For the purpose of decomposing the processing gases CF4 from semiconductor manufacturers, ceramic honeycomb regenerative burner system is suggested by using the principle of HTAC. A simulated high temperature air comb...For the purpose of decomposing the processing gases CF4 from semiconductor manufacturers, ceramic honeycomb regenerative burner system is suggested by using the principle of HTAC. A simulated high temperature air combustion furnace has been used to determine the features of HTAC flames and the results of the decomposition of CF4. The preheat air temperature of it is above 900℃. The exhaust gas released into the atmosphere is lower than 150℃. Moreover, the efficiency of recovery of waste heat is higher than 80%, the NOx level in exhaust gas is less than 198 mg/m3 and the distribution of temperature in the furnace is nearly uniform. The factors influencing on heat transfer, temperature profile in chamber and NOX emission were discussed. Also some CF4 can be decomposed in this system.展开更多
Wearable electronics play a crucial role in advancing the rapid development of artificial intelligence,and as an attractive future vision,all-in-one wearable microsystems integrating powering,sensing,actuating and oth...Wearable electronics play a crucial role in advancing the rapid development of artificial intelligence,and as an attractive future vision,all-in-one wearable microsystems integrating powering,sensing,actuating and other functional components on a single chip have become an appealing tendency.Herein,we propose a wearable thermoelectric generator(ThEG)with a novel double-chain configuration to simultaneously realize sustainable energy harvesting and multi-functional sensing.In contrast to traditional single-chain ThEGs with the sole function of thermal energy harvesting,each individual chain of the developed double-chain thermoelectric generator(DC-ThEG)can be utilized to scavenge heat energy,and moreover,the combination of the two chains can be employed as functional sensing electrodes at the same time.The mature mass-fabrication technology of screen printing was successfully introduced to print n-type and p-type thermoelectric inks atop a polymeric substrate to form thermocouples to construct two independent chains,which makes this DC-ThEG flexible,high-performance and cost-efficient.The emerging material of silk fibroin was employed to cover the gap of the fabricated two chains to serve as a functional layer for sensing the existence of liquid water molecules in the air and the temperature.The powering and sensing functions of the developed DC-ThEG and their interactions were systematically studied via experimental measurements,which proved the DC-ThEG to be a robust multi-functional power source with a 151 mV open-circuit voltage.In addition,it was successfully demonstrated that this DC-ThEG can convert heat energy to achieve a 3.3 V output,matching common power demands of wearable electronics,and harvest biothermal energy to drive commercial electronics(i.e.,a calculator).The integration approach of powering and multi-functional sensing based on this new double-chain configuration might open a new chapter in advanced thermoelectric generators,especially in the applications of all-in-one self-powered microsyste展开更多
文摘For the purpose of decomposing the processing gases CF4 from semiconductor manufacturers, ceramic honeycomb regenerative burner system is suggested by using the principle of HTAC. A simulated high temperature air combustion furnace has been used to determine the features of HTAC flames and the results of the decomposition of CF4. The preheat air temperature of it is above 900℃. The exhaust gas released into the atmosphere is lower than 150℃. Moreover, the efficiency of recovery of waste heat is higher than 80%, the NOx level in exhaust gas is less than 198 mg/m3 and the distribution of temperature in the furnace is nearly uniform. The factors influencing on heat transfer, temperature profile in chamber and NOX emission were discussed. Also some CF4 can be decomposed in this system.
基金This work is financially supported by the National Natural Science Foundation of China(No.61804023)the Key R&D Program of Sichuan Province(No.2018GZ0527)+1 种基金the Sichuan Science and Technology Program(2019YJ0198)the Fundamental Research Funds for the Central Universities(No.ZYGX2019Z002).
文摘Wearable electronics play a crucial role in advancing the rapid development of artificial intelligence,and as an attractive future vision,all-in-one wearable microsystems integrating powering,sensing,actuating and other functional components on a single chip have become an appealing tendency.Herein,we propose a wearable thermoelectric generator(ThEG)with a novel double-chain configuration to simultaneously realize sustainable energy harvesting and multi-functional sensing.In contrast to traditional single-chain ThEGs with the sole function of thermal energy harvesting,each individual chain of the developed double-chain thermoelectric generator(DC-ThEG)can be utilized to scavenge heat energy,and moreover,the combination of the two chains can be employed as functional sensing electrodes at the same time.The mature mass-fabrication technology of screen printing was successfully introduced to print n-type and p-type thermoelectric inks atop a polymeric substrate to form thermocouples to construct two independent chains,which makes this DC-ThEG flexible,high-performance and cost-efficient.The emerging material of silk fibroin was employed to cover the gap of the fabricated two chains to serve as a functional layer for sensing the existence of liquid water molecules in the air and the temperature.The powering and sensing functions of the developed DC-ThEG and their interactions were systematically studied via experimental measurements,which proved the DC-ThEG to be a robust multi-functional power source with a 151 mV open-circuit voltage.In addition,it was successfully demonstrated that this DC-ThEG can convert heat energy to achieve a 3.3 V output,matching common power demands of wearable electronics,and harvest biothermal energy to drive commercial electronics(i.e.,a calculator).The integration approach of powering and multi-functional sensing based on this new double-chain configuration might open a new chapter in advanced thermoelectric generators,especially in the applications of all-in-one self-powered microsyste
