针对MEMS流速传感器量程小及无法应用于曲面的不足,设计制造了一种柔性MEMS流速传感器,其结构主要包含加热电阻和3对测温热电阻,同时结合热损失和热温差工作原理来实现宽量程的流速测量。设计了带温度补偿的双惠斯登电桥测控电路,利用ST...针对MEMS流速传感器量程小及无法应用于曲面的不足,设计制造了一种柔性MEMS流速传感器,其结构主要包含加热电阻和3对测温热电阻,同时结合热损失和热温差工作原理来实现宽量程的流速测量。设计了带温度补偿的双惠斯登电桥测控电路,利用STM32微处理器ADC模块对多路流速测量结果进行采样。测试实验实现了0～32 m/s的输入风速测量,其中在1 m/s以下的低风速段内传感器具有100 m V/(m·s^(-1))的较高灵敏度,在风速(1～7 m/s)和(7～32 m/s)下的灵敏度分别为83.1 m V/(m·s^(-1))和28.3 m V/(m·s^(-1))。该柔性MEMS流速传感器可贴于曲面应用,测量范围大、精度高。展开更多
In order to discuss the several applications of MEMS in fluid area,study the components of MEMS.And introduce the principles,types and applications based on flow sensor and pressure sensor. In the last,discuss the pro...In order to discuss the several applications of MEMS in fluid area,study the components of MEMS.And introduce the principles,types and applications based on flow sensor and pressure sensor. In the last,discuss the problems when the sensors was applied in the fluid areas.展开更多
文摘针对MEMS流速传感器量程小及无法应用于曲面的不足,设计制造了一种柔性MEMS流速传感器,其结构主要包含加热电阻和3对测温热电阻,同时结合热损失和热温差工作原理来实现宽量程的流速测量。设计了带温度补偿的双惠斯登电桥测控电路,利用STM32微处理器ADC模块对多路流速测量结果进行采样。测试实验实现了0～32 m/s的输入风速测量,其中在1 m/s以下的低风速段内传感器具有100 m V/(m·s^(-1))的较高灵敏度,在风速(1～7 m/s)和(7～32 m/s)下的灵敏度分别为83.1 m V/(m·s^(-1))和28.3 m V/(m·s^(-1))。该柔性MEMS流速传感器可贴于曲面应用,测量范围大、精度高。
文摘In order to discuss the several applications of MEMS in fluid area,study the components of MEMS.And introduce the principles,types and applications based on flow sensor and pressure sensor. In the last,discuss the problems when the sensors was applied in the fluid areas.
