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The friction of diamond-like carbon coatings in a water environment 被引量:12
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作者 D.C.SUTTON G.LIMBERT +1 位作者 D.STEWART R.J.K.WOOD 《Friction》 SCIE EI CAS 2013年第3期210-221,共12页
Diamond-like carbon(DLC)coatings are known to provide beneficial mechanical and tribological properties in harsh environments.Their combination of high wear resistance and low friction has led to their extensive use i... Diamond-like carbon(DLC)coatings are known to provide beneficial mechanical and tribological properties in harsh environments.Their combination of high wear resistance and low friction has led to their extensive use in any number of industries.The tribological performance of a DLC coating is varied however,and the frictional response is known to be strongly dependent on the surrounding environment,as well as the material composition and bonding structure of the DLC coating.This paper presents an up-to-date review on the friction of DLC coatings in a water environment,with a special focus on transfer layer formation and tribochemistry. 展开更多
关键词 FRICTION diamond-like carbon(dlc) water transfer layer TRIBOCHEMISTRY REVIEW
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Effect of temperature and mating pair on tribological properties of DLC and GLC coatings under high pressure lubricated by MoDTC and ZDDP 被引量:7
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作者 Kang LIU Jia-jie KANG +2 位作者 Guang-an ZHANG Zhi-bin LU Wen YUE 《Friction》 SCIE EI CAS CSCD 2021年第6期1390-1405,共16页
Diamond-like carbon(DLC)and graphite-like carbon(GLC)coatings have good prospects for improving the surface properties of engine parts.However,further understanding is needed on the effect of working conditions on tri... Diamond-like carbon(DLC)and graphite-like carbon(GLC)coatings have good prospects for improving the surface properties of engine parts.However,further understanding is needed on the effect of working conditions on tribological behaviors.In this study,GLC and two types of DLC coatings were deposited on GCr15 substrate for investigation.The friction and wear properties of self-mated and steel-mated pairs were evaluated.Two temperatures(25 and 90℃),three lubrication conditions(base oil,molybdenum dithiocarbamate(MoDTC)-containing oil,MoDTC+zinc dialkyldithiophosphate(ZDDP)-containing oil),and high Hertz contact stress(2.41 GPa)were applied in the experiments.The results showed that high temperature promoted the effect of ZDDP on steel-mated pairs,but increased wear under base oil lubrication.The increased wear for steel-mated pairs lubricated by MoDTC-containing oil was due to abrasive wear probably caused by MoO_(3) andβ-FeMoO_(4).It was also found that in most cases,the tribological properties of self-mated pairs were better than those of steel-mated pairs. 展开更多
关键词 diamond-like carbon(dlc) graphite-like carbon(GLC) mating pair temperature oil additives
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Designing multilayer diamond like carbon coatings for improved mechanical properties 被引量:6
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作者 Mohammad Sharear Kabir Zhifeng Zhou +1 位作者 Zonghan Xie Paul Munroe 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2021年第6期108-117,共10页
New multilayer coatings were produced by incorporating alternating soft and hard DLC layers enabled by varying the bias voltage during deposition process while maintaining a constant hard-to-soft layer thickness ratio... New multilayer coatings were produced by incorporating alternating soft and hard DLC layers enabled by varying the bias voltage during deposition process while maintaining a constant hard-to-soft layer thickness ratio.These coatings were deposited onto a Cr/Cr Cxgraded layer by closed field unbalanced magnetron sputtering(CFUBMS).The cross-sectional analysis of the coatings showed that the multilayer coatings possess sharp interfaces between the soft and hard layers with the hard to soft layer thickness ratio(1:1.33)constant in all the coatings.Raman analysis uncovered the increasing sp^(3)character of the DLC coatings as a result of decreasing ID/IGratio and increasing full width at half maximum(FWHM)values of the G band peak induced supposedly by an increase in bias voltage during hard layer deposition.Nanoindentation tests showed an increase in hardness of the DLC coatings which can be correlated with the increase in the sp^(3)content of the coatings as well as decreasing sp^(2)-C cluster size,as calculated from the ID/IGratio.Furthermore,the coatings exhibited excellent plastic deformation resistance and adhesion strength upon microindentation and scratch testing,respectively.Although further investigations are required to assess coating durability,the multilayer design could offer the DLC coatings with a rare opportunity to combine the high hardness with damage resistance with a constant bilayer thickness and without the need to introduce complex multilayer system. 展开更多
关键词 Diamond like carbon(dlc) Closed field unbalanced magnetron sputtering(CFUBMS) sp^(3)Character NANOINDENTATION Plastic deformation resistance Scratch adhesion behaviour
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Microstructure and Mechanical Property of Magnetron Sputtering Deposited DLC Film 被引量:2
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作者 孙泽 ZHAO Wen 孔德军 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2018年第3期579-584,共6页
A diamond-like carbon(DLC) film was deposited on YT14 substrate using magnetron sputtering(MS). The surface morphologies, roughness and bonding spectra of obtained film were characterized using scanning electron m... A diamond-like carbon(DLC) film was deposited on YT14 substrate using magnetron sputtering(MS). The surface morphologies, roughness and bonding spectra of obtained film were characterized using scanning electron microscopy(SEM), atomic force microscopy(AFM), and X-ray photoelectron spectroscopy(XPS), respectively, and its mechanical property and bonding strength were measured using a nanoindentation and scratch tester, respectively. The results show that the C-enriched DLC film exhibits a denser microstructure and smoother surface with lower surface roughness of 21.8 nm. The ratio of C sp2 at 284.4 e V that corresponds to the diamond(111) and the C sp3 at 285.3 e V that corresponds to the diamond(220) plane for the as-received film is 0.36: 0.64, showing that the C sp3 has the high content. The hardness and Young's modulus of DLC film by nanoindentation are 8.534 41 and 142.158 1 GPa, respectively, and the corresponding bonding strength is 74.55 N by scratch test. 展开更多
关键词 diamond-like carbondlc film magnetron sputtering(MS) atomic force microscope (AFM) X-ray photoelectron spectroscopy(XPS) nanoindentation
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Differences in nano-topography and tribochemistry of ZDDP tribofilms from variations in contact configuration with steel and DLC surfaces 被引量:3
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作者 Lucija COGA Somayeh AKBARI +1 位作者 Janez KOVA Mitjan KALIN 《Friction》 SCIE EI CAS CSCD 2022年第2期296-315,共20页
In this work,we evaluated the effect of the counter-body material(the same or dissimilar)and contact configuration(moving or stationary body),at similar contact tribological conditions,on the tribochemical and nanotop... In this work,we evaluated the effect of the counter-body material(the same or dissimilar)and contact configuration(moving or stationary body),at similar contact tribological conditions,on the tribochemical and nanotopography characteristics of adsorbed surface films.Zinc dialkyldithiophosphate(ZDDP),the best performing anti-wear additive,was used in self-mated steel/steel and DLC/DLC contacts,which were compared with mixed steel/DLC and DLC/steel contacts in 1-h and 6-h sliding tests.The macroscale(tribometer)and nanoscale(atomic force microscopy)friction,thickness,topography,and chemical(attenuated total reflection-Fourier transform infrared spectroscopy and X-ray photoelectron spectroscopy)properties of the tribofilms were studied.The results revealed unexpectedly large differences in all the studied tribofilm parameters;this is because all the tribofilms are completely different;this includes the chemical composition,which is known to have a crucial effect on the nano-and macro-scale tribological properties.These results clearly demonstrate that the surface material,additives,and common contact operating parameters,that is,pressure,velocity,and temperature,crucially affect the ZDDP tribofilm as well as the position of the moving or stationary surface within the contact,and the material of the moving/stationary bodies. 展开更多
关键词 dithiophosphate(ZDDP) diamond-like carbon(dlc) STEEL TRIBOFILM tribochemistry nano-friction thickness topography
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Influence of tribofilm on superlubricity of highly-hydrogenated amorphous carbon films in inert gaseous environments 被引量:3
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作者 LIU ShuWei ZHANG ChenHui +5 位作者 OSMAN Eryilmaz CHEN XinChun MA TianBao HU YanZhong LUO JianBin ALI Erdemir 《Science China(Technological Sciences)》 SCIE EI CAS CSCD 2016年第12期1795-1803,共9页
In this study,we mainly focus on the structural morphology and inter-atomic bonding state of tribofilms resulting from a highly-hydrogenated amorphous carbon(a-C:H) film in order to ascertain the underlying mechanisms... In this study,we mainly focus on the structural morphology and inter-atomic bonding state of tribofilms resulting from a highly-hydrogenated amorphous carbon(a-C:H) film in order to ascertain the underlying mechanisms for its superlubric behavior(i.e.,less than 0.01 friction coefficient).Specifically,we achieved superlubricity(i.e.,friction coefficients of down to 0.003) with this film in dry nitrogen and argon atmospheres especially when the tribo-pair is made of an a-C:H coated Si disk sliding against an a-C:H coated steel ball,while the a-C:H coated disk against uncoated ball does not provide superlubricity.We also found that the state of superlubricity is more stable in argon than in nitrogen and the formation of a smooth and uniformly-thick carbonaceous tribofilm appears to be one of the key factors for the realization of such superlubricity.Besides,the interfacial morphology of sliding test pairs and the atomic-scale bond structure of the carbon-based tribofilms also play an important role in the observed superlubric behavior of a-C:H films.Using Raman spectroscopy and high resolution transmission electron microscopy,we have compared the structural differences of the tribofilms produced on bare and a-C:H coated steel balls.For the a-C:H coated ball as mating material which provided superlow friction in argon,structural morphology of the tribofilm was similar or comparable to that of the original a-C:H coating;while for the bare steel ball,the sp^2-bonded C fraction in the tribofilm increased and a fingerprint-like nanocrystalline structure was detected by high resolution transmission electron microscopy(HRTEM).We also calculated the shear stresses for different tribofilms,and established a relationship between the magnitude of the shear stresses and the extent of sp^3-sp^2 phase transformation. 展开更多
关键词 diamond-like carbondlc films superlubricty tribofilm high resolution transmission electron microscopy(HRTEM) phase transformation
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One-step method to enhance biotribological properties and biocompatibility of DLC coating by ion beam irradiation 被引量:3
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作者 Yuzhen LIU Kelun ZHANG +3 位作者 Jae-Ho HAN Youn-Hoo HWANG Shusheng XU Dae-Eun KIM 《Friction》 SCIE EI CAS CSCD 2022年第7期1114-1126,共13页
A one-step method was developed to create a highly biocompatible micropatterned surface on a diamond-like carbon(DLC)through irradiation with a nitrogen ion beam and thus enhance the biocompatibility of osseointegrate... A one-step method was developed to create a highly biocompatible micropatterned surface on a diamond-like carbon(DLC)through irradiation with a nitrogen ion beam and thus enhance the biocompatibility of osseointegrated surfaces and biotribological performance of articular surfaces.The biocompatibility and biotribological mechanisms were analyzed in terms of the structure and morphology of DLC.It was demonstrated that a layer enriched in sp^(3) C-N bonds was formed on the surface of the DLC after nitrogen ion beam irradiation.Moreover,with an increase in the radiation dose,the content of sp^(3) C-N on the DLC surface increased significantly,and the biocompatibility was positively correlated with it.The adhesion of the MC3T3 osteoblasts increased significantly from 32%to 86%under an irradiation dose of 8×10^(15) ions/cm^(2).In contrast,the micropattern had a significant negative effect on the adhesion of the osteoblasts as it physically hindered cell expansion and extension.The micropattern with a depth of 37 nm exhibited good friction properties,and the coefficient of friction was reduced by 21%at relatively high speeds. 展开更多
关键词 ion beam irradiation BIOCOMPATIBILITY diamond-like carbon(dlc) in-vivo MICROPATTERN biotribological performance
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Mechanism of superlubricity of a DLC/Si_(3)N_(4) contact in the presence of castor oil and other green lubricants 被引量:2
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作者 Yun LONG Yang WANG +4 位作者 Volker WEIHNACHT Stefan MAKOWSKI Momoji KUBO Jean Michel MARTIN Maria-Isabel DE BARROS BOUCHET 《Friction》 SCIE EI CAS CSCD 2022年第10期1693-1706,共14页
To meet the surging needs in energy efficiency and eco-friendly lubricants,a novel superlubricious technology using a vegetable oil and ceramic materials is proposed.By coupling different hydrogen-free amorphous carbo... To meet the surging needs in energy efficiency and eco-friendly lubricants,a novel superlubricious technology using a vegetable oil and ceramic materials is proposed.By coupling different hydrogen-free amorphous carbon coatings with varying fraction of sp^(2) and sp^(3) hybridized carbon in presence of a commercially available silicon nitride bulk ceramic,castor oil provides superlubricity although the liquid vegetable oil film in the contact is only a few nanometres thick at most.Besides a partial liquid film possibly separating surfaces in contact,local tribochemical reactions between asperities are essential to maintain superlubricity at low speeds.High local pressure activates chemical degradation of castor oil generating graphitic/graphenic-like species on top of asperities,thus helping both the chemical polishing of surface and its chemical passivation by H and OH species.Particularly,the formation of the formation of–(CH_(2)–CH_(2))n–noligomers have been evidenced to have a major role in the friction reduction.Computer simulation unveils that formation of chemical degradation products of castor oil on friction surfaces are favoured by the quantity of sp^(2)-hybridized carbon atoms in the amorphous carbon structure.Hence,tuning sp^(2)-carbon content in hydrogen-free amorphous carbon,in particular,on the top layers of the coating,provides an alternative way to control superlubricity achieved with castor oil and other selected green lubricants. 展开更多
关键词 SUPERLUBRICITY diamond-like carbon(dlc) sp^(2)-hybridized carbon hydrogen passivation castor oil
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Effects of annealing treatment on tribological behavior of tungsten-doped diamond-like carbon film under lubrication(Part 2):Tribological behavior under MoDTC lubrication 被引量:2
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作者 Shaojun ZHANG Lina ZHU +6 位作者 Yanyan WANG Jiajie KANG Haidou WANG Guozheng MA Haipeng HUANG Guang’an ZHANG Wen YUE 《Friction》 SCIE EI CAS CSCD 2022年第7期1061-1077,共17页
Molybdenum dialkyldithiocarbamate(MoDTC)is widely used as a friction modifier in engine lubricating oil.Under MoDTC lubrication,the friction and wear behaviors of tungsten-doped diamond-like carbon(W-DLC)films anneale... Molybdenum dialkyldithiocarbamate(MoDTC)is widely used as a friction modifier in engine lubricating oil.Under MoDTC lubrication,the friction and wear behaviors of tungsten-doped diamond-like carbon(W-DLC)films annealed at 100-400℃were discussed and evaluated using scanning electron microscopy(SEM),atomic force microscopy(AFM),and Raman spectroscopy.Under(polymerized alpha olefin)PAO+MoDTC lubrication,the coefficient of friction of all samples decreased,but the wear rates of the W-DLC films annealed at 300℃increased significantly.By interacting with zinc dialkyldithiophosphate(ZDDP),the wear rates of W-DLC films annealed at different temperatures declined significantly owing to the formation of dense phosphate tribofilms on the worn surfaces. 展开更多
关键词 diamond-like carbon(dlc) annealing friction and wear behaviors molybdenum dialkyldithiocarbamate(MoDTC) zinc dialkyldithiophosphate(ZDDP)
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Effects of Adsorption of Albumin and Gamma-Globulin on the Tribological Performance of a Diamond-Like Carbon Film
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作者 WU Bingjie LENG Yongxiang 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2019年第5期1103-1108,共6页
The effects of surface adsorption of bovine serum albumin(BSA) and human gamma-globulin(HGG) on the tribological performance of a DLC film were investigated using a quartz crystal microbalance with dissipation(QCM-D),... The effects of surface adsorption of bovine serum albumin(BSA) and human gamma-globulin(HGG) on the tribological performance of a DLC film were investigated using a quartz crystal microbalance with dissipation(QCM-D), a ball-on-disk reciprocating tribometer, and a three-electrode electrochemical cell. The results showed that the wear depth in the BSA solution was higher than that in the HGG solution. In the HGG solution, the HGG-adsorbed layer could act as a lubricating layer and protect the DLC film from wear. The wear volume of DLC film in BSA and HGG mixture solution was higher than that in single HGG solution. This may be because the BSA molecules inhibit the formation of HGG adsorbed layer during sliding. 展开更多
关键词 Diamond like carbon(dlc) Quartz crystal MICROBALANCE with dissipation(QCM-D) Adsorbed layer Wear
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Enhanced Tribological Performance of Diamond Films by Utilizing DLC and DLC-H Top Layers
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作者 雷学林 严莹 +2 位作者 张航 李子璇 何云 《Journal of Shanghai Jiaotong university(Science)》 EI 2023年第5期665-675,共11页
High-performance diamond films are highly demanded on tool surfaces for wire-drawing and mechanical sealing applications.Herein,this work aims at enhancing the tribological performance of chemical vapor deposition dia... High-performance diamond films are highly demanded on tool surfaces for wire-drawing and mechanical sealing applications.Herein,this work aims at enhancing the tribological performance of chemical vapor deposition diamond films in water-lubricated conditions by utilizing non-hydrogenated and hydrogenated diamond-like carbon(DLC and DLC-H)top layers.The tribological properties of bilayer micro-crystalline diamond(MCD)/DLC,MCD/DLC-H,nano-crystalline diamond(NCD)/DLC and NCD/DLC-H films are evaluated,in terms of maximal and stable coefficients of friction(COFs),C—C bonds transformation,worn surface morphology and specific wear rates.The results show that DLC or DLC-H coated on diamond layer significantly suppresses the initial maximal COF peak and the wear of counterpart ball.Moreover,severe regular arranged sp^(2) C—C bonds transformation is detected on MCD film,in comparison to NCD;while inversely,the NCD/DLC bilayer exhibits severer C—C bonds transformation effect compared with the MCD/DLC.Furthermore,the DLC-H top layer shows a larger decreasing rate of maximal COFs and wear rates of counterpart balls,compared with the DLC coating,which is due to its superior self-lubricity.Among all the tested films,the NCD/DLC-H bilayer shows an optimized tribological performance. 展开更多
关键词 diamond film diamond-like carbon(dlc) BILAYER TRIBOLOGY
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基于RFPECVD方法不锈钢上沉积类金刚石薄膜的机械与摩擦特性 被引量:16
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作者 蔺增 巴德纯 +1 位作者 王志 闻立时 《真空科学与技术学报》 EI CAS CSCD 北大核心 2004年第1期77-80,共4页
讨论用射频等离子体增强化学气相沉积 (RFPECVD)工艺 ,在室温下实现在 1Cr18Ni9Ti不锈钢基底上镀类金刚石(DLC)膜。为提高DLC膜的结合力 ,首先在不锈钢基底上沉积Ti/TiN/TiC功能梯度膜。借助所设计的界面过渡层 ,成功地在不锈钢基底上... 讨论用射频等离子体增强化学气相沉积 (RFPECVD)工艺 ,在室温下实现在 1Cr18Ni9Ti不锈钢基底上镀类金刚石(DLC)膜。为提高DLC膜的结合力 ,首先在不锈钢基底上沉积Ti/TiN/TiC功能梯度膜。借助所设计的界面过渡层 ,成功地在不锈钢基底上沉积了一定厚度的DLC膜。通过优化沉积参数 ,所沉积的DLC膜在与 10 0Cr6钢球对磨时摩擦系数低于 0 0 2 0。在摩擦过程中DLC膜的磨损机制借助SEM、Raman分析进行了研究。 展开更多
关键词 RFPECVD法 不锈钢 类金刚石薄膜 射频等离子体增强化学气相沉积 dlc 摩擦系数
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类金刚石薄膜的摩擦学特性及磨损机制研究进展 被引量:18
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作者 李振军 徐洮 +3 位作者 李红轩 郝俊英 周惠娣 陈建敏 《材料科学与工程学报》 CAS CSCD 北大核心 2004年第5期774-777,共4页
类金刚石薄膜已显示了重要的摩擦学应用价值 ,其中化学气相沉积的类金刚石薄膜 (DLC)具有膜层致密、厚度均匀、摩擦学性能优良等特点成为广泛采用的一种沉积方法。本文介绍了气源成分、基体材料、摩擦环境、摩擦对偶、载荷及速度对化学... 类金刚石薄膜已显示了重要的摩擦学应用价值 ,其中化学气相沉积的类金刚石薄膜 (DLC)具有膜层致密、厚度均匀、摩擦学性能优良等特点成为广泛采用的一种沉积方法。本文介绍了气源成分、基体材料、摩擦环境、摩擦对偶、载荷及速度对化学气相沉积制备类金刚石薄膜的摩擦学特性的影响 ,概述了其摩擦磨损机理 ,同时探讨了进一步研究工作的方向。 展开更多
关键词 类金刚石薄膜 摩擦学特性 磨损机制 化学气相沉积
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硒化锌基底2~16μm超宽带硬质红外增透膜的研制 被引量:18
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作者 潘永强 杭凌侠 +1 位作者 梁海锋 田刚 《光学学报》 EI CAS CSCD 北大核心 2010年第4期1201-1204,共4页
硒化锌材料具有较宽的透光区,使其在红外区有着广泛的应用,然而其作为基底,镀制超宽带增透膜却有相当大的难度,尤其是膜层强度问题。设计出了硒化锌基底上2~16μm的多层超宽带增透膜,并采用离子束辅助沉积工艺在硒化锌基底上进行了多... 硒化锌材料具有较宽的透光区,使其在红外区有着广泛的应用,然而其作为基底,镀制超宽带增透膜却有相当大的难度,尤其是膜层强度问题。设计出了硒化锌基底上2~16μm的多层超宽带增透膜,并采用离子束辅助沉积工艺在硒化锌基底上进行了多次实验,并对所使用的氟化钇(YF_3)和硒化锌膜料进行了分析,发现YF_3在3400和1640 cm^(-1)两个波数处的吸收峰。通过将低折射率层改为氟化钡和氟化钇的组合层后,在硒化锌基底上成功镀制出了多层宽带增透膜并采用脉冲电弧离子镀技术在多层薄膜的表面镀制了一定厚度的类金刚石(DLC)薄膜,增强了膜层的强度。最终使硒化锌基底上镀制的超宽带增透膜在2~16μm范围内的平均透射比大于93%,峰值透射比大于97%,并且膜层的强度较好。 展开更多
关键词 光学薄膜 超宽带增透膜 离子束辅助沉积 硒化锌 类金刚石薄膜
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磁过滤阴极真空弧沉积薄膜研究 被引量:15
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作者 吴瑜光 张通和 +2 位作者 张荟星 张孝吉 王广甫 《微细加工技术》 2001年第1期45-49,共5页
采用磁过滤阴极真空孤沉积技术对从弧源引出离子束中的大颗粒进行过滤后 ,在硅和聚合物表面进行离子注入和低能离子束沉积 ,可获得特性优异的沉积金属膜、超硬膜 (类金刚石 ,CN膜 )、陶瓷膜 (TiN ,TiC)等。电子显微镜观察表明 ,大颗粒... 采用磁过滤阴极真空孤沉积技术对从弧源引出离子束中的大颗粒进行过滤后 ,在硅和聚合物表面进行离子注入和低能离子束沉积 ,可获得特性优异的沉积金属膜、超硬膜 (类金刚石 ,CN膜 )、陶瓷膜 (TiN ,TiC)等。电子显微镜观察表明 ,大颗粒已被过滤 ,表面结构致密。由于先进行离子注入 ,在基体表面预先形成了过渡层 ,从而改善了沉积膜的粘合特性 ,膜与基体的粘合特性有了明显提高。测量结果表明 ,沉积膜的硬度、抗磨损和抗腐蚀特性均有了明显提高。非晶金刚石薄膜表面硬度可达到5 展开更多
关键词 磁过滤 离子沉积 聚合物 类金刚石膜
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不同过渡层对DLC薄膜力学性能和摩擦学性能的影响 被引量:15
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作者 卓国海 柯培玲 +2 位作者 李晓伟 汪爱英 赵运才 《中国表面工程》 EI CAS CSCD 北大核心 2015年第6期39-47,共9页
薄膜与基体间的界面结合性能是决定薄膜性能发挥的关键要素。针对类金刚石薄膜(DLC)在硬质合金上结合力差的问题,采用线性阳极离子束复合磁控溅射技术在硬质合金YG8基体上设计制备了单层W过渡层、WC过渡层、双层W过渡层和三层W过渡层4... 薄膜与基体间的界面结合性能是决定薄膜性能发挥的关键要素。针对类金刚石薄膜(DLC)在硬质合金上结合力差的问题,采用线性阳极离子束复合磁控溅射技术在硬质合金YG8基体上设计制备了单层W过渡层、WC过渡层、双层W过渡层和三层W过渡层4种不同W过渡层的DLC薄膜,探讨了不同过渡层对DLC薄膜力学和摩擦学性能的影响。结果表明:不同过渡层结构的DLC薄膜结构致密,界面柱状生长随着层数增加及过渡层厚度的降低而打断,有利于改善薄膜的韧性。当为三层W过渡层时,DLC薄膜的断裂韧性达到最大值6.44 MPa·m1/2;与单层W过渡层相比,薄膜硬度有小幅下降,但薄膜内应力降低了55%,且膜/基匹配性更佳,结合强度高达85N,此时薄膜具有较低的摩擦因数和磨损率,表现出比较优异的抗磨减摩性能。 展开更多
关键词 类金刚石 过渡层 力学性能 摩擦性能
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Cr含量对类石墨碳涂层硬度及其价键结构的影响 被引量:11
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作者 张永宏 马婕 蒋百灵 《材料热处理学报》 EI CAS CSCD 北大核心 2007年第4期106-110,共5页
为了探讨Cr含量对类石墨碳(GLC)涂层硬度的影响机理,采用非平衡磁控溅射离子镀技术,通过调整Cr靶电流,制备出了具有不同Cr含量的GLC涂层。借助显微硬度计测量了涂层的硬度,利用X射线衍射(XRD)和X射线光电子能谱(XPS)分析了涂层的成分、... 为了探讨Cr含量对类石墨碳(GLC)涂层硬度的影响机理,采用非平衡磁控溅射离子镀技术,通过调整Cr靶电流,制备出了具有不同Cr含量的GLC涂层。借助显微硬度计测量了涂层的硬度,利用X射线衍射(XRD)和X射线光电子能谱(XPS)分析了涂层的成分、相组成和主元素的价键结构。结果表明,Cr有显著软化GLC涂层的作用。随着Cr含量增加,GLC涂层中的sp3杂化碳的含量持续减小,sp2杂化碳的含量先增后减,而金属铬及碳铬化合物的含量则不断增大。上述因素对GLC涂层的硬度变化均有影响,而涂层中sp3杂化碳的含量随着Cr含量增加持续减小是造成GLC涂层硬度不断降低的主要原因。 展开更多
关键词 类金刚石碳(dlc) 类石墨碳(GLC) 硬度 价键结构
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类金刚石(DLC)膜对2Crl3不锈钢耐蚀性能的影响 被引量:8
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作者 黄桂芳 周灵平 +3 位作者 李绍禄 李德意 赵立华 王巧玲 《表面技术》 EI CAS CSCD 北大核心 2002年第1期9-11,共3页
采用失重法、极化曲线法和金相显微分析等方法研究了类金刚石 (DLC)膜对 2Crl3不锈钢耐蚀行为的影响。失重试验结果表明 :DLC膜较薄时对 2Crl3不锈钢在中性NaCI溶液中耐全面腐蚀的影响不明显 ,而膜较厚时能显著降低 2Crl3不锈钢的腐蚀速... 采用失重法、极化曲线法和金相显微分析等方法研究了类金刚石 (DLC)膜对 2Crl3不锈钢耐蚀行为的影响。失重试验结果表明 :DLC膜较薄时对 2Crl3不锈钢在中性NaCI溶液中耐全面腐蚀的影响不明显 ,而膜较厚时能显著降低 2Crl3不锈钢的腐蚀速度 ;失重试验和电化学试验均表明DLC膜降低了 2Crl3不锈钢在酸性介质中的腐蚀速度 ;动电位扫描曲线和金相显微分析说明DLC膜明显改善了 2Crl3不锈钢基体抗点蚀。 展开更多
关键词 类金刚石膜 dlc 腐蚀速度 点蚀 晶间腐蚀
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不同金属基材上类金刚石薄膜的摩擦特性 被引量:13
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作者 郑锦华 李聪慧 +1 位作者 张冲 晁云峰 《光学精密工程》 EI CAS CSCD 北大核心 2013年第6期1545-1552,共8页
针对类金刚石(DLC)薄膜在精密机械零件中的应用,研究了在常温条件下沉积高界面强度的DLC薄膜的技术,以提高DLC薄膜与金属基材之间的结合强度。通过在基材与薄膜之间沉积加入a-Si∶H中间过渡层,研究了在不同金属基材上DLC薄膜的结合强度... 针对类金刚石(DLC)薄膜在精密机械零件中的应用,研究了在常温条件下沉积高界面强度的DLC薄膜的技术,以提高DLC薄膜与金属基材之间的结合强度。通过在基材与薄膜之间沉积加入a-Si∶H中间过渡层,研究了在不同金属基材上DLC薄膜的结合强度。采用Ball-on-Disk方法评价了薄膜的摩擦特性并测定其摩擦系数、疲劳破坏寿命和磨耗。实验结果表明:在薄膜与金属基材之间加入a-Si∶H过渡层后,界面的结合(键合)强度得到了明显的改善,在金属基材上沉积的DLC薄膜在磨耗过程中被完全磨穿而没有发生剥离。实验显示,在自制的化学气相沉积RF-DCCVD装置上沉积的DLC薄膜的最大沉积厚度是3.3μm;在1μm厚度的薄膜上施加2.94N的负荷(点载荷),其疲劳破坏寿命达到了70万循环;DLC薄膜与SiC,Si3N4,SUS304和SUJ2材料之间的摩擦系数为0.1~0.15。得到的结果验证了薄膜与金属间的结合强度和摩擦特性能够满足精密机械零件的使用要求。 展开更多
关键词 类金刚石(dlc)薄膜 中间过渡材料 摩擦和磨耗 薄膜界面强度 化学气相沉积(CVD)
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多样品法确定类金刚石薄膜的光学常数与厚度 被引量:12
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作者 周毅 汪爱英 《光学学报》 EI CAS CSCD 北大核心 2010年第8期2467-2472,共6页
采用乙烷气体辉光放电法在单晶Si衬底上制备了名义厚度分别为75,150和250nm的类金刚石碳(DLC)薄膜,除沉积时间外其他工艺参数完全一致。使用可变入射角光谱型椭偏仪(VASE)测量了380~1700nm波段的椭偏谱。该研究发现,对单一DLC样品的椭... 采用乙烷气体辉光放电法在单晶Si衬底上制备了名义厚度分别为75,150和250nm的类金刚石碳(DLC)薄膜,除沉积时间外其他工艺参数完全一致。使用可变入射角光谱型椭偏仪(VASE)测量了380~1700nm波段的椭偏谱。该研究发现,对单一DLC样品的椭偏数据进行分析时,一定的范围内,假定不同的薄膜厚度均可以得到非常好的拟合结果。结果表明,采用单样品椭偏法拟合时,厚度与光学常数呈现出强烈的关联性,无法快速获得准确的结果。采用多样品椭偏法,对三个样品建立相同的物理模型,假定他们的光学常数相同,进行数据拟合。分析发现该方法可以快速、简便地获得精确的折射率、消光系数以及厚度值。经过检验,结果具有非常好的唯一性。 展开更多
关键词 薄膜光学 多样品分析 光谱型椭偏仪 光学常数 类金刚石
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