Raman spectra of undoped GaN and Mg-doped GaN films grown by metal-organic chemical-vapor deposition on sapphire are investigated between 78 and 573K.A peak at 247cm -1 is observed in both Raman spectra of GaN and Mg-...Raman spectra of undoped GaN and Mg-doped GaN films grown by metal-organic chemical-vapor deposition on sapphire are investigated between 78 and 573K.A peak at 247cm -1 is observed in both Raman spectra of GaN and Mg-doped GaN.It is suggested that the defect-induced scattering is origin of the mode.The electronic Raman scattering mechanism and Mg-related local vibrational mode are excluded.Furthermore,the differences of E_2 and A_1(LO) modes in two samples are also discussed.The stress relaxation is observed in Mg-doped GaN.展开更多
Mg-doped GaN layers prepared by metalorganic chemical vapor deposition were annealed at temperatures between 550 and 950℃. Room temperature (RT) Hall and photoluminescence (PL) spectroscopy measurements were perf...Mg-doped GaN layers prepared by metalorganic chemical vapor deposition were annealed at temperatures between 550 and 950℃. Room temperature (RT) Hall and photoluminescence (PL) spectroscopy measurements were performed on the as-grown and annealed samples. After annealing at 850℃, a high hole concentration of 8 × 10^17 cm^-3 and a resistivity of 0. 8lΩ·cm are obtained. Two dominant defect-related PL emission bands in GaN.. Mg are investigated; the blue band is centered at 2. 8eV (BL) and the ultraviolet emission band is around 3.27eV (UVL). The relative intensity of BL to UVL increases after annealing at 550℃, but decreases when the annealing temperature is raised from 650 to 850℃, and finally increases sharply when the annealing temperature is raised to 950~C. The hole concentration increases with increased Mg doping, and decreases for higher Mg doping concentrations. These results indicate that the difficulties in achieving high hole concentration of 10^18cm^-3 appear to be related not only to hydrogen passivation, but also to self-compensation.展开更多
p-type conductivity and crystal quality of Mg-doped GaN grown by MOCVD have been improved through opti- mization of the magnesium flow rate. The hole concentration first increased and then decreased with the magnesium...p-type conductivity and crystal quality of Mg-doped GaN grown by MOCVD have been improved through opti- mization of the magnesium flow rate. The hole concentration first increased and then decreased with the magnesium flow rate while the mobility decreased monotonously. The optimum sample reached a hole concentration of 4. 1×10^17cm -3 and a resistivity of 1Ω·cm. Based on a self-compensation model involving the deep donor Mo, VN, we calculate the hole con- centration as a function of magnesium doping concentration NA ,which indicates that the self-compensation coefficient in- creases with NA;the hole concentration first increases with NA and reaches a maximum at NA≈4×10^19 ,then decreases rapidly as doping concentration increases. XRD also indicate that dislocation density decreased as magnesium flow rate decreased.展开更多
文摘Raman spectra of undoped GaN and Mg-doped GaN films grown by metal-organic chemical-vapor deposition on sapphire are investigated between 78 and 573K.A peak at 247cm -1 is observed in both Raman spectra of GaN and Mg-doped GaN.It is suggested that the defect-induced scattering is origin of the mode.The electronic Raman scattering mechanism and Mg-related local vibrational mode are excluded.Furthermore,the differences of E_2 and A_1(LO) modes in two samples are also discussed.The stress relaxation is observed in Mg-doped GaN.
文摘Mg-doped GaN layers prepared by metalorganic chemical vapor deposition were annealed at temperatures between 550 and 950℃. Room temperature (RT) Hall and photoluminescence (PL) spectroscopy measurements were performed on the as-grown and annealed samples. After annealing at 850℃, a high hole concentration of 8 × 10^17 cm^-3 and a resistivity of 0. 8lΩ·cm are obtained. Two dominant defect-related PL emission bands in GaN.. Mg are investigated; the blue band is centered at 2. 8eV (BL) and the ultraviolet emission band is around 3.27eV (UVL). The relative intensity of BL to UVL increases after annealing at 550℃, but decreases when the annealing temperature is raised from 650 to 850℃, and finally increases sharply when the annealing temperature is raised to 950~C. The hole concentration increases with increased Mg doping, and decreases for higher Mg doping concentrations. These results indicate that the difficulties in achieving high hole concentration of 10^18cm^-3 appear to be related not only to hydrogen passivation, but also to self-compensation.
文摘p-type conductivity and crystal quality of Mg-doped GaN grown by MOCVD have been improved through opti- mization of the magnesium flow rate. The hole concentration first increased and then decreased with the magnesium flow rate while the mobility decreased monotonously. The optimum sample reached a hole concentration of 4. 1×10^17cm -3 and a resistivity of 1Ω·cm. Based on a self-compensation model involving the deep donor Mo, VN, we calculate the hole con- centration as a function of magnesium doping concentration NA ,which indicates that the self-compensation coefficient in- creases with NA;the hole concentration first increases with NA and reaches a maximum at NA≈4×10^19 ,then decreases rapidly as doping concentration increases. XRD also indicate that dislocation density decreased as magnesium flow rate decreased.