Progres in ion beam analysis at Fudan University in the recent years is briefly reviewed. Presented as examples of the research activities performed in this field are the following projects: (1) Nuclear potential reso...Progres in ion beam analysis at Fudan University in the recent years is briefly reviewed. Presented as examples of the research activities performed in this field are the following projects: (1) Nuclear potential resonance scattering of 6.25 MeV and 4.25 MeV helium ions for simultaneous compositional analysis of carbon and oxygen in a Mylar, a SnInO, and some other film samples: (2) Determination of stoichiometry of a high-temperature superconducting Y-Ba-Cu-O sample by backscattering of 8.8 MeV helium ions; (3) Backscattering and channeling analysis of multilayered structures periodically consisting of layers of pure Si and alternate layers of Ge and Si, grown on (100) Si substrates by molecular beam epitaxy: (4) Studies of surface structure of Al(100) by the use of MeV ions backscattering and channeling surface peak: and (5) MeV ion microbeam analysis and the use of PIXE method in DNA study. etc.展开更多
An ion beam analysis system was established on a 1.7 MV tandem accelerator, enabling Rutherford backscattering(RBS), elastic recoil detection(ERD), nuclear reaction analysis(NRA) and channeling measurements. The syste...An ion beam analysis system was established on a 1.7 MV tandem accelerator, enabling Rutherford backscattering(RBS), elastic recoil detection(ERD), nuclear reaction analysis(NRA) and channeling measurements. The system was tested by performing qualitative and quantitative analysis of Si, Ni/Si, Bi Fe O3:La/Si,Mo C/Mo/Si and Ti BN/Si samples. RBS of a Bi Fe O3:La film was used as system calibration. Tested by ion beam channeling, a Si(100) is of good crystallinity(χmin= 3.01%). For thin film samples, the measured thickness agrees well with simulation results by SIMNRA. In particular, composition of a Mo C/Mo/Si and Ti BN film samples were analyzed by RBS and non-Rutherford elastic backscattering.展开更多
文摘Progres in ion beam analysis at Fudan University in the recent years is briefly reviewed. Presented as examples of the research activities performed in this field are the following projects: (1) Nuclear potential resonance scattering of 6.25 MeV and 4.25 MeV helium ions for simultaneous compositional analysis of carbon and oxygen in a Mylar, a SnInO, and some other film samples: (2) Determination of stoichiometry of a high-temperature superconducting Y-Ba-Cu-O sample by backscattering of 8.8 MeV helium ions; (3) Backscattering and channeling analysis of multilayered structures periodically consisting of layers of pure Si and alternate layers of Ge and Si, grown on (100) Si substrates by molecular beam epitaxy: (4) Studies of surface structure of Al(100) by the use of MeV ions backscattering and channeling surface peak: and (5) MeV ion microbeam analysis and the use of PIXE method in DNA study. etc.
基金Supported by the National Natural Science Foundation of China(No.11405117)the State Key Lab of Advanced Welding and Joining of Harbin Institute of Technology(No.AWJ-M13-03)
文摘An ion beam analysis system was established on a 1.7 MV tandem accelerator, enabling Rutherford backscattering(RBS), elastic recoil detection(ERD), nuclear reaction analysis(NRA) and channeling measurements. The system was tested by performing qualitative and quantitative analysis of Si, Ni/Si, Bi Fe O3:La/Si,Mo C/Mo/Si and Ti BN/Si samples. RBS of a Bi Fe O3:La film was used as system calibration. Tested by ion beam channeling, a Si(100) is of good crystallinity(χmin= 3.01%). For thin film samples, the measured thickness agrees well with simulation results by SIMNRA. In particular, composition of a Mo C/Mo/Si and Ti BN film samples were analyzed by RBS and non-Rutherford elastic backscattering.
