The research of diamond film growth with a process of hot filament chemical vapourdeposition(HF·CVD)has been carried out for several years,and one of the main technicalproblems hindering the development of this
文摘The research of diamond film growth with a process of hot filament chemical vapourdeposition(HF·CVD)has been carried out for several years,and one of the main technicalproblems hindering the development of this
