基于F离子注入隔离技术实现一种新型微缩化发光二极管(micromicro-LED)阵列器件,并系统研究注入能量及发光孔径对micro-LED阵列器光电性能的影响.研究结果表明:相比于F离子50 ke V单次注入器件, 50/100 ke V两次注入器件具有更好的光电...基于F离子注入隔离技术实现一种新型微缩化发光二极管(micromicro-LED)阵列器件,并系统研究注入能量及发光孔径对micro-LED阵列器光电性能的影响.研究结果表明:相比于F离子50 ke V单次注入器件, 50/100 ke V两次注入器件具有更好的光电性能,器件反向漏电降低8.4倍,光输出功率密度提升1.3倍.同时,在不同的发光孔径(6, 8, 10μm)条件下,器件反向漏电流均为3.4×10–8 A,但正向工作电压随孔径增大而减小,分别为3.3, 3.1, 2.9 V.此外,器件不同发光孔径的有效发光面积比(实际发光面积与器件面积之比)分别为85%, 87%, 92%.与传统台面刻蚀micro-LED器件相比,离子注入隔离技术实现的micro-LED器件具有较低反的向漏电流密度、较高的光输出密度及有效发光面积比.展开更多
In this study, a full-color emission red–green–blue(RGB) quantum-dot(QD)-based micro-light-emitting-diode(micro-LED) array with the reduced optical cross-talk effect by a photoresist mold has been demonstrated. The ...In this study, a full-color emission red–green–blue(RGB) quantum-dot(QD)-based micro-light-emitting-diode(micro-LED) array with the reduced optical cross-talk effect by a photoresist mold has been demonstrated. The UV micro-LED array is used as an efficient excitation source for the QDs. The aerosol jet technique provides a narrow linewidth on the micrometer scale for a precise jet of QDs on the micro-LEDs. To reduce the optical cross-talk effect,a simple lithography method and photoresist are used to fabricate the mold, which consists of a window for QD jetting and a blocking wall for cross-talk reduction. The cross-talk effect of the well-confined QDs in the window is confirmed by a fluorescence microscope, which shows clear separation between QD pixels. A distributed Bragg reflector is covered on the micro-LED array and the QDs' jetted mold to further increase the reuse of UV light.The enhanced light emission of the QDs is 5%, 32%, and 23% for blue, green, and red QDs, respectively.展开更多
基金Ministry of Science and Technology,Taiwan,China(MOST)(MOST104-3113-E-009-002-CC2,MOST105-2622-E-009-023-CC2)
文摘In this study, a full-color emission red–green–blue(RGB) quantum-dot(QD)-based micro-light-emitting-diode(micro-LED) array with the reduced optical cross-talk effect by a photoresist mold has been demonstrated. The UV micro-LED array is used as an efficient excitation source for the QDs. The aerosol jet technique provides a narrow linewidth on the micrometer scale for a precise jet of QDs on the micro-LEDs. To reduce the optical cross-talk effect,a simple lithography method and photoresist are used to fabricate the mold, which consists of a window for QD jetting and a blocking wall for cross-talk reduction. The cross-talk effect of the well-confined QDs in the window is confirmed by a fluorescence microscope, which shows clear separation between QD pixels. A distributed Bragg reflector is covered on the micro-LED array and the QDs' jetted mold to further increase the reuse of UV light.The enhanced light emission of the QDs is 5%, 32%, and 23% for blue, green, and red QDs, respectively.
