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MoS_x/MoS_x-Mo纳米多层膜的制备及其环境摩擦学特性 被引量:2
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作者 郑晓华 居易 +3 位作者 沈霞 王运 涂江平 何丹农 《润滑与密封》 EI CAS CSCD 北大核心 2006年第7期84-86,共3页
用直流磁控溅射在钢基体上交替溅射制备了MoSx/MoSx-Mo纳米多层膜。采用划痕仪测试薄膜与基体的结合力;采用SEM和XRD分析了纳米多层膜的形貌和显微结构;在球-盘式微摩擦试验机上测试了纳米多层膜在真空和潮湿空气中的摩擦学性能。结果表... 用直流磁控溅射在钢基体上交替溅射制备了MoSx/MoSx-Mo纳米多层膜。采用划痕仪测试薄膜与基体的结合力;采用SEM和XRD分析了纳米多层膜的形貌和显微结构;在球-盘式微摩擦试验机上测试了纳米多层膜在真空和潮湿空气中的摩擦学性能。结果表明,纳米多层膜的结合力优于纯MoS2膜。随着溅射沉积气压的升高,MoSx(002)面择优取向减弱,纳米多层膜的结合力下降。溅射气压0.24 Pa沉积的纳米多层膜在真空和潮湿空气中都呈现出最低的摩擦因数和磨损率,具有优异的环境摩擦磨损特性。 展开更多
关键词 mosx薄膜 磁控溅射 多层膜 沉积压力 环境
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Improvement of tribological responses of sputtered MoSx films by indium ion implantation
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作者 YasuhideNAWATA HideoFUJIURA MakotoNISHIMURA 《Science China Mathematics》 SCIE 2001年第S1期343-347,共5页
Molybdenum disulfide (MoS_2) has been applied to various space mechanisms as solid lubricant. The tribological characteristics of sputtered MoSx films have been improved by inert gas ion implantation. We tried to exte... Molybdenum disulfide (MoS_2) has been applied to various space mechanisms as solid lubricant. The tribological characteristics of sputtered MoSx films have been improved by inert gas ion implantation. We tried to extend the wear life and reduce friction coefficient by high energy implantation of indium ions. In friction tests, a pin-on-disk tester was used to measure friction coeffi- cient and wear life in a vacuum, dry air and air of 30%, 50% and 80% RH. Indium ions implanted the film at a dose of 1×10^(16) ions/cm^2 exhibited friction coefficient of 0.008 and 5.0 times longer wear life than the unimplanted ones did. However, the wear life of this film tested in high humid air presented no im- provement. 展开更多
关键词 INDIUM ion IMPLANTATION sputtered mosx film low FRICTION COEFFICIENT
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