We present the design of micro-helix metamaterial supporting high sound absorption characteristic by 3D printing. The sample structure which is fabricated out of polylactide （PLA） material, many micro-helix are arra...We present the design of micro-helix metamaterial supporting high sound absorption characteristic by 3D printing. The sample structure which is fabricated out of polylactide （PLA） material, many micro-helix are arranged by periodic arrays on XY plane. Experiment measurement results show that different geometrical dimensions of helix vestibule and cavity depth have a great effect on sound absorption coefficient. Physical mechanism depends on the friction and viscosity between the air and the helix vestibule. This work shows great potential of micro-structure metamaterial in noise control applications require light weight and large rigid of sound absorption.展开更多
重点研究了聚焦离子束的相关原理和应用。利用聚焦离子束应力引入致形变(Focused Ion Beam Stress-Introduced Deformation,FIB-SID)技术与常规微加工工艺相结合,制备微型金属无源螺旋电感的设计方法和工艺流程,并对其电学性能进行初步...重点研究了聚焦离子束的相关原理和应用。利用聚焦离子束应力引入致形变(Focused Ion Beam Stress-Introduced Deformation,FIB-SID)技术与常规微加工工艺相结合,制备微型金属无源螺旋电感的设计方法和工艺流程,并对其电学性能进行初步高频测试。首先在SOI(Silicon-on-Insulator)基片上通过光刻、溅射以及各项同性刻蚀等常规工艺制得悬浮的金属悬臂梁,再利用FIB刻蚀原理进行应力引入,通过控制注入离子剂量、FIB应力引入的次数、FIB扫描的间距等试验参数制得不同尺寸结构的三维螺旋金属无源电感。后,采用安捷伦网络分析仪与微波探针台,使用GSG结构及相应的去嵌方法,对微型金属螺线管电感进行了高频测试。得出了三维螺旋微纳电感的电感值、品质因子、电压驻波比、回波损耗随频率变化关系。展开更多
基金supported by the National Natural Science Foundation of China (11704314 and 11474230)the Fundamental Research Funds for the Central Universities (3102016QD056) for financial support
文摘We present the design of micro-helix metamaterial supporting high sound absorption characteristic by 3D printing. The sample structure which is fabricated out of polylactide （PLA） material, many micro-helix are arranged by periodic arrays on XY plane. Experiment measurement results show that different geometrical dimensions of helix vestibule and cavity depth have a great effect on sound absorption coefficient. Physical mechanism depends on the friction and viscosity between the air and the helix vestibule. This work shows great potential of micro-structure metamaterial in noise control applications require light weight and large rigid of sound absorption.
文摘重点研究了聚焦离子束的相关原理和应用。利用聚焦离子束应力引入致形变(Focused Ion Beam Stress-Introduced Deformation,FIB-SID)技术与常规微加工工艺相结合,制备微型金属无源螺旋电感的设计方法和工艺流程,并对其电学性能进行初步高频测试。首先在SOI(Silicon-on-Insulator)基片上通过光刻、溅射以及各项同性刻蚀等常规工艺制得悬浮的金属悬臂梁,再利用FIB刻蚀原理进行应力引入,通过控制注入离子剂量、FIB应力引入的次数、FIB扫描的间距等试验参数制得不同尺寸结构的三维螺旋金属无源电感。后,采用安捷伦网络分析仪与微波探针台,使用GSG结构及相应的去嵌方法,对微型金属螺线管电感进行了高频测试。得出了三维螺旋微纳电感的电感值、品质因子、电压驻波比、回波损耗随频率变化关系。
