For several decades,chemical mechanical polishing(CMP)has been the most widely used planarization method in integrated circuits manufacturing.The final polishing results are affected by many factors related to the car...For several decades,chemical mechanical polishing(CMP)has been the most widely used planarization method in integrated circuits manufacturing.The final polishing results are affected by many factors related to the carrier structure,the polishing pad,the slurry,and the process parameters.As both chemical and mechanical actions affect the effectiveness of CMP,and these actions are themselves affected by many factors,the CMP mechanism is complex and has been a hot research area for many years.This review provides a basic description of the development,challenges,and key technologies associated with CMP.We summarize theoretical CMP models from the perspectives of kinematics,empirical,its mechanism(from the viewpoint of the atomic scale,particle scale,and wafer scale),and its chemical-mechanical synergy.Experimental approaches to the CMP mechanism of material removal and planarization are further discussed from the viewpoint of the particle wear effect,chemical-mechanical synergy,and wafer-pad interfacial interaction.展开更多
Multi-component mixture(MCM) is a complicated chemical system that contains a great deal of mixture rays with various mixture ratios, and each ray includes many mixtures with different concentration levels.Currently, ...Multi-component mixture(MCM) is a complicated chemical system that contains a great deal of mixture rays with various mixture ratios, and each ray includes many mixtures with different concentration levels.Currently, in combined toxicity field, almost all studies on MCM focus on the mixtures designed by the equivalenteffect concentration ratio(EECR) procedure. However, the EECR mixtures cannot represent the whole mixture system because the EECR mixtures are located on one mixture ray in concentration space formed by multiple components. In our view, some optimal experimental design such as the uniform design(UD) should be used to effectively select many representative mixture rays from the MCM system,instead of single EECR ray. The uniform design ray(UDray) integrating UD idea with fixed-ratio ray design can systematically and comprehensively measure the combined toxicity changes in the MCM system. This review introduces the operation method, construction of uniform table and corresponding usable table, and some cases of application of the UD-ray to help readers easily use UD-ray in their MCM toxicity assessment.展开更多
The notorious shuttle effect has long been obstructing lithium-sulfur(Li-S) batteries from yielding the expected high energy density and long lifespan.Herein,we develop a multifunctional polysulfide barrier reinforced...The notorious shuttle effect has long been obstructing lithium-sulfur(Li-S) batteries from yielding the expected high energy density and long lifespan.Herein,we develop a multifunctional polysulfide barrier reinforced by the graphitic carbon nitride/carbon nanotube(g-C_3 N_4/CNT) composite toward inhibited shuttling behavior and improved battery performance.The obtained g-C_3 N_4 delivers a unique spongelike architecture with massive ion transfer pathways and fully exposed active interfaces,while the abundant C-N heteroatomic structures impose strong chemical immobilization toward lithium polysulfides.Combined with the highly conductive agent,the g-C_3 N_4/CNT reinforced separator is endowed with great capability of confining and reutilizing the active sulfur within the cathode,thus contributing to an efficient and stable sulfur electrochemistry.Benefiting from these synergistic attributes,Li-S cells based on g-C_3 N_4/CNT separator exhibit an excellent cyclability with a minimum decay rate of 0.03% per cycle over 500 cycles and decent rate capability up to 2 C.Moreover,a high areal capacity of 7.69 mAh cm^(-2)can be achieved under a raised sulfur loading up to 10.1 mg cm^(-2).demonstrating a facile and efficient pathway toward superior Li-S batteries.展开更多
基金support provided by the Science Fund for Creative Research Groups(Grant No.51021064)the National Natural Science Foundation of China(Grant No.51305227)。
文摘For several decades,chemical mechanical polishing(CMP)has been the most widely used planarization method in integrated circuits manufacturing.The final polishing results are affected by many factors related to the carrier structure,the polishing pad,the slurry,and the process parameters.As both chemical and mechanical actions affect the effectiveness of CMP,and these actions are themselves affected by many factors,the CMP mechanism is complex and has been a hot research area for many years.This review provides a basic description of the development,challenges,and key technologies associated with CMP.We summarize theoretical CMP models from the perspectives of kinematics,empirical,its mechanism(from the viewpoint of the atomic scale,particle scale,and wafer scale),and its chemical-mechanical synergy.Experimental approaches to the CMP mechanism of material removal and planarization are further discussed from the viewpoint of the particle wear effect,chemical-mechanical synergy,and wafer-pad interfacial interaction.
基金supported by the National Natural Science Foundation of China(2117709721207002)Specialized Research Fund for the Doctoral Program of Higher Education(20120072110052)
文摘Multi-component mixture(MCM) is a complicated chemical system that contains a great deal of mixture rays with various mixture ratios, and each ray includes many mixtures with different concentration levels.Currently, in combined toxicity field, almost all studies on MCM focus on the mixtures designed by the equivalenteffect concentration ratio(EECR) procedure. However, the EECR mixtures cannot represent the whole mixture system because the EECR mixtures are located on one mixture ray in concentration space formed by multiple components. In our view, some optimal experimental design such as the uniform design(UD) should be used to effectively select many representative mixture rays from the MCM system,instead of single EECR ray. The uniform design ray(UDray) integrating UD idea with fixed-ratio ray design can systematically and comprehensively measure the combined toxicity changes in the MCM system. This review introduces the operation method, construction of uniform table and corresponding usable table, and some cases of application of the UD-ray to help readers easily use UD-ray in their MCM toxicity assessment.
基金supported by the National Natural Science Foundation of China (Nos. 21978110 and 51772126)the Natural Science Foundation of Beijing (No. L182062)+8 种基金the Organization Department of Beijing Talents Project (2018000021223ZK21)the Yue Qi Young Scholar Project of China University of Mining & Technology (Beijing) (No. 2017QN17)the Fundamental Research Funds for the Central Universities (No. 2014QJ02)the Jilin Province Science and Technology Department Program (Nos. 20200201187JC, 20190201309JC, and 20190101009JH)the ‘‘13th five-year” Science and Technology Project of Jilin Provincial Education Department (No. JJKH20200407KJ)the Jilin Province Development and Reform Commission Program (Nos. 2020C026-3 and 2019C042-1)the Jilin Province Fund for Talent Development Program (No. [2019] 874)the supports from Natural Sciences and Engineering Research Council of Canada (NSERC), the University of Waterloothe Waterloo Institute for Nanotechnology。
文摘The notorious shuttle effect has long been obstructing lithium-sulfur(Li-S) batteries from yielding the expected high energy density and long lifespan.Herein,we develop a multifunctional polysulfide barrier reinforced by the graphitic carbon nitride/carbon nanotube(g-C_3 N_4/CNT) composite toward inhibited shuttling behavior and improved battery performance.The obtained g-C_3 N_4 delivers a unique spongelike architecture with massive ion transfer pathways and fully exposed active interfaces,while the abundant C-N heteroatomic structures impose strong chemical immobilization toward lithium polysulfides.Combined with the highly conductive agent,the g-C_3 N_4/CNT reinforced separator is endowed with great capability of confining and reutilizing the active sulfur within the cathode,thus contributing to an efficient and stable sulfur electrochemistry.Benefiting from these synergistic attributes,Li-S cells based on g-C_3 N_4/CNT separator exhibit an excellent cyclability with a minimum decay rate of 0.03% per cycle over 500 cycles and decent rate capability up to 2 C.Moreover,a high areal capacity of 7.69 mAh cm^(-2)can be achieved under a raised sulfur loading up to 10.1 mg cm^(-2).demonstrating a facile and efficient pathway toward superior Li-S batteries.
