We analyzed perpendicularly configured dual-frequency（DF） capacitively coupled plasmas（CCP）.In this configuration,two pairs of electrodes are arranged oppositely,and the discharging is perpendicularly driven by tw...We analyzed perpendicularly configured dual-frequency（DF） capacitively coupled plasmas（CCP）.In this configuration,two pairs of electrodes are arranged oppositely,and the discharging is perpendicularly driven by two radio frequency（RF） sources.Particle-in-cell/Monte Carlo（PIC/MC） simulation showed that the configuration had some advantages as this configuration eliminated some dual frequency coupling effects.Some variation and potential application of the discharging configuration is discussed briefly.展开更多
The main ion-atomic collision treatment methods based on Monte-Carlo simulation are considered and discussed. We have proposed an efficient scheme for simulation of time between collisions taking into account cross-se...The main ion-atomic collision treatment methods based on Monte-Carlo simulation are considered and discussed. We have proposed an efficient scheme for simulation of time between collisions taking into account cross-section dependence on ion velocity and random generation of ion velocities and scattering angles after collisions. The developed algorithm of simulation of interval between collisions takes into account the change of relative velocity of ion-atom pair as well as the change of cross-section of collision and atomic concentration. At the same time, unlike the widely used “null-collision” method, both the probability of collision and change of particles’ state which determines this probability are taken into consideration for each particle independently in time. The simulation results according to the techniques proposed are found to be close to the theoretical values of ion drift velocities. It is revealed that the “null-collision” method results in exceeding of drift velocity in strong and intermediate fields. At the same time the proposed method of accumulation of probability under the same conditions gives values close to theoretical ones. In weak fields calculated values of drift velocity in both methods exceed theoretical values to some small extent.展开更多
基金supported by National Natural Science Foundation of China(Nos.11275007 and 11275039)partly supported by Program for Liaoning Excellent Talents in University of China(LJQ2012098)
文摘We analyzed perpendicularly configured dual-frequency（DF） capacitively coupled plasmas（CCP）.In this configuration,two pairs of electrodes are arranged oppositely,and the discharging is perpendicularly driven by two radio frequency（RF） sources.Particle-in-cell/Monte Carlo（PIC/MC） simulation showed that the configuration had some advantages as this configuration eliminated some dual frequency coupling effects.Some variation and potential application of the discharging configuration is discussed briefly.
文摘The main ion-atomic collision treatment methods based on Monte-Carlo simulation are considered and discussed. We have proposed an efficient scheme for simulation of time between collisions taking into account cross-section dependence on ion velocity and random generation of ion velocities and scattering angles after collisions. The developed algorithm of simulation of interval between collisions takes into account the change of relative velocity of ion-atom pair as well as the change of cross-section of collision and atomic concentration. At the same time, unlike the widely used “null-collision” method, both the probability of collision and change of particles’ state which determines this probability are taken into consideration for each particle independently in time. The simulation results according to the techniques proposed are found to be close to the theoretical values of ion drift velocities. It is revealed that the “null-collision” method results in exceeding of drift velocity in strong and intermediate fields. At the same time the proposed method of accumulation of probability under the same conditions gives values close to theoretical ones. In weak fields calculated values of drift velocity in both methods exceed theoretical values to some small extent.
