then flip-chip bonding techniques are compared to examine advantages for scaling and speed.Specific recent 3-year trends in flip-chip die-to-wafer bonding are reviewed to address the key gaps and challenges to HVM adoption.Finally,some thoughts on the care needed by the packaging technology for successful HVM introduction are reviewed.展开更多
Through-silicon via(TSV)is a key enabling technology for the emerging 3-dimension(3 D)integrated circuits(ICs).However,the crosstalk between the neighboring TSVs is one of the important sources of the soft faults.To s...Through-silicon via(TSV)is a key enabling technology for the emerging 3-dimension(3 D)integrated circuits(ICs).However,the crosstalk between the neighboring TSVs is one of the important sources of the soft faults.To suppress the crosstalk,the Fibonacci-numeral-system-based crosstalk avoidance code(FNS-CAC)is an effective scheme.Meanwhile,the self-repair schemes are often used to deal with the hard faults,but the repaired results may change the mapping between signals to TSVs,thus may reduce the crosstalk suppression ability of FNS-CAC.A TSV self-repair technique with an improved FNS-CAC codec is proposed in this work.The codec is designed based on the improved Fibonacci numeral system(FNS)adders,which are adaptive to the health states of TSVs.The proposed self-repair technique is able to suppress the crosstalk and repair the faulty TSVs simultaneously.The simulation and analysis results show that the proposed scheme keeps the crosstalk suppression ability of the original FNS-CAC,and it has higher reparability than the local self-repair schemes,such as the signal-switching-based and the signal-shifting-based counterparts.展开更多
As the increasing desire for more compact,portable devices outpaces Moore’s law,innovation in packaging and system design has played a significant role in the continued miniaturization of electronic systems.Integrati...As the increasing desire for more compact,portable devices outpaces Moore’s law,innovation in packaging and system design has played a significant role in the continued miniaturization of electronic systems.Integrating more active and passive components into the package itself,as the case for system-on-package(SoP),has shown very promising results in overall size reduction and increased performance of electronic systems.With this ability to shrink electrical systems comes the many challenges of sustaining,let alone improving,reliability and performance.The fundamental signal,power,and thermal integrity issues are discussed in detail,along with published techniques from around the industry to mitigate these issues in SoP applications.展开更多
设计了一款采用硅基板作为载体的毫米波上变频微系统系统级封装(System in Package,SiP)模块。该模块利用类同轴硅通孔(Through-Silicon-Via,TSV)结构解决了毫米波频段信号在转接板层间低损耗垂直传输的问题。该结构整体采用四层硅基板...设计了一款采用硅基板作为载体的毫米波上变频微系统系统级封装(System in Package,SiP)模块。该模块利用类同轴硅通孔(Through-Silicon-Via,TSV)结构解决了毫米波频段信号在转接板层间低损耗垂直传输的问题。该结构整体采用四层硅基板封装,并在封装完成后对硅基射频SiP模块进行了测试。测试结果显示,在工作频段29~31 GHz之间,其增益大于27 dB,端口驻波小于1.4,且带外杂散抑制大于55 dB。该毫米波硅基SiP模块具有结构简单、集成度高、射频性能良好等优点,其体积不到传统二维集成结构的5%,实现了毫米波频段模块的微系统化,可广泛运用于射频微系统。展开更多
基金supported by the Aerospace S&T Group Application Innovation Program Project(No:09428ADA)the Key Research and Development Project of Hubei Province(Grant Nos.2020BAB068 and 2021BAA071)。
文摘System-in-packaging(Si P) can realize the integration and miniaturization of electronic devices and it is significant to continue Moore’s law.Through-X-via(TXV) technology is the cornerstone of 3 D-SiP,which enables the vertical stacking and electrical interconnection of electronic devices.TXV originated from through-hole(TH) in PCB substrates and evolved in different substrate materials,such as silicon,glass,ceramic,and polymer.This work provides a comprehensive review of four distinguishing TXV technologies(through silicon via(TSV),through glass via(TGV),through ceramic via(TCV),and through mold via(TMV)),including the fabrication mechanisms,processes,and applications.Every TXV technology has unique characteristics and owns particular processes and functions.The process methods,key technologies,application fields,and advantages and disadvantages of each TXV technology were discussed.The cutting-edge through-hole process and development direction were reviewed.
基金This work is supported by ENIAC-JU Project Prominent Grant No 324189 and Tekes Grant No.40336/12 and Vinnova Grants Nos.2012-04301,2012-04287,and 2012-04314MM is supported by the Academy of Finland Grant Nos.288945 and 294119The work of Silex and KTH was funded in part through an Industrial Ph.D.grant from the Swedish Foundation for Strategic Research(SSF),Grant No.ID14-0033.
文摘Interposers with through-silicon vias(TSVs)play a key role in the three-dimensional integration and packaging of integrated circuits and microelectromechanical systems.In the current practice of fabricating interposers,solder balls are placed next to the vias;however,this approach requires a large foot print for the input/output(I/O)connections.Therefore,in this study,we investigate the possibility of placing the solder balls directly on top of the vias,thereby enabling a smaller pitch between the solder balls and an increased density of the I/O connections.To reach this goal,inkjet printing(that is,piezo and super inkjet)was used to successfully fill and planarize hollow metal TSVs with a dielectric polymer.The under bump metallization(UBM)pads were also successfully printed with inkjet technology on top of the polymer-filled vias,using either Ag or Au inks.The reliability of the TSV interposers was investigated by a temperature cycling stress test(−40℃ to+125℃).The stress test showed no impact on DC resistance of the TSVs;however,shrinkage and delamination of the polymer was observed,along with some micro-cracks in the UBM pads.For proof of concept,SnAgCu-based solder balls were jetted on the UBM pads.
文摘Flip chip die-to-wafer bonding faces challenges for industry adoption due to a variety of technical gaps or process integration factors that are not fully developed to high volume manufacturing(HVM)maturity.In this paper,flip-chip and wire bonding are compared,then flip-chip bonding techniques are compared to examine advantages for scaling and speed.Specific recent 3-year trends in flip-chip die-to-wafer bonding are reviewed to address the key gaps and challenges to HVM adoption.Finally,some thoughts on the care needed by the packaging technology for successful HVM introduction are reviewed.
基金supported in part by the Key-Area Research and Development Program of Guangdong Province(2019B010155002)the National Key Research and Development Project(2018YFB2202600)the Research and Development Project of Shenzhen Government(ZDSYS201802061805105).
文摘Through-silicon via(TSV)is a key enabling technology for the emerging 3-dimension(3 D)integrated circuits(ICs).However,the crosstalk between the neighboring TSVs is one of the important sources of the soft faults.To suppress the crosstalk,the Fibonacci-numeral-system-based crosstalk avoidance code(FNS-CAC)is an effective scheme.Meanwhile,the self-repair schemes are often used to deal with the hard faults,but the repaired results may change the mapping between signals to TSVs,thus may reduce the crosstalk suppression ability of FNS-CAC.A TSV self-repair technique with an improved FNS-CAC codec is proposed in this work.The codec is designed based on the improved Fibonacci numeral system(FNS)adders,which are adaptive to the health states of TSVs.The proposed self-repair technique is able to suppress the crosstalk and repair the faulty TSVs simultaneously.The simulation and analysis results show that the proposed scheme keeps the crosstalk suppression ability of the original FNS-CAC,and it has higher reparability than the local self-repair schemes,such as the signal-switching-based and the signal-shifting-based counterparts.
文摘As the increasing desire for more compact,portable devices outpaces Moore’s law,innovation in packaging and system design has played a significant role in the continued miniaturization of electronic systems.Integrating more active and passive components into the package itself,as the case for system-on-package(SoP),has shown very promising results in overall size reduction and increased performance of electronic systems.With this ability to shrink electrical systems comes the many challenges of sustaining,let alone improving,reliability and performance.The fundamental signal,power,and thermal integrity issues are discussed in detail,along with published techniques from around the industry to mitigate these issues in SoP applications.
