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超光滑光学表面加工技术发展及应用 被引量:13
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作者 马占龙 刘健 王君林 《激光与光电子学进展》 CSCD 北大核心 2011年第8期71-77,共7页
超光滑表面在现代光学领域的应用愈来愈广泛,相应的超光滑表面加工技术也就成为超精密加工技术的重要组成部分。介绍了超光滑表面的特点,对其加工技术进行了分类比较,认为非接触式加工方式是获得超光滑表面的理想方法。对国内外现有超... 超光滑表面在现代光学领域的应用愈来愈广泛,相应的超光滑表面加工技术也就成为超精密加工技术的重要组成部分。介绍了超光滑表面的特点,对其加工技术进行了分类比较,认为非接触式加工方式是获得超光滑表面的理想方法。对国内外现有超光滑表面加工技术的发展进行了归纳总结,详细阐述了各种技术的加工原理、加工精度及应用范围等。指出了国内超光滑表面加工技术与国际先进水平相比存在的差距,并分析了超光滑表面加工技术的发展趋势。 展开更多
关键词 光学制造 超光滑 光学表面 粗糙度 抛光
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超高精度光学元件加工技术 被引量:11
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作者 马占龙 王君林 《红外与激光工程》 EI CSCD 北大核心 2013年第6期1485-1490,共6页
为满足193 nm投影光刻物镜对光学元件不同频段的精度要求,提出了一种将超光滑加工和高精度面形修正相结合的超高精度光学元件加工技术。分别介绍了微射流超光滑加工技术和离子束高精度面形修正技术的基本原理。在自行研制的微射流超光... 为满足193 nm投影光刻物镜对光学元件不同频段的精度要求,提出了一种将超光滑加工和高精度面形修正相结合的超高精度光学元件加工技术。分别介绍了微射流超光滑加工技术和离子束高精度面形修正技术的基本原理。在自行研制的微射流超光滑加工机床和购置的离子束加工机床上对一直径Φ100 mm的熔石英平面镜进行了超高精度加工,经两次超光滑和一次离子束迭代加工后其面形由初始的rms值35.042 nm改善到3.393 nm,中频粗糙度由rms值0.389 nm改善到0.309 nm,高频粗糙度rms值由0.218 nm改善到0.080 2 nm。最后采用功率谱密度函数对加工前后的光学元件表面质量进行了分析评价。结果表明:采用微射流超光滑加工技术和离子束加工技术相结合的加工方法可以全面提升光学元件的面形精度和中、高频粗糙度,通过合理的工艺优化完全能够获得满足193nm投影光刻物镜要求的超高精度光学元件。 展开更多
关键词 光学制造 超光滑 离子束 面形精度 表面粗糙度
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Numerical simulation of materials-oriented ultra-precision diamond cutting:review and outlook 被引量:1
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作者 Liang Zhao Junjie Zhang +3 位作者 Jianguo Zhang Houfu Dai Alexander Hartmaier Tao Sun 《International Journal of Extreme Manufacturing》 SCIE EI CAS CSCD 2023年第2期1-21,共21页
Ultra-precision diamond cutting is a promising machining technique for realizing ultra-smooth surface of different kinds of materials.While fundamental understanding of the impact of workpiece material properties on c... Ultra-precision diamond cutting is a promising machining technique for realizing ultra-smooth surface of different kinds of materials.While fundamental understanding of the impact of workpiece material properties on cutting mechanisms is crucial for promoting the capability of the machining technique,numerical simulation methods at different length and time scales act as important supplements to experimental investigations.In this work,we present a compact review on recent advancements in the numerical simulations of material-oriented diamond cutting,in which representative machining phenomena are systematically summarized and discussed by multiscale simulations such as molecular dynamics simulation and finite element simulation:the anisotropy cutting behavior of polycrystalline material,the thermo-mechanical coupling tool-chip friction states,the synergetic cutting responses of individual phase in composite materials,and the impact of various external energetic fields on cutting processes.In particular,the novel physics-based numerical models,which involve the high precision constitutive law associated with heterogeneous deformation behavior,the thermo-mechanical coupling algorithm associated with tool-chip friction,the configurations of individual phases in line with real microstructural characteristics of composite materials,and the integration of external energetic fields into cutting models,are highlighted.Finally,insights into the future development of advanced numerical simulation techniques for diamond cutting of advanced structured materials are also provided.The aspects reported in this review present guidelines for the numerical simulations of ultra-precision mechanical machining responses for a variety of materials. 展开更多
关键词 diamond cutting ultra-smooth surface material-oriented physics-based simulation model molecular dynamics finite element
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Application of ultra-smooth composite diamond film coated WC-Co drawing dies under water-lubricating conditions 被引量:5
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作者 沈彬 孙方宏 +2 位作者 张志明 沈荷生 郭松寿 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2013年第1期161-169,共9页
A specific revised HFCVD apparatus and a novel process combining HFCVD and polishing technique were presented to deposit the micro-and nano-crystalline multilayered ultra-smooth diamond(USCD) film on the interior-ho... A specific revised HFCVD apparatus and a novel process combining HFCVD and polishing technique were presented to deposit the micro-and nano-crystalline multilayered ultra-smooth diamond(USCD) film on the interior-hole surface of WC-Co drawing dies with aperture ranging from d1.0 mm to 60 mm.Characterization results indicate that the surface roughness values(Ra) in the entry zone,drawing zone and bearing zone of as-fabricated USCD coated drawing die were measured as low as 25.7,23.3 and 25.5 nm,respectively.Furthermore,the friction properties of USCD films were examined in both dry sliding and water-lubricating conditions,and the results show that the USCD film presents much superior friction properties.Its friction coefficients against ball-bearing steel,copper and silicon nitride balls(d4 mm),is always lower than that of microcrystalline diamond(MCD) or WC-Co sample,regardless of the lubricating condition.Meanwhile,it still presents competitive wear resistance with the MCD films.Finally,the working lifetime and performance of as-fabricated USCD coated drawing dies were examined under producing low-carbon steel pipes in dry-sliding and water-lubricating conditions.Under the water-lubricating drawing condition,its production significantly increases by about 20 times compared with the conventional WC-Co drawing dies. 展开更多
关键词 CVD diamond coated drawing die ultra-smooth composite diamond(USCD) film friction properties water-lubricating drawing dry sliding water lubrication
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MOLECULAR DYNAMICS SIMULATION OF POLISHING PROCESS BASED ON COUPLING VIBRATIONS OF LIQUID 被引量:2
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作者 HUANG Zhigang GUO Zhongning +3 位作者 CHENG Xing YU Daming DU Xue LI Rongbing 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2006年第1期19-24,共6页
Molecular dynamics method is applied to study the machining mechanisms of polishing based on coupling vibrations of liquid. The physical phenomena of abrasive particles bombarding on silicon monocrystal surface are si... Molecular dynamics method is applied to study the machining mechanisms of polishing based on coupling vibrations of liquid. The physical phenomena of abrasive particles bombarding on silicon monocrystal surface are simulated using Tersoff potentials. The effects of vibration parameters, particle size, incident angle and particle material are analyzed and discussed. Material removal mechanisms are studied. Deformation and embedment phenomena are found in the simulations, Bombardment will destroy the crystal structures near the impact point, and adhesion effect is responsible for final removal of material. 展开更多
关键词 Molecular dynamics simulation ultra-smooth polishing ultrasonic vibration
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Mode transition from adsorption removal to bombardment removal induced by nanoparticle-surface collisions in fluid jet polishing 被引量:4
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作者 Xuechu ZHAO Liran MA Xuefeng XU 《Friction》 SCIE EI CAS CSCD 2021年第5期1127-1137,共11页
The effects of impacting particles from a jet of liquid on the removal of a surface material(on the impacted workpiece)were investigated.Experimental observations show that the cross section of the material removed ch... The effects of impacting particles from a jet of liquid on the removal of a surface material(on the impacted workpiece)were investigated.Experimental observations show that the cross section of the material removed changed fromʹWʹ‐shaped toʹUʹ‐shaped as the size of abrasive particles was increased.Comparisons between removed material profiles and particle collision distributions indicate that the particle-surface collisions are the main reason for the material removal.The deduced number of atoms removed by a single collision implies that a transition occurs in the removal mode.For nanoscale particles,the polished surface is likely to be removed in an atom‐by‐atom manner,possibly due to the chemisorption of the impacting particles on the impacted surface.Contrarily,for the case of microscale particles,bulk material removal produced by particle bombardment is more likely to occur.The present mechanism of material removal for particle-surface collisions is further corroborated experimentally. 展开更多
关键词 ultrasmooth surface fluid jet polishing nanoparticle-surface collision material removal
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Polishing and planarization of single crystal diamonds: state-of-the-art and perspectives 被引量:4
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作者 Hu Luo Khan Muhammad Ajmal +2 位作者 Wang Liu Kazuya Yamamura Hui Deng 《International Journal of Extreme Manufacturing》 EI 2021年第2期45-87,共43页
Diamond is a promising material for the modern industry. It is widely used in different applications, such as cutting tools, optical windows, heat dissipation, and semiconductors.However, these application areas requi... Diamond is a promising material for the modern industry. It is widely used in different applications, such as cutting tools, optical windows, heat dissipation, and semiconductors.However, these application areas require exceptionally flattened and polished diamond surfaces.Unfortunately, due to the extreme hardness and chemical inertness of diamond, the polishing of diamond is challenging. Since the 1920s, various conventional and modern mechanical,chemical, and thermal polishing techniques have been proposed and developed for finishing diamond surfaces. Therefore, to impart proper guidance on selecting a good polishing technique for production practice, this paper presents an in-depth and informative literature survey of the current research and engineering developments regarding diamond polishing. At first, a brief review of the general developments and basic material removal principles is discussed. This review concludes with a detailed analysis of each techniques' polishing performance and critical challenges, and a discussion of the new insights and future applications of diamond polishing. 展开更多
关键词 diamond polishing material removal anisotropy ultra-smooth surface chemical reaction surface quality
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熔石英元件纳米射流超光滑抛光流场仿真与实验 被引量:3
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作者 杨平 彭文强 +1 位作者 李圣怡 石峰 《航空精密制造技术》 2016年第4期4-9,共6页
利用计算流体力学软件Fluent对纳米颗粒射流超光滑加工的流场分布特点进行了流体动力学分析。基于仿真结果对去除函数的变化规律进行了研究,通过具体实验来对流体动力学仿真结果进行了验证。搭建了纳米射流抛光装置,利用该装置对熔石英... 利用计算流体力学软件Fluent对纳米颗粒射流超光滑加工的流场分布特点进行了流体动力学分析。基于仿真结果对去除函数的变化规律进行了研究,通过具体实验来对流体动力学仿真结果进行了验证。搭建了纳米射流抛光装置,利用该装置对熔石英元件进行了加工。原子力显微镜观测结果表明熔石英元件表面粗糙度RMS值由初始的0.680 nm减小到了0.307 nm,实现了超光滑加工。 展开更多
关键词 纳米胶体射流 流场分析 熔石英 超光滑
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微射流抛光机理仿真及实验研究 被引量:3
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作者 马占龙 王君林 《光电工程》 CAS CSCD 北大核心 2012年第5期139-144,共6页
为实现193nm投影物镜光学元件的超光滑加工,介绍了一种非接触式微射流超光滑表面加工方法,对该方法的材料去除特性和超光滑加工效果进行研究。首先,采用计算流体动力学理论对其材料去除机理进行了仿真研究,通过对微射流流场的压力、速... 为实现193nm投影物镜光学元件的超光滑加工,介绍了一种非接触式微射流超光滑表面加工方法,对该方法的材料去除特性和超光滑加工效果进行研究。首先,采用计算流体动力学理论对其材料去除机理进行了仿真研究,通过对微射流流场的压力、速度和表面剪切力的分析得到其去除函数形状与表面剪切力的分布相反,呈现W型。随后,采用正交法对各工艺参数对抛光效果的影响进行了综合分析,结果表明材料去除效率随入射速度和磨料浓度的增大而增大,随工作距离增大而减小,并且工作距离具有显著影响,为实验研究中工艺参数的选取提供了指导意义。最后,在自研的微射流抛光机床上对一平面熔石英进行了抛光实验,加工样件表面粗糙度均方根值由初始的1.02nm降为0.56nm。实验结果表明,微射流抛光技术可以用于光学元件的超光滑加工。 展开更多
关键词 光学制造 微射流抛光 流体动力学 超光滑
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Application of atmospheric pressure plasma polishing method in machining of silicon ultra-smooth surfaces 被引量:3
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作者 Jufan ZHANG Bo WANG Shen DONG 《Frontiers of Electrical and Electronic Engineering in China》 CSCD 2008年第4期480-487,共8页
The modern optics industry demands rigorous surface quality with minimum defects,which presents challenges to optics machining technologies.There are always certain defects on the final surfaces of the compo-nents for... The modern optics industry demands rigorous surface quality with minimum defects,which presents challenges to optics machining technologies.There are always certain defects on the final surfaces of the compo-nents formed in conventional contacting machining proc-esses,such as micro-cracks,lattice disturbances,etc.It is especially serious for hard-brittle functional materials,such as crystals,glass and ceramics because of their special characteristics.To solve these problems,the atmospheric pressure plasma polishing(APPP)method is developed.It utilizes chemical reactions between reactive plasma and surface atoms to perform atom-scale material removal.Since the machining process is chemical in nature,APPP avoids the surface/subsurface defects mentioned above.As the key component,a capacitance coupled radio-fre-quency plasma torch is first introduced.In initial opera-tions,silicon wafers were machined as samples.Before applying operations,both the temperature distribution on the work-piece surface and the spatial gas diffusion in the machining process were studied qualitatively by finite element analysis.Then the following temperature measurement experiments demonstrate the formation of the temperature gradient on the wafer surface predicted by the theoretical analysis and indicated a peak temper-ature about 90uC in the center.By using commercialized form talysurf,the machined surface was detected and the result shows regular removal profile that corresponds well to the flow field model.Moreover,the removal profile also indicates a 32 mm^(3)/min removal rate.By using atomic force microscopy(AFM),the surface roughness was also measured and the result demonstrates an Ra 0.6 nm surface roughness.Then the element composition of the machined surface was detected and analyzed by X-ray photoelectron spectroscopy(XPS)technology.The results also demonstrate the occurrence of the anticipated main reactions.All the experiments have proved that this atmospheric pressure plasma polishing method has the potential to achieve the m 展开更多
关键词 atmospheric pressure plasma ultra-smooth surface single crystal silicon capacitance coupled polish-ing
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一种新型古典抛光工艺的技术研究 被引量:1
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作者 王松伟 姚合宝 蒋军彪 《航空精密制造技术》 2007年第2期18-20,共3页
对抛光模的制作、抛光粉的添加、加压的方式以及抛光后的清洗这一整套生产流程中所涉及的核心技术进行了部分改进和详细介绍,并最终给出了古典法抛光后的玻璃表面利用AFM检测后的表面形貌图,表面的粗糙度、划痕等微观缺陷明显改善。
关键词 抛光模 抛光粉 光胶垫板 超光滑
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A New Method for the Ultra-smooth Machining of the Silicon Based Materials
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作者 王波 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2009年第S1期244-246,共3页
A New method,named atmospheric pressure plasma polishing,for the ultra-smooth machining of the silicon based materials is introduced.By inputting the CF4 gas into the atmospheric pressure plasma flame,high density rea... A New method,named atmospheric pressure plasma polishing,for the ultra-smooth machining of the silicon based materials is introduced.By inputting the CF4 gas into the atmospheric pressure plasma flame,high density reactive radicals will be generated,which will then react with the silicon based materials.The reaction product is the vaporization of the SiF4,which can be easily processed.In this way,the atomic scale material removal can be realized and the defect free ultra-smooth surface can be obtained.An experimental setup is built up,and the SiC polishing experiment is carried out.The AFM test result shows that the finished surface roughness (Ra) can be improved from 4.529 nm to 0.926 nm in 3 minutes. 展开更多
关键词 atmospheric pressure plasma silicon based materials ultra-smooth
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离子束入射角对熔石英表面粗糙度的影响
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作者 张宁 王春阳 +2 位作者 范佳鑫 李晓静 张旭 《长春理工大学学报(自然科学版)》 2022年第1期100-104,共5页
超光滑的表面对高性能光学系统的性能至关重要,为了可以实现离子束抛光对元件表面超光滑的制造,离子束抛光(ion beam figuring,IBF)引起的元件表面形貌光滑化和粗糙化在很大程度上取决于加工条件。通常不正确的离子束抛光方法会导致光... 超光滑的表面对高性能光学系统的性能至关重要,为了可以实现离子束抛光对元件表面超光滑的制造,离子束抛光(ion beam figuring,IBF)引起的元件表面形貌光滑化和粗糙化在很大程度上取决于加工条件。通常不正确的离子束抛光方法会导致光学表面的粗糙度增加,选择合适的加工方法可以减小表面的粗糙度,实现表面的超光滑。结果表明:基于高精度的离子束抛光技术,为了改善熔石英表面粗糙度,采用了0°~45°之间不同入射角度的离子束倾斜抛光进行研究,小角度(0°~30°)倾斜入射抛光可以较好地改善表面粗糙度,实现了离子束倾斜超光滑表面的生成,而在大入射角时观察到纳米级波纹图案,粗糙度值显著增大,不利于生成超光滑的表面。 展开更多
关键词 超光滑 离子束 粗糙度 入射角度
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等离子抛光石英玻璃表面粗糙度研究 被引量:1
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作者 郑才国 陈庆川 +2 位作者 聂军伟 李民久 陈美艳 《实验室研究与探索》 CAS 北大核心 2020年第2期9-11,59,共4页
为了实现光学元件表面超光滑加工,避免传统机械加工方法造成的亚表面损伤,将射频等离子体加工应用于石英玻璃抛光加工。分析了通过调节离子束的能量、束流密度和入射角等工艺参数对抛光效果的影响。试验结果表明,随离子束能量的增加,试... 为了实现光学元件表面超光滑加工,避免传统机械加工方法造成的亚表面损伤,将射频等离子体加工应用于石英玻璃抛光加工。分析了通过调节离子束的能量、束流密度和入射角等工艺参数对抛光效果的影响。试验结果表明,随离子束能量的增加,试件的表面粗糙度RMS先减小后增大,当离子束能量为200~600 eV时试件表面粗糙度明显提高,为离子束抛光能量最佳范围。离子束流入射最佳角度范围为45°~60°,随着离子束抛光时间的增加,试样表面粗糙度先降低后增大。 展开更多
关键词 离子束抛光 超光滑 射频离子源 表面粗糙度
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超光滑表面的形成与抛光时间之间的关系研究 被引量:1
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作者 王松伟 姚合宝 +1 位作者 蒋军彪 胡志强 《应用光学》 CAS CSCD 2008年第5期705-707,共3页
由于加工超光滑表面的古典法对加工者的经验要求较高,而且不同的加工者对抛光时间长短的控制也有较大的差别,因而下盘时机的准确判断将会对超光滑表面的加工质量产生严重的影响。为此,对所加工的全反射棱镜的超光滑表面抛光不同的时间,... 由于加工超光滑表面的古典法对加工者的经验要求较高,而且不同的加工者对抛光时间长短的控制也有较大的差别,因而下盘时机的准确判断将会对超光滑表面的加工质量产生严重的影响。为此,对所加工的全反射棱镜的超光滑表面抛光不同的时间,并在全反射条件下,根据全反射棱镜背向散射光斑的大小和亮暗的程度来判断所加工超光滑表面加工质量的检测方法,最终给出超光滑表面的抛光质量随抛光时间的变化。在实验结果的基础上得出了抛光质量随抛光时间交替变化的基本规律,并根据加工经验总结出了超光滑表面加工过程中的注意事项和判断下盘时机的基本方法。 展开更多
关键词 激光陀螺 超光滑 抛光模 抛光粉
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氢氟酸在超光滑玻璃表面纳米颗粒清洗中的应用研究 被引量:1
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作者 王潺 金天义 +2 位作者 郝立凯 李钱陶 熊长新 《光学与光电技术》 2020年第1期63-67,共5页
为了去除超光滑玻璃表面的纳米级颗粒,利用白光干涉仪和原子力显微镜对普通湿法清洗和氢氟酸(HF)清洗后的超光滑抛光样件进行检测,研究了氢氟酸对纳米级颗粒的清洗效果。研究表明,在普通湿法清洗后,增加浓度为2%(V/V)的氢氟酸清洗10 mi... 为了去除超光滑玻璃表面的纳米级颗粒,利用白光干涉仪和原子力显微镜对普通湿法清洗和氢氟酸(HF)清洗后的超光滑抛光样件进行检测,研究了氢氟酸对纳米级颗粒的清洗效果。研究表明,在普通湿法清洗后,增加浓度为2%(V/V)的氢氟酸清洗10 min以上,可以有效去除超光滑玻璃表面残留的纳米级颗粒。 展开更多
关键词 超光滑 氢氟酸 纳米颗粒 粗糙度 清洗
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Ultra-smooth CsPbI_(2)Br film via programmable crystallization process for high-efficiency inorganic perovskite solar cells
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作者 Fu Zhang Zhu Ma +9 位作者 Taotao Hua Rui Liu Qiaofeng Wu Yu Yue Hua Zhang Zheng Xiao Meng Zhang Wenfeng Zhang Xin Chen Hua Yu 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2021年第7期150-156,共7页
CsPbI_(2)Br is an ideal inorganic perovskite material with a reasonable bandgap for solar cell applications because of its advantage of superior thermal and phase stability. However, the performance of CsPbI2Br based ... CsPbI_(2)Br is an ideal inorganic perovskite material with a reasonable bandgap for solar cell applications because of its advantage of superior thermal and phase stability. However, the performance of CsPbI2Br based solar cells highly relied on the perovskite crystallization process along with the interfacial contact engineering process between CsPbI_(2)Br perovskite and charge-transporting layers. In this work, a programmable crystallization method is developed to obtain ultra-smooth CsPbI_(2)Br perovskite film with a well-engineered contact interface in perovskite solar cells. This method combines a pre-stand-by process with a programmable gradient thermal engineering process, which mediates the crystal growth dynamics process of CsPbI2Br perovskite by controlling the release of dimethyl sulfoxide(DMSO) from its coordinates with the perovskite film, leading to high-quality CsPbI_(2)Br film with large-scale crystalline grains, reduced surface roughness, and low trap density. Fabricated perovskite devices based on CsPbI_(2)Br film obtained by this method deliver power conversion efficiency of 14.55 %;meanwhile, the encapsulated CsPbI_(2)Br perovskite device achieves a maximum efficiency of 15.07 %. This decent solar conversion efficiency demonstrates the effectiveness of the programmable crystallization method used in this work,which shows great potential as a universal approach in obtaining high-quality CsPbI_(2)Br perovskite films for fabricating high-efficiency inorganic perovskite solar cells. 展开更多
关键词 CsPbI_(2)Br ultra-smooth morphology Interface Crystallization Inorganic perovskites
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非绝热近场光学诱导平滑硅表面微结构的电场模拟
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作者 孙晓雁 沈正祥 +6 位作者 童广德 张锦龙 王占山 沈正祥 童广德 张锦龙 王占山 《红外与激光工程》 EI CSCD 北大核心 2014年第3期800-805,共6页
如何进一步降低超光滑光学元件表面缺陷是现代超精密光学元件制作技术研究的热点之一。在传统抛光方法的基础上,引入非绝热近场光学诱导平滑硅表面微结构这一新型方法,进一步去除超光滑抛光表面残留的纳米级表面微缺陷,降低表面粗糙度... 如何进一步降低超光滑光学元件表面缺陷是现代超精密光学元件制作技术研究的热点之一。在传统抛光方法的基础上,引入非绝热近场光学诱导平滑硅表面微结构这一新型方法,进一步去除超光滑抛光表面残留的纳米级表面微缺陷,降低表面粗糙度。通过建立超光滑硅表面的微结构几何模型,采用时域有限差分法对表面微结构凸起在532 nm激光作用下的局域电场增强进行数值模拟。对比不同尺度的微结构所激发的最大电场强度表明,在基底峰谷值小于25.5 nm时,随微结构尺度递增,所激发的局域电场强度最大值约呈线性增长;随微结构倾斜率的逐渐递增,电场强度最大值也呈递增趋势。通过对激光诱导表面微结构调制电场的数值模拟,构建了硅表面微结构诱导平滑的物理图像,为描绘激光辐照下非绝热近场光学诱导平滑表面微结构的物理过程提供了有力的理论支持。 展开更多
关键词 近场光学 超光滑 时域有限差分 电场模拟 光化学反应
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超光滑表面抛光技术 被引量:29
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作者 陈杨 陈建清 陈志刚 《江苏大学学报(自然科学版)》 EI CAS 2003年第5期55-59,共5页
超光滑表面抛光技术是超精密加工体系的一个重要组成部分,超光滑表面在国防和民用等领域都有着广泛的应用 文中介绍了超光滑表面的物理特征和应用,并根据抛光过程中工件与抛光盘之间的接触状态,将各种抛光方法分为直接接触、准接触和非... 超光滑表面抛光技术是超精密加工体系的一个重要组成部分,超光滑表面在国防和民用等领域都有着广泛的应用 文中介绍了超光滑表面的物理特征和应用,并根据抛光过程中工件与抛光盘之间的接触状态,将各种抛光方法分为直接接触、准接触和非接触3类,对每一种抛光方法作了总体的描述,详细地介绍了近年来发展的激光抛光技术和化学机械抛光技术及其超光滑表面抛光的加工机理。 展开更多
关键词 抛光 超光滑表面 机理 评价
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大气等离子体抛光技术在超光滑硅表面加工中的应用 被引量:18
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作者 张巨帆 王波 董申 《光学精密工程》 EI CAS CSCD 北大核心 2007年第11期1749-1755,共7页
发展了大气等离子体抛光方法,并用于超光滑表面加工。该技术基于低温等离子体化学反应来实现原子级的材料去除,避免了表层和亚表层损伤。运用原子发射光谱法证明了活性反应原子的有效激发,进而揭示了特定激发态原子对应的电子跃迁轨道... 发展了大气等离子体抛光方法,并用于超光滑表面加工。该技术基于低温等离子体化学反应来实现原子级的材料去除,避免了表层和亚表层损伤。运用原子发射光谱法证明了活性反应原子的有效激发,进而揭示了特定激发态原子对应的电子跃迁轨道。在针对单晶硅片的加工实验中,应用有限元分析法在理论上对加工过程中的空间气体流场分布和样品表面温度分布进行了定性分析。后续的温度检测实验证实了样品表面温度梯度的形成,并表明样品表面最高温度仅为90℃。材料去除轮廓检测结果符合空间流场的理论分布模型,加工速率约为32 mm3/min。利用原子力显微镜对表面粗糙度进行测量,证实了加工后样品表面在一定范围内表面粗糙度Ra=0.6 nm。最后,利用X射线光电子谱法研究了该方法对加工后表面材料化学成分的影响。实验和检测结果均表明,该抛光方法可以进行常压条件下的超光滑表面无损抛光加工,实现了高质量光学表面的无损抛光加工。 展开更多
关键词 大气等离子体抛光法 超光滑表面 单晶硅 电容耦合
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