Pressure sensors are the essential equipments in the field of pressure measurement. In this work, we propose a temperature compensation fiber Bragg grating （FBG） pressure sensor based on the plane diaphragm. The pla...Pressure sensors are the essential equipments in the field of pressure measurement. In this work, we propose a temperature compensation fiber Bragg grating （FBG） pressure sensor based on the plane diaphragm. The plane diaphragm and pressure sensitivity FBG （PS FBG） are used as the pressure sensitive components, and the temperature compensation FBG （TC FBG） is used to improve the temperature cross-sensitivity. Mechanical deformation model and deformation characteristics simulation analysis of the diaphragm are presented. The measurement principle and theoretical analysis of the mathematical relationship between the FBG central wavelength shift and pressure of the sensor are introduced. The sensitivity and measure range can be adjusted by utilizing the different materials and sizes of the diaphragm to accommodate different measure environments. The performance experiments are carried out, and the results indicate that the pressure sensitivity of the sensor is 35.7pm/MPa in a range from 0MPa to 50MPa and has good linearity with a linear fitting correlation coefficient of 99.95%. In addition, the sensor has the advantages of low frequency chirp and high stability, which can be used to measure pressure in mining engineering, civil engineering, or other complex environment.展开更多
In this paper, first a circular diaphragm is modeled using the classical plate theory. An analytical solution based on differential transformation method （DTM） and Runge-Kutta method is employed for solving the gove...In this paper, first a circular diaphragm is modeled using the classical plate theory. An analytical solution based on differential transformation method （DTM） and Runge-Kutta method is employed for solving the governing differential equation for the first time. Then the influences of various parameters on central deflection of the diaphragm, stress distribution and capacitance of pressure sensor with a time-dependent pressure are examined. Several case studies are compared with simulations to confirm the proposed method. The analytical results compared with ABAQUS simulation show excellent agreement with the simulation results. This method is very promising for time saving in calculating micro-device characteristics.展开更多
The analytical and finite element analyses of circular resonator for Resonant Pressure Sensor are presented. The new idea of this paper is the Silicon circular diaphragm used as the sensing resonator for micro pressur...The analytical and finite element analyses of circular resonator for Resonant Pressure Sensor are presented. The new idea of this paper is the Silicon circular diaphragm used as the sensing resonator for micro pressure sensor. The thickness, radius and natural frequencies for the Si circular diaphragm are investigated. A system model is being developed to predict dynamic responses of the pressure sensor diaphragm and preliminary results are presented. The pressure range is 0-0.1Mpa. The resonant frequencies output of the homogenous circular diaphragm also realized by ANSYS software. The natural frequency of the resonator is about 63.418 kHz.展开更多
文摘Pressure sensors are the essential equipments in the field of pressure measurement. In this work, we propose a temperature compensation fiber Bragg grating （FBG） pressure sensor based on the plane diaphragm. The plane diaphragm and pressure sensitivity FBG （PS FBG） are used as the pressure sensitive components, and the temperature compensation FBG （TC FBG） is used to improve the temperature cross-sensitivity. Mechanical deformation model and deformation characteristics simulation analysis of the diaphragm are presented. The measurement principle and theoretical analysis of the mathematical relationship between the FBG central wavelength shift and pressure of the sensor are introduced. The sensitivity and measure range can be adjusted by utilizing the different materials and sizes of the diaphragm to accommodate different measure environments. The performance experiments are carried out, and the results indicate that the pressure sensitivity of the sensor is 35.7pm/MPa in a range from 0MPa to 50MPa and has good linearity with a linear fitting correlation coefficient of 99.95%. In addition, the sensor has the advantages of low frequency chirp and high stability, which can be used to measure pressure in mining engineering, civil engineering, or other complex environment.
文摘In this paper, first a circular diaphragm is modeled using the classical plate theory. An analytical solution based on differential transformation method （DTM） and Runge-Kutta method is employed for solving the governing differential equation for the first time. Then the influences of various parameters on central deflection of the diaphragm, stress distribution and capacitance of pressure sensor with a time-dependent pressure are examined. Several case studies are compared with simulations to confirm the proposed method. The analytical results compared with ABAQUS simulation show excellent agreement with the simulation results. This method is very promising for time saving in calculating micro-device characteristics.
文摘The analytical and finite element analyses of circular resonator for Resonant Pressure Sensor are presented. The new idea of this paper is the Silicon circular diaphragm used as the sensing resonator for micro pressure sensor. The thickness, radius and natural frequencies for the Si circular diaphragm are investigated. A system model is being developed to predict dynamic responses of the pressure sensor diaphragm and preliminary results are presented. The pressure range is 0-0.1Mpa. The resonant frequencies output of the homogenous circular diaphragm also realized by ANSYS software. The natural frequency of the resonator is about 63.418 kHz.
