MEMS gyroscope is a new inertial navigation sensor,which can measure the input angular rate of sensitive axis using Coriolis effect.Compared to the conventional gyroscope,it owns many unique advantages.A novel structu...MEMS gyroscope is a new inertial navigation sensor,which can measure the input angular rate of sensitive axis using Coriolis effect.Compared to the conventional gyroscope,it owns many unique advantages.A novel structure of vibrating ring gyroscope is proposed and the finite element model of the oscillator is established based on MEMS technology.Through the modal analysis,the natural frequency and mode shapes of the oscillator are obtained.By analyzing the effects of the structural parameters on the mode shapes and frequency of the harmonic oscillator,the optimal design parameters are got.The frequency difference between the operating mode and the other modes is greater than 1kHz after optimization,which can avoid the frequency coupling of the operating mode and other vibrating modes of the oscillator.The simulation results show that the performance parameters of the ring structure meet the design requirements and have obvious advantages.展开更多
Micro-electro-mechanical system(MEMS)gyroscopes are an important sort of inertial sensor for identifying parameters of spinning structures,such as the spinning speed and angular deviation,based on the Coriolis effect....Micro-electro-mechanical system(MEMS)gyroscopes are an important sort of inertial sensor for identifying parameters of spinning structures,such as the spinning speed and angular deviation,based on the Coriolis effect.In this paper,the nonlinear mechanism of MEMS vibratory ring gyroscopes is analyzed by applying a fully coupled nonlinear model,in which the gyroscopic coupling and geometrically and structurally nonlinear couplings are all taken into account.The coupled differential equations governing the drive and sense motions are established via the Lagrangian equations.Numerical simulation is conducted,and the key nonlinear components and energy transfer behaviors between the drive and sense modes are elucidated.It is revealed that the cubic rigidity nonlinearity is another significant factor leading to the coupling between the drive and sense modes other than the gyroscopic coupling.Perturbation analysis is also carried out by using the method of multiple scales.The nonlinear frequency-amplitude responses of the drive and sense vibrations are obtained,and comprehensive parametric studies are performed.The significant effects of system damping,excitation amplitude,drive amplitude and spinning speed on the responses are discussed,which will facilitate to improve the nonlinear performance and sensitivity of the gyroscope.展开更多
文摘MEMS gyroscope is a new inertial navigation sensor,which can measure the input angular rate of sensitive axis using Coriolis effect.Compared to the conventional gyroscope,it owns many unique advantages.A novel structure of vibrating ring gyroscope is proposed and the finite element model of the oscillator is established based on MEMS technology.Through the modal analysis,the natural frequency and mode shapes of the oscillator are obtained.By analyzing the effects of the structural parameters on the mode shapes and frequency of the harmonic oscillator,the optimal design parameters are got.The frequency difference between the operating mode and the other modes is greater than 1kHz after optimization,which can avoid the frequency coupling of the operating mode and other vibrating modes of the oscillator.The simulation results show that the performance parameters of the ring structure meet the design requirements and have obvious advantages.
基金This study was supported by the National Natural Science Foundation of China(Grant Nos.1167218911772009 and 12072311)and High-Level Talents Program of Yangzhou University.
文摘Micro-electro-mechanical system(MEMS)gyroscopes are an important sort of inertial sensor for identifying parameters of spinning structures,such as the spinning speed and angular deviation,based on the Coriolis effect.In this paper,the nonlinear mechanism of MEMS vibratory ring gyroscopes is analyzed by applying a fully coupled nonlinear model,in which the gyroscopic coupling and geometrically and structurally nonlinear couplings are all taken into account.The coupled differential equations governing the drive and sense motions are established via the Lagrangian equations.Numerical simulation is conducted,and the key nonlinear components and energy transfer behaviors between the drive and sense modes are elucidated.It is revealed that the cubic rigidity nonlinearity is another significant factor leading to the coupling between the drive and sense modes other than the gyroscopic coupling.Perturbation analysis is also carried out by using the method of multiple scales.The nonlinear frequency-amplitude responses of the drive and sense vibrations are obtained,and comprehensive parametric studies are performed.The significant effects of system damping,excitation amplitude,drive amplitude and spinning speed on the responses are discussed,which will facilitate to improve the nonlinear performance and sensitivity of the gyroscope.
