In this study,the performances of fixed and fluidized bed reactors in the production of single-walled carbon nanotubes（SWNTs）have been investigated.In both reactors,single-walled carbon nanotubes were grown by catal...In this study,the performances of fixed and fluidized bed reactors in the production of single-walled carbon nanotubes（SWNTs）have been investigated.In both reactors,single-walled carbon nanotubes were grown by catalytic chemical vapor decomposition（CCVD）of methane over Co-Mo/MgO nanocatalyst under two different operating conditions.The synthesized samples were characterized by TEM,TGA and Raman spectroscopy.It is found that the performance of a fluidized bed in the synthesis of carbon nanotubes is much better than that of a fixed bed.The quality of carbon nanotubes obtained from the fluidized bed was significantly higher than that from the fixed bed and the former one with the ID/IG ratio of 0.11 while the latter one with the ID/IG ratio of 0.71.Also,the yield of SWNTs in the fluidized bed was 92 wt%,while it was 78 wt%in the fixed bed.These advantages of fluidized bed reactors for the synthesis of carbon nanotubes can be attributed to more available space for the growth of carbon nanotubes and more uniform temperature and concentration profiles.展开更多
Aluminum coatings were created onto glass beads by chemical vapor deposition in a fluidized bed reactor at different temperatures. Nitrogen was enriched with Triisobutylaluminum (TIBA) vapor and the latter was thermal...Aluminum coatings were created onto glass beads by chemical vapor deposition in a fluidized bed reactor at different temperatures. Nitrogen was enriched with Triisobutylaluminum (TIBA) vapor and the latter was thermally decomposed inside the fluidized bed to deposit the elemental aluminum. To ensure homogeneous coating on the bed material, the fluidizing conditions necessary to avoid agglomeration were investigated for a broad range of temperatures. The deposition reaction was modeled on the basis of a discrete particle simulation to gain insight into homogeneity and thickness of the coating throughout the bed material. In particular, the take-up of aluminum was traced for selected particles that exhibited a large mass of deposited aluminum.展开更多
A dichlorosilane gas and a trichlorosilane gas in ambient hydrogen were evaluated to show their different gas flow motions in a slim vertical cold wall chemical vapor deposition reactor for the Minimal Fab system. Thi...A dichlorosilane gas and a trichlorosilane gas in ambient hydrogen were evaluated to show their different gas flow motions in a slim vertical cold wall chemical vapor deposition reactor for the Minimal Fab system. This evaluation was performed for improving and controlling the film qualities and the productivities, using two quartz crystal microbalances (QCM) installed at the </span><span style="font-family:Verdana;">inlet and exhaust of the chamber by taking into account that the QCM frequency corresponds to the real time changes in the gas properties.</span><span style="font-family:Verdana;"> Typically, the time period approaching from the inlet to the exhaust was shorter for the trichlorosilane gas than that for the dichlorosilane gas. The trichlorosilane gas was shown to move like plug flow, while the dichlorosilane gas seemed to be well mixed in the entire chamber.展开更多
This article reports the different steps of the design, development and validation of a process for continuous production of carbon nanotubes （CNTs） via catalytic chemical vapor deposition from the laboratory scale ...This article reports the different steps of the design, development and validation of a process for continuous production of carbon nanotubes （CNTs） via catalytic chemical vapor deposition from the laboratory scale to the industrial production. This process is based on a continuous inclined mobile-bed rotating reactor and very active catalysts using methane or ethylene as carbon source. The importance of modeling taking into account the hydrodynamic, physicochemical and physical phenomena that occur during CNT production in the process analysis is emphasized. The impact of this invention on the environment and human health is taken into consideration too.展开更多
针对行星式MOCVD(Metal Organic Chemical Vapor Deposition)反应器进口结构对AlN生长的化学反应路径和生长速率的影响进行数值模拟研究,通过改变反应器进口形式、数量以及隔板位置发现,二重进口反应器倒置进口(即Ⅲ族在下,Ⅴ族在上)时...针对行星式MOCVD(Metal Organic Chemical Vapor Deposition)反应器进口结构对AlN生长的化学反应路径和生长速率的影响进行数值模拟研究,通过改变反应器进口形式、数量以及隔板位置发现,二重进口反应器倒置进口(即Ⅲ族在下,Ⅴ族在上)时,衬底前端的含Al粒子浓度明显升高,尤其是MMAl的浓度比传统进口反应器高两个数量级,气相反应中热解路径占主导,薄膜生长速率明显提高。在倒置进口的基础上优化隔板位置,生长速率略微降低,但薄膜均匀性明显改善。当反应器进口数量从二重变为三重和五重,反应从热解路径占主导变为热解路径和加合路径共同作用,薄膜生长速率逐渐增加,而均匀性明显改善。展开更多
文摘In this study,the performances of fixed and fluidized bed reactors in the production of single-walled carbon nanotubes（SWNTs）have been investigated.In both reactors,single-walled carbon nanotubes were grown by catalytic chemical vapor decomposition（CCVD）of methane over Co-Mo/MgO nanocatalyst under two different operating conditions.The synthesized samples were characterized by TEM,TGA and Raman spectroscopy.It is found that the performance of a fluidized bed in the synthesis of carbon nanotubes is much better than that of a fixed bed.The quality of carbon nanotubes obtained from the fluidized bed was significantly higher than that from the fixed bed and the former one with the ID/IG ratio of 0.11 while the latter one with the ID/IG ratio of 0.71.Also,the yield of SWNTs in the fluidized bed was 92 wt%,while it was 78 wt%in the fixed bed.These advantages of fluidized bed reactors for the synthesis of carbon nanotubes can be attributed to more available space for the growth of carbon nanotubes and more uniform temperature and concentration profiles.
文摘Aluminum coatings were created onto glass beads by chemical vapor deposition in a fluidized bed reactor at different temperatures. Nitrogen was enriched with Triisobutylaluminum (TIBA) vapor and the latter was thermally decomposed inside the fluidized bed to deposit the elemental aluminum. To ensure homogeneous coating on the bed material, the fluidizing conditions necessary to avoid agglomeration were investigated for a broad range of temperatures. The deposition reaction was modeled on the basis of a discrete particle simulation to gain insight into homogeneity and thickness of the coating throughout the bed material. In particular, the take-up of aluminum was traced for selected particles that exhibited a large mass of deposited aluminum.
文摘A dichlorosilane gas and a trichlorosilane gas in ambient hydrogen were evaluated to show their different gas flow motions in a slim vertical cold wall chemical vapor deposition reactor for the Minimal Fab system. This evaluation was performed for improving and controlling the film qualities and the productivities, using two quartz crystal microbalances (QCM) installed at the </span><span style="font-family:Verdana;">inlet and exhaust of the chamber by taking into account that the QCM frequency corresponds to the real time changes in the gas properties.</span><span style="font-family:Verdana;"> Typically, the time period approaching from the inlet to the exhaust was shorter for the trichlorosilane gas than that for the dichlorosilane gas. The trichlorosilane gas was shown to move like plug flow, while the dichlorosilane gas seemed to be well mixed in the entire chamber.
文摘This article reports the different steps of the design, development and validation of a process for continuous production of carbon nanotubes （CNTs） via catalytic chemical vapor deposition from the laboratory scale to the industrial production. This process is based on a continuous inclined mobile-bed rotating reactor and very active catalysts using methane or ethylene as carbon source. The importance of modeling taking into account the hydrodynamic, physicochemical and physical phenomena that occur during CNT production in the process analysis is emphasized. The impact of this invention on the environment and human health is taken into consideration too.
文摘针对行星式MOCVD(Metal Organic Chemical Vapor Deposition)反应器进口结构对AlN生长的化学反应路径和生长速率的影响进行数值模拟研究,通过改变反应器进口形式、数量以及隔板位置发现,二重进口反应器倒置进口(即Ⅲ族在下,Ⅴ族在上)时,衬底前端的含Al粒子浓度明显升高,尤其是MMAl的浓度比传统进口反应器高两个数量级,气相反应中热解路径占主导,薄膜生长速率明显提高。在倒置进口的基础上优化隔板位置,生长速率略微降低,但薄膜均匀性明显改善。当反应器进口数量从二重变为三重和五重,反应从热解路径占主导变为热解路径和加合路径共同作用,薄膜生长速率逐渐增加,而均匀性明显改善。
