采用深紫外光刻及等离子体刻蚀等工艺制备基于绝缘体上硅材料的环形滤波器,且微环半径仅为5μm。制备基于单微环的4通道光分插复用器,器件尺寸仅为3000μm×500μm。测试结果表明,该器件可以很好地实现上下载功能。其自由频谱宽度约...采用深紫外光刻及等离子体刻蚀等工艺制备基于绝缘体上硅材料的环形滤波器,且微环半径仅为5μm。制备基于单微环的4通道光分插复用器,器件尺寸仅为3000μm×500μm。测试结果表明,该器件可以很好地实现上下载功能。其自由频谱宽度约为19.6 nm,最大消光比为19.76 d B。同时优化设计制备基于跑道型双微环可调谐光分插复用器。对这两种结构的光分插复用器的相邻信道间串扰进行测试,基于单微环滤波器和跑道型双微环滤波器的信道间最大串扰分别为-11.94 d B和-20.04 d B。所设计的基于双微环光分插复用器上下载通道与主信道间没有交叉波导结构,因此相邻通道串扰明显低于单环型的光分插复用器。同时设计并制备基于双微环PIN结型电光调制器。当偏置电压增加到1.6 V时,谐振峰发生0.78 nm的蓝移,并对测试结果进行分析。展开更多
Free-spectral-range(FSR)-free optical filters have always been a critical challenge for photonic integrated circuits.A high-performance FSR-free filter is highly desired for communication,spectroscopy,and sensing appl...Free-spectral-range(FSR)-free optical filters have always been a critical challenge for photonic integrated circuits.A high-performance FSR-free filter is highly desired for communication,spectroscopy,and sensing applications.Despite significant progress in integrated optical filters,the FSR-free filter with a tunable narrow-band,high out-of-band rejection,and large fabrication tolerance has rarely been demonstrated.In this paper,we propose an exact and robust design method for add-drop filters(ADFs)with an FSR-free operation capability,a sub-nanometer optical bandwidth,and a high out-of-band rejection(OBR)ratio.The achieved filter has a 3-dB bandwidth of<0.5 nm and an OBR ratio of 21.5 dB within a large waveband of 220 nm,which to the best of our knowledge,is the largest-FSR ADF demonstrated on a silicon photonic platform.The filter exhibits large tunability of 12.3 nm with a heating efficiency of 97 pm/mW and maintains the FSR-free feature in the whole tuning process.In addition,we fabri-cated a series of ADFs with different periods,which all showed reliable and excellent performances.展开更多
Optical filters with different configurations based on cholesteric liquid crystals （CLCs） are designed. The central wavelength from CLCs can be tuned by the electric field or temperature. For the electric field tuni...Optical filters with different configurations based on cholesteric liquid crystals （CLCs） are designed. The central wavelength from CLCs can be tuned by the electric field or temperature. For the electric field tuning, the ITO is designed with circular patterns, which can make the tunable range 18 nm. For the temperature tuning, two-layer- CLC configurations are used. The experimental results indicate that a deepened or broadened bandgap from the CLC can be achieved by different handedness or concentrations of chiral dopants. The spectrum study is carried out.展开更多
The author＇s research activities undertaken at the Applied Optics Group, the University of Kent at Canterbury are reviewed, during his time there from 1988-1992 and 1994-1996, followed by a summary of recent research...The author＇s research activities undertaken at the Applied Optics Group, the University of Kent at Canterbury are reviewed, during his time there from 1988-1992 and 1994-1996, followed by a summary of recent research. The areas of interest are high finesse ring resonators, tunable optical filters, novel optical fiber grating sensors in glass and polymer, femtosecond laser inscription and micromachining, environmental pollution monitoring, hydrogen activated Pd films on silicon and impurity measurement on silicon wafers.展开更多
The size reduction of tunable micromachined filters is carried out for high-speed wavelength tuning. We fabricated micromachined filters having a miniature structure with an air gap of 300 run and a short cantilever o...The size reduction of tunable micromachined filters is carried out for high-speed wavelength tuning. We fabricated micromachined filters having a miniature structure with an air gap of 300 run and a short cantilever of 45 urn, exhibiting fast response of below 3 us.展开更多
文摘采用深紫外光刻及等离子体刻蚀等工艺制备基于绝缘体上硅材料的环形滤波器,且微环半径仅为5μm。制备基于单微环的4通道光分插复用器,器件尺寸仅为3000μm×500μm。测试结果表明,该器件可以很好地实现上下载功能。其自由频谱宽度约为19.6 nm,最大消光比为19.76 d B。同时优化设计制备基于跑道型双微环可调谐光分插复用器。对这两种结构的光分插复用器的相邻信道间串扰进行测试,基于单微环滤波器和跑道型双微环滤波器的信道间最大串扰分别为-11.94 d B和-20.04 d B。所设计的基于双微环光分插复用器上下载通道与主信道间没有交叉波导结构,因此相邻通道串扰明显低于单环型的光分插复用器。同时设计并制备基于双微环PIN结型电光调制器。当偏置电压增加到1.6 V时,谐振峰发生0.78 nm的蓝移,并对测试结果进行分析。
基金National Key Research and Development Program of China(2019YFB2203003)National Natural Science Foundation of China(62175202 and 91950204)+2 种基金Leading Innovative and Entrepreneur Team Introduction Program of Zhejiang(2020R01005)the Open Research program of Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang ProvinceWestlake University(the start-up fund of Westlake University).
文摘Free-spectral-range(FSR)-free optical filters have always been a critical challenge for photonic integrated circuits.A high-performance FSR-free filter is highly desired for communication,spectroscopy,and sensing applications.Despite significant progress in integrated optical filters,the FSR-free filter with a tunable narrow-band,high out-of-band rejection,and large fabrication tolerance has rarely been demonstrated.In this paper,we propose an exact and robust design method for add-drop filters(ADFs)with an FSR-free operation capability,a sub-nanometer optical bandwidth,and a high out-of-band rejection(OBR)ratio.The achieved filter has a 3-dB bandwidth of<0.5 nm and an OBR ratio of 21.5 dB within a large waveband of 220 nm,which to the best of our knowledge,is the largest-FSR ADF demonstrated on a silicon photonic platform.The filter exhibits large tunability of 12.3 nm with a heating efficiency of 97 pm/mW and maintains the FSR-free feature in the whole tuning process.In addition,we fabri-cated a series of ADFs with different periods,which all showed reliable and excellent performances.
基金Supported by the National Natural Science Foundation of China under Grant Nos 61107059,61308052 and 61077047the Fundamental Research Funds for the Central Universitiesthe 111 Project of the Harbin Engineering University under Grant No B13015
文摘Optical filters with different configurations based on cholesteric liquid crystals （CLCs） are designed. The central wavelength from CLCs can be tuned by the electric field or temperature. For the electric field tuning, the ITO is designed with circular patterns, which can make the tunable range 18 nm. For the temperature tuning, two-layer- CLC configurations are used. The experimental results indicate that a deepened or broadened bandgap from the CLC can be achieved by different handedness or concentrations of chiral dopants. The spectrum study is carried out.
文摘The author＇s research activities undertaken at the Applied Optics Group, the University of Kent at Canterbury are reviewed, during his time there from 1988-1992 and 1994-1996, followed by a summary of recent research. The areas of interest are high finesse ring resonators, tunable optical filters, novel optical fiber grating sensors in glass and polymer, femtosecond laser inscription and micromachining, environmental pollution monitoring, hydrogen activated Pd films on silicon and impurity measurement on silicon wafers.
文摘The size reduction of tunable micromachined filters is carried out for high-speed wavelength tuning. We fabricated micromachined filters having a miniature structure with an air gap of 300 run and a short cantilever of 45 urn, exhibiting fast response of below 3 us.
