期刊文献+
共找到2篇文章
< 1 >
每页显示 20 50 100
铝纳米薄膜对铜纳米薄膜的防护作用
1
作者 汤文慧 张龙 吴宏荣 《微纳电子技术》 CAS 2024年第5期59-65,共7页
铜纳米薄膜在微电子器件中应用广泛。然而,纳米尺度的铜表面极易发生氧化,影响铜纳米薄膜的电学性能。利用物理气相沉积方法制备了铜纳米薄膜,研究了基底粗糙度对铜纳米薄膜电学性能退化的影响,发现基底粗糙度越大,铜的电学性能退化越... 铜纳米薄膜在微电子器件中应用广泛。然而,纳米尺度的铜表面极易发生氧化,影响铜纳米薄膜的电学性能。利用物理气相沉积方法制备了铜纳米薄膜,研究了基底粗糙度对铜纳米薄膜电学性能退化的影响,发现基底粗糙度越大,铜的电学性能退化越快。通过在铜纳米薄膜的表面蒸镀铝纳米薄膜对铜纳米薄膜进行防护,研究了铝纳米薄膜厚度对其在不同环境下防护效果的影响,结果显示铝膜厚度越大,对铜纳米薄膜的防护效果越好。通过高温破坏测试,发现铝纳米薄膜能有效地提高铜纳米薄膜的极限工作温度,当铝纳米薄膜厚度为10 nm时,可将铜纳米薄膜的极限工作温度提高2.5倍。 展开更多
关键词 铜纳米薄膜 铝纳米薄膜 物理气相沉积 电学性能 氧化防护
下载PDF
Carrier Density and Plasma Frequency of Alummum Nanofilms
2
作者 HaoDU JunGONG +4 位作者 ChaoSUN RongfangHUANG lISHIWEN W.Y.Cheung S.P.Wong 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2003年第4期365-367,共3页
In this work, the prerequisite and mode of electromagnetic response of Al nanof ilms to electromagnetic wave field was suggested. Reflectance, transmittance in infrared region and carrier density of the films was meas... In this work, the prerequisite and mode of electromagnetic response of Al nanof ilms to electromagnetic wave field was suggested. Reflectance, transmittance in infrared region and carrier density of the films was measured. With the carrier density of the films, the dependence of their plasma frequencies on the film thickness was obtained. On the other hand, the dependence of absorptance on the frequency of electromagnetic wave field was set up by using the measured reflectance and transmittance, which provided plasma frequency-film thickness relation as well. Similarity of both plasma frequency-film thickness relations proved plasma resonance as a mode of electromagnetic response in Al nanofilms. 展开更多
关键词 aluminum nanofilm Electromagnetic response Size effect
下载PDF
上一页 1 下一页 到第
使用帮助 返回顶部