This paper presents a compact XYZ micro-stage driven by an impact driving mechanism.A moving body is translationally actuated along the X-,Y-,and Z-axes in millimeter-scale range and with nanometer-scale resolution.Cr...This paper presents a compact XYZ micro-stage driven by an impact driving mechanism.A moving body is translationally actuated along the X-,Y-,and Z-axes in millimeter-scale range and with nanometer-scale resolution.Cr-N thin-film strain sensors are integrated into the micro-stage for closed-loop positioning.Closed-loop control is also carried out.The motion errors in six degrees of freedom are also investigated for this micro-stage.It is clarified by analysis of finite element method that rotational motion errors around the driving axis are caused by torques due to tensions from the elastic hinges of microstage.The mechanical structure of XYZ micro-stage to cancel out the torque generated is proposed and the second prototype is fabricated.Although the rotational motion error is successfully suppressed in the second prototype,a rotational motion error of more than 0.1°remains due to remaining torque and assembly error of the elastic hinges.Then,in order to reduce the rotational motion error,the prototype is designed in which the location of elastic hinges is single-layered.By designing a mechanical structure in which torque is suppressed,all rotational motion errors are successfully reduced to less than 0.05°in the prototype with single-layer hinges.展开更多
Micro/nano positioning technologies have been attractive for decades in industrial and scientific applications fields. The actuators have inherent hysteresis that can cause system unexpected behave in some extend. In ...Micro/nano positioning technologies have been attractive for decades in industrial and scientific applications fields. The actuators have inherent hysteresis that can cause system unexpected behave in some extend. In this research, the authors used extented unparallel Prandtl-Ishlinshii(EUPI)models to represent the input-output relationship of a piezo-driven micro position stage. Integral inverse(I-I) compensator is used for compensating the hysteresis characteristics of the micro positioning stage and compared with direct inverse(D-I) compensator and inverse model(I-M) compensator. However,the accuracy and the robustness of the I-I compensator are worse when there is noisy in the system,a novel sliding-mode-like-control with EUPI(SMLC-EUPI) method was proposed and analyzed by different trajectory tracking experiments in Matlab environment. Though the above strategies can alleviate most deviation, the adjustment of the SMLC’s parameters is very complex. So the fuzzy method is used to adjust these parameters and be verified by trajectory tracking experiments. Finally,for validating the proposed control method, the paper did the corresponding experiment in microscope with CMOS and obtained convincing results.展开更多
基金supported by JSPS KAKENHI Grant Numbers JP 15H05759 and JP 20H00211。
文摘This paper presents a compact XYZ micro-stage driven by an impact driving mechanism.A moving body is translationally actuated along the X-,Y-,and Z-axes in millimeter-scale range and with nanometer-scale resolution.Cr-N thin-film strain sensors are integrated into the micro-stage for closed-loop positioning.Closed-loop control is also carried out.The motion errors in six degrees of freedom are also investigated for this micro-stage.It is clarified by analysis of finite element method that rotational motion errors around the driving axis are caused by torques due to tensions from the elastic hinges of microstage.The mechanical structure of XYZ micro-stage to cancel out the torque generated is proposed and the second prototype is fabricated.Although the rotational motion error is successfully suppressed in the second prototype,a rotational motion error of more than 0.1°remains due to remaining torque and assembly error of the elastic hinges.Then,in order to reduce the rotational motion error,the prototype is designed in which the location of elastic hinges is single-layered.By designing a mechanical structure in which torque is suppressed,all rotational motion errors are successfully reduced to less than 0.05°in the prototype with single-layer hinges.
基金supported by the National Natural Science Foundation of China under Grant Nos.61573093 and U1613205
文摘Micro/nano positioning technologies have been attractive for decades in industrial and scientific applications fields. The actuators have inherent hysteresis that can cause system unexpected behave in some extend. In this research, the authors used extented unparallel Prandtl-Ishlinshii(EUPI)models to represent the input-output relationship of a piezo-driven micro position stage. Integral inverse(I-I) compensator is used for compensating the hysteresis characteristics of the micro positioning stage and compared with direct inverse(D-I) compensator and inverse model(I-M) compensator. However,the accuracy and the robustness of the I-I compensator are worse when there is noisy in the system,a novel sliding-mode-like-control with EUPI(SMLC-EUPI) method was proposed and analyzed by different trajectory tracking experiments in Matlab environment. Though the above strategies can alleviate most deviation, the adjustment of the SMLC’s parameters is very complex. So the fuzzy method is used to adjust these parameters and be verified by trajectory tracking experiments. Finally,for validating the proposed control method, the paper did the corresponding experiment in microscope with CMOS and obtained convincing results.
