The accuracy and repeatability of the laser interferometer measurement system （LIMS） are often limited by the mirror surface error that comes from the mirror surface shape and distortion. This paper describes a new ...The accuracy and repeatability of the laser interferometer measurement system （LIMS） are often limited by the mirror surface error that comes from the mirror surface shape and distortion. This paper describes a new method to calibrate mirror map on ultraprecise movement stage （UPMS） with nanopositioning and to make a real-time compensation for the mirror surface error by using mirror map data tables with the software algorithm. Based on the mirror map test model, the factors affecting mirror map are analyzed through geometric method on the UPMS with six digrees of freedom. Dam processing methods including spline interpolation and spline offsets are used to process the raw sampling data to build mirror map tables. The linear interpolation as compensation method to make a real-time correction on the stage mirror unflatness is adopted and the correction formulas are illuminated. In this way, the measurement accuracy of the system is obviously improved from 40 nm to 5 nm.展开更多
文摘研究了不同运动状态下扰动重力水平分量(HDG)对高精度惯导系统(inertial navigation system,INS)的位置误差影响。首先推导了HDG对INS误差影响的状态空间方程,进而推导出3种运动条件下INS位置误差与HDG之间的解析关系式,设计了基于惯导解算求解上述影响的方法。在匀速运动条件下,分别通过解析式与惯导解算两种方法计算了相同HDG引起的INS位置误差。解析式计算结果表明,±80 m Gal(1 m Gal=10-5m/s2)范围内变化的HDG约可引起最大约3 000 m的INS位置误差;对两种方法计算结果的比较显示,所得INS位置误差的量级与变化情况基本一致,两组结果验证了各自方法的有效性。
文摘The accuracy and repeatability of the laser interferometer measurement system （LIMS） are often limited by the mirror surface error that comes from the mirror surface shape and distortion. This paper describes a new method to calibrate mirror map on ultraprecise movement stage （UPMS） with nanopositioning and to make a real-time compensation for the mirror surface error by using mirror map data tables with the software algorithm. Based on the mirror map test model, the factors affecting mirror map are analyzed through geometric method on the UPMS with six digrees of freedom. Dam processing methods including spline interpolation and spline offsets are used to process the raw sampling data to build mirror map tables. The linear interpolation as compensation method to make a real-time correction on the stage mirror unflatness is adopted and the correction formulas are illuminated. In this way, the measurement accuracy of the system is obviously improved from 40 nm to 5 nm.
