为了说明原子光刻(A tom L ithography)在纳米计量及传递作用中的特殊地位,首先对纳米计量标准及其现状进行了简要介绍,提出纳米计量中原子光刻的基本概念和优势,结合原子光刻实验装置对原子光刻技术的工作机理进行了分析。结果表明,可...为了说明原子光刻(A tom L ithography)在纳米计量及传递作用中的特殊地位,首先对纳米计量标准及其现状进行了简要介绍,提出纳米计量中原子光刻的基本概念和优势,结合原子光刻实验装置对原子光刻技术的工作机理进行了分析。结果表明,可以通过原子光刻技术得到纳米量级刻印条纹,为纳米计量及标准传递提供更加精确的手段。最后对常见的2种原子光刻技术——沉积型原子光刻和虚狭缝型原子光刻进行了阐述,指出2者的不同之处,为不同条件下原子光刻提供了一定的借鉴。展开更多
This paper presents the results of a stability study of a photodiode realized in the Laboratoire de Métrologie des Rayonnements (LMR-INSAT, Tunisia). The study was performed during six years and concerned with th...This paper presents the results of a stability study of a photodiode realized in the Laboratoire de Métrologie des Rayonnements (LMR-INSAT, Tunisia). The study was performed during six years and concerned with the photodiode optical and electrical characteristics. This study involves in one side, the reflectivity stability for different wavelengths and in the other side, the stability of the series and shunt resistances. The experimental results confirm the stability of the photodiode spectral response since the reflection coefficient maximum uncertainty is equal to 0.0055 with an experimental uncertainty of about 0.0016 (at 1? level) for the mean value of the reflectivity over the study duration. Moreover, the shunt and series resistances are equal to 5.14 k? and 7.61 ? respectively with an uncertainty value of 0.01 k? and 0.04 ? respectively (at 1? level). This photodiode does not display any ageing aspect. Consequently, the PSiZ photodiode can be used as a Transfer Standard for radiometric measurement in the visible spectral range.展开更多
文摘为了说明原子光刻(A tom L ithography)在纳米计量及传递作用中的特殊地位,首先对纳米计量标准及其现状进行了简要介绍,提出纳米计量中原子光刻的基本概念和优势,结合原子光刻实验装置对原子光刻技术的工作机理进行了分析。结果表明,可以通过原子光刻技术得到纳米量级刻印条纹,为纳米计量及标准传递提供更加精确的手段。最后对常见的2种原子光刻技术——沉积型原子光刻和虚狭缝型原子光刻进行了阐述,指出2者的不同之处,为不同条件下原子光刻提供了一定的借鉴。
文摘This paper presents the results of a stability study of a photodiode realized in the Laboratoire de Métrologie des Rayonnements (LMR-INSAT, Tunisia). The study was performed during six years and concerned with the photodiode optical and electrical characteristics. This study involves in one side, the reflectivity stability for different wavelengths and in the other side, the stability of the series and shunt resistances. The experimental results confirm the stability of the photodiode spectral response since the reflection coefficient maximum uncertainty is equal to 0.0055 with an experimental uncertainty of about 0.0016 (at 1? level) for the mean value of the reflectivity over the study duration. Moreover, the shunt and series resistances are equal to 5.14 k? and 7.61 ? respectively with an uncertainty value of 0.01 k? and 0.04 ? respectively (at 1? level). This photodiode does not display any ageing aspect. Consequently, the PSiZ photodiode can be used as a Transfer Standard for radiometric measurement in the visible spectral range.
