Photolithography has been a major enabler for the continuous shrink of the semiconductor manufacturing design rules.Throughout the years of the development of the photolithography,many new technologies have been inven...Photolithography has been a major enabler for the continuous shrink of the semiconductor manufacturing design rules.Throughout the years of the development of the photolithography,many new technologies have been invented and successfully implemented,such as image projection lithography,chemically amplified photoresist,phase shifting mask,optical proximity modeling and correction,etc.From 0.25μm technology to the current 7 nm technology,the linewidth has been shrunk from 250 nm to about 20 nm,or 12.5 times.Although imaging resolution is proportional to the illumination wavelength,with the new technologies,the wavelength has only been shrunk from 248 nm to 134.7 nm(193 nm immersion in water),less than 2 times.Would it mean that the imaging performance has been continuously declining?Or we have yet fully utilized the potential of the photolithography technology?In this paper,we will present a study on the key parameters and process window performance of the image projection photolithography from 0.25μm node to the current 7 nm node.展开更多
Hollow poly(alpha-methylstyrene)(PAMS)shows application in inertial confinement fusion experiments as the degradable mandrels of glow plasma polymer shells.However,the molecular weight of PAMS has great influence on t...Hollow poly(alpha-methylstyrene)(PAMS)shows application in inertial confinement fusion experiments as the degradable mandrels of glow plasma polymer shells.However,the molecular weight of PAMS has great influence on the quality of mandrels.In this work,this influence was systematically studied using several PAMS samples with different molecular weights.For PAMS shells with 900 mm inner diameter and different wall thickness,when the molecular weight of PAMS is in the range of 300e500 kg·mol^(-1),perfect sphericity and good wall thickness uniformity can be obtained.In contrast,when increasing molecular weight to 800 kg·mol^(-1),the sphericity and the wall thickness uniformity become worse.Moreover,compared with the wall uniformity,the sphericity of PAMS shells was much less sensitive to the molecular weight.The results also showed that the stability of W1/O compound droplets of PAMS shells were less affected by the molecular weight.It was revealed that the wall uniformity and the sphericity of the PAMS shells were associated with the diffusion rates of fluorobenzene(FB).展开更多
In order to improve the matrix performance of impregnated diamond drill bit to better meet the drilling needs,the effects of the addition of nano-WC and nano-NbC particles on the matrix material together with the mech...In order to improve the matrix performance of impregnated diamond drill bit to better meet the drilling needs,the effects of the addition of nano-WC and nano-NbC particles on the matrix material together with the mechanical properties and microstructure of the diamond-matrix composite material of the Fe-based diamond drill bit were studied by using the method of uniform formula design,regression analysis and solution finding.An indoor drilling test was also carried out using the fabricated impregnated diamond drill bit.The results showed that after the addition of nano-NbC and nano-WC,the hardness and flexural strength of the matrix material got improved,as the flexural strength of the diamond composite material increased to 4.29%,the wear-resistance ratio increased to 8.75%,and the tighter the chemical bonding between the diamond and the matrix.This,indicates that the addition of nanoparticles has a positive significance in improving the performance of the diamond composite.The results of the drilling test showed that the mechanical drilling speed of the impregnated diamond drill bit after nanoparticle strengthening is 25.85%higher than that of the conventional drill bit,and the matrix wear was increased by 17.5%.It proves that nanoparticles can improve the drilling performance and efficiency of drill bit.展开更多
Artificial solid electrolyte interphase(SEI) is promising to inhibit uncontrollable lithium dendrites and enable long cycling stability for lithium metal batteries. However, the essential mechanical stability is limit...Artificial solid electrolyte interphase(SEI) is promising to inhibit uncontrollable lithium dendrites and enable long cycling stability for lithium metal batteries. However, the essential mechanical stability is limited since organic layers generally have low modulus whereas intrinsic brittleness for inorganic ones remains a great concern. Polymer-based SEIs with rigid and flexible chains in adequate mechanical properties are supposed to address this issue. Herein, a homogeneous and mechanically stable diffusion layer is achieved by blending rigid chains of polyphenylene sulfone(PPSU) with flexible chains of poly(vinylidene fluoride)(PVDF) in a hybrid membrane, enabling uniform diffusion and stabilizing the lithium metal anode. The Li||Cu cell with the protected electrode exhibits a long lifetime more than 450 cycles(0.5 m A cm^(-2), 1.0 m A h cm^(-2))(fourfold longer than the control group) with higher average Coulombic efficiency of 98.7%. Enhanced performances are also observed at Li||Li and full cell configurations. The improved performances are attributed to the controlled morphology and stable interphase, according to scanning electron microscopy(SEM) and electrochemical impedance. This research advances the idea of uniform lithium plating and provides a new insight on how to create a homogeneous and mechanically stable diffusion layer using rigid-flexible polymers.展开更多
文摘Photolithography has been a major enabler for the continuous shrink of the semiconductor manufacturing design rules.Throughout the years of the development of the photolithography,many new technologies have been invented and successfully implemented,such as image projection lithography,chemically amplified photoresist,phase shifting mask,optical proximity modeling and correction,etc.From 0.25μm technology to the current 7 nm technology,the linewidth has been shrunk from 250 nm to about 20 nm,or 12.5 times.Although imaging resolution is proportional to the illumination wavelength,with the new technologies,the wavelength has only been shrunk from 248 nm to 134.7 nm(193 nm immersion in water),less than 2 times.Would it mean that the imaging performance has been continuously declining?Or we have yet fully utilized the potential of the photolithography technology?In this paper,we will present a study on the key parameters and process window performance of the image projection photolithography from 0.25μm node to the current 7 nm node.
基金This work was supported by the Nation Natural Science Foundation of China(Grant number v1530260)the Major State Basic Research Projects(Grant number 2014B0302052).
文摘Hollow poly(alpha-methylstyrene)(PAMS)shows application in inertial confinement fusion experiments as the degradable mandrels of glow plasma polymer shells.However,the molecular weight of PAMS has great influence on the quality of mandrels.In this work,this influence was systematically studied using several PAMS samples with different molecular weights.For PAMS shells with 900 mm inner diameter and different wall thickness,when the molecular weight of PAMS is in the range of 300e500 kg·mol^(-1),perfect sphericity and good wall thickness uniformity can be obtained.In contrast,when increasing molecular weight to 800 kg·mol^(-1),the sphericity and the wall thickness uniformity become worse.Moreover,compared with the wall uniformity,the sphericity of PAMS shells was much less sensitive to the molecular weight.The results also showed that the stability of W1/O compound droplets of PAMS shells were less affected by the molecular weight.It was revealed that the wall uniformity and the sphericity of the PAMS shells were associated with the diffusion rates of fluorobenzene(FB).
基金National Center for International Research on Deep Earth Drilling and Resource Development,Faculty of Engineering,China University of Geosciences(Wuhan)(No.DEDRD-2022-08).
文摘In order to improve the matrix performance of impregnated diamond drill bit to better meet the drilling needs,the effects of the addition of nano-WC and nano-NbC particles on the matrix material together with the mechanical properties and microstructure of the diamond-matrix composite material of the Fe-based diamond drill bit were studied by using the method of uniform formula design,regression analysis and solution finding.An indoor drilling test was also carried out using the fabricated impregnated diamond drill bit.The results showed that after the addition of nano-NbC and nano-WC,the hardness and flexural strength of the matrix material got improved,as the flexural strength of the diamond composite material increased to 4.29%,the wear-resistance ratio increased to 8.75%,and the tighter the chemical bonding between the diamond and the matrix.This,indicates that the addition of nanoparticles has a positive significance in improving the performance of the diamond composite.The results of the drilling test showed that the mechanical drilling speed of the impregnated diamond drill bit after nanoparticle strengthening is 25.85%higher than that of the conventional drill bit,and the matrix wear was increased by 17.5%.It proves that nanoparticles can improve the drilling performance and efficiency of drill bit.
基金supported by the National Natural Science Foundation of China (Grant No. 22109008)。
文摘Artificial solid electrolyte interphase(SEI) is promising to inhibit uncontrollable lithium dendrites and enable long cycling stability for lithium metal batteries. However, the essential mechanical stability is limited since organic layers generally have low modulus whereas intrinsic brittleness for inorganic ones remains a great concern. Polymer-based SEIs with rigid and flexible chains in adequate mechanical properties are supposed to address this issue. Herein, a homogeneous and mechanically stable diffusion layer is achieved by blending rigid chains of polyphenylene sulfone(PPSU) with flexible chains of poly(vinylidene fluoride)(PVDF) in a hybrid membrane, enabling uniform diffusion and stabilizing the lithium metal anode. The Li||Cu cell with the protected electrode exhibits a long lifetime more than 450 cycles(0.5 m A cm^(-2), 1.0 m A h cm^(-2))(fourfold longer than the control group) with higher average Coulombic efficiency of 98.7%. Enhanced performances are also observed at Li||Li and full cell configurations. The improved performances are attributed to the controlled morphology and stable interphase, according to scanning electron microscopy(SEM) and electrochemical impedance. This research advances the idea of uniform lithium plating and provides a new insight on how to create a homogeneous and mechanically stable diffusion layer using rigid-flexible polymers.
