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常用封装材料的激光封焊工艺研究 被引量:13
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作者 李娜 吴洪江 《半导体技术》 CAS CSCD 北大核心 2013年第3期216-221,共6页
介绍了激光封焊工艺的优越性及其主要工艺参数对封焊效果产生的影响,对铝合金、铜和可伐等几种常用封装材料进行了封焊研究,比较了不同表面处理对封焊效果产生的影响。实验表明,表面镀镍金可以减少镜面反射,有利于对铜进行激光封焊,却... 介绍了激光封焊工艺的优越性及其主要工艺参数对封焊效果产生的影响,对铝合金、铜和可伐等几种常用封装材料进行了封焊研究,比较了不同表面处理对封焊效果产生的影响。实验表明,表面镀镍金可以减少镜面反射,有利于对铜进行激光封焊,却会影响铝合金和可伐的激光封焊质量。通过设置合适的工艺参数、选择合适的表面状态并且控制封装外壳的加工精度,使上述几种封装材料封焊后都达到了漏率小于1×10-9kPa.cm3/s的密封要求。 展开更多
关键词 激光封焊 镀层 铝合金 可伐
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OXIDATION BEHAVIOR OF KOVAR ALLOY IN CONTROLLED ATMOSPHERE 被引量:10
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作者 D. W. Luo Z.S. Shen 《Acta Metallurgica Sinica(English Letters)》 SCIE EI CAS CSCD 2008年第6期409-418,共10页
Controlled oxidation experiments were performed on Kovar alloy by changing oxidation atmosphere, temperature, and exposure time to produce films with different oxide type and thickness. The results indicated that sing... Controlled oxidation experiments were performed on Kovar alloy by changing oxidation atmosphere, temperature, and exposure time to produce films with different oxide type and thickness. The results indicated that single Fe3O4 and single FeO were respectively obtained when Kovar alloy was oxidized in N2-2.31%H2O-0.95%H2 at 500℃ and in N2-2.31%H2O-0.5%H2 at 1000℃, and all kinetic curves followed linear relation; mixed oxides of FeO and Fe3O4 formed when Kovar was oxidized in N2-2.31%H2O at 1000℃and parabolic kinetics were obeyed. Analysis of metallographic cross section of oxides indicated that oxygen diffusion inward through the oxide scale is responsible for intergranular oxide, which had formed beneath the oxide scales when the oxide products were mixed oxides of FeO and Fe3O4, and which did not occur when the oxide was single FeO or Fe3O4. The oxidation model was also established. 展开更多
关键词 kovar alloy Oxidation Controlled atmosphere H2-H2O-N2
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Ni-Ti焊料部分液相瞬间连接高纯Al_2O_3-Kovar工艺的研究 被引量:9
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作者 张春光 乔冠军 金志浩 《稀有金属材料与工程》 SCIE EI CAS CSCD 北大核心 2002年第4期299-302,共4页
通过Ni-Ti活性焊料部分液相瞬间连接工艺,实现了高纯Al2O3陶瓷和可伐合金(Kovar)的气密性连接。结果表明焊缝区呈现明显的“三明治”夹层结构,两侧主要为Ti2Ni金属间化合物层,中间为较厚的Ti固溶体层。接头强度最初随保温时间延长增加,... 通过Ni-Ti活性焊料部分液相瞬间连接工艺,实现了高纯Al2O3陶瓷和可伐合金(Kovar)的气密性连接。结果表明焊缝区呈现明显的“三明治”夹层结构,两侧主要为Ti2Ni金属间化合物层,中间为较厚的Ti固溶体层。接头强度最初随保温时间延长增加,但与焊接温度之间没有明显的单调关系。 展开更多
关键词 Ni-Ti焊料 部分液相瞬间连接 活性钎焊 氧化铝陶瓷 可代合金
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高硼硅3.3玻璃和可伐合金的激光封接界面研究 被引量:8
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作者 涂冶 季凌飞 +1 位作者 鲍勇 蒋毅坚 《应用激光》 CSCD 北大核心 2011年第1期12-14,共3页
采用多道激光透射封接技术,对大尺寸3.3高硼硅玻璃-可伐合金封接工艺进行了探索性研究,采用正交实验方法,实现了两种材料的可靠封接。确定了优化工艺参数:扫描速度为25mm/s,激光功率为100W,离焦量为+40mm,扫描次数2次。通过使用SEM、ED... 采用多道激光透射封接技术,对大尺寸3.3高硼硅玻璃-可伐合金封接工艺进行了探索性研究,采用正交实验方法,实现了两种材料的可靠封接。确定了优化工艺参数:扫描速度为25mm/s,激光功率为100W,离焦量为+40mm,扫描次数2次。通过使用SEM、EDX以及激光其聚焦显微镜观测硼硅玻璃-可伐合金的激光封接断面,对比相图,就结合界面的特征和机理进行了初步分析,Fe_2SiO_4化合物的形成是两者能够可靠封接的主要原因,确定了两种材料的激光可封接性。 展开更多
关键词 玻璃封接 可伐合金 激光技术 Fe2SiO4
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金属外壳封接中的可伐合金退火 被引量:7
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作者 刘静 李丰 《半导体光电》 CAS CSCD 北大核心 2005年第2期121-123,共3页
介绍了在可伐管壳封接工艺中可伐合金退火的重要性及目的,并分析得出了可伐合金退火的最佳温度及气氛。
关键词 可伐合金 退火温度 可控气氛
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Mo中间层对防止Al_2O_3/Kovar钎焊接头裂纹的作用(英文) 被引量:5
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作者 于治水 杨沛 +1 位作者 祁凯 李瑞峰 《稀有金属材料与工程》 SCIE EI CAS CSCD 北大核心 2008年第12期2118-2121,共4页
为避免Al2O3陶瓷/Kovar接头裂纹的产生,在Kovar表面磁控溅射金属Mo,并使用Ti-Cu-Ni活性钎料进行钎焊试验。通过扫描电镜和能谱对界面微观组织和成分进行了分析。结果表明,当溅射钼中间层的厚度为14.2μm时,在Al2O3/Kovar界面处,Mo中间... 为避免Al2O3陶瓷/Kovar接头裂纹的产生,在Kovar表面磁控溅射金属Mo,并使用Ti-Cu-Ni活性钎料进行钎焊试验。通过扫描电镜和能谱对界面微观组织和成分进行了分析。结果表明,当溅射钼中间层的厚度为14.2μm时,在Al2O3/Kovar界面处,Mo中间层可阻碍Kovar中Fe元素与钎料中Ti元素相互反应产生脆性FexTiy金属间化合物,防止了界面处裂纹的生成。 展开更多
关键词 AL2O3 kovar 磁控溅射 MO
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Effect of Kovar alloy oxidized in simulated N_2/H_2O atmosphere on its sealing with glass 被引量:5
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作者 Dawei Luo Wenbo Leng Zhuoshen Shen 《Journal of University of Science and Technology Beijing》 CSCD 2008年第3期267-271,共5页
The effect of Kovar alloy oxidized in simulated field atmosphere on its sealing with glass was studied in this article. After Kovar plates and pins were preoxidized in N2 with 0℃, 10℃ and 20℃ dew points at 1000℃ f... The effect of Kovar alloy oxidized in simulated field atmosphere on its sealing with glass was studied in this article. After Kovar plates and pins were preoxidized in N2 with 0℃, 10℃ and 20℃ dew points at 1000℃ for different times, Fe304 and Fe203 existed in the oxidation products on Kovar surface, and the quantity of Fe203 increased with increasing dew point and oxidation time. Then they were sealed with borosilicate glass insulator at 1030℃ for 20 rain. The results indicated that the type and quantity of oxidation products would directly influence the quality of glass-to-metal seals. With the increase of oxidation products, gas bubbles in the glass insulator were more serious, the climbing height of glass along the pins was higher, and corrosion of Kovar pins caused from the molten glass was transformed from uniform to the localized. 展开更多
关键词 kovar alloy OXIDATION SEALING GLASS microelectronic package
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可伐合金封接用Li_2O-Al_2O_3-ZnO-SiO_2微晶玻璃研究 被引量:7
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作者 杨丹 沈卓身 《电子元件与材料》 CAS CSCD 北大核心 2010年第4期57-60,共4页
使用烧结法制备了Li2O-Al2O3-ZnO-SiO2微晶玻璃,利用差热分析、X射线衍射、扫描电镜等测试分析方法,对其析晶和封接特性进行了研究。结果表明,晶化温度低于800℃时,微晶玻璃主晶相为ZnAl2O4,晶体大小为0.5μm;晶化温度高于800℃时,析出... 使用烧结法制备了Li2O-Al2O3-ZnO-SiO2微晶玻璃,利用差热分析、X射线衍射、扫描电镜等测试分析方法,对其析晶和封接特性进行了研究。结果表明,晶化温度低于800℃时,微晶玻璃主晶相为ZnAl2O4,晶体大小为0.5μm;晶化温度高于800℃时,析出晶体为ZnAl2O4和LiAlSi2O6纳米晶。该微晶玻璃具有与可伐合金相似的线膨胀系数,当加热温度达到980℃时,即可用于封接可伐合金;封接后的接口呈乳白色,外观良好,气密性和绝缘电阻均达到行业标准。 展开更多
关键词 微晶玻璃 可伐合金 封接
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4J29可伐合金材料低温热物性及弹性模量测试 被引量:7
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作者 文佳佳 张添 陆燕 《低温工程》 CAS CSCD 北大核心 2016年第6期43-47,共5页
为了研究4J29可伐合金的低温热物性和机械性能,为低温系统的设计、结构变形、力学稳定性、装调和光学校准等提供技术保障,分别选用"稳态纵向热流法"、"稳态法"测试了4J29可伐合金在77—300 K温区的热导率和比热容,... 为了研究4J29可伐合金的低温热物性和机械性能,为低温系统的设计、结构变形、力学稳定性、装调和光学校准等提供技术保障,分别选用"稳态纵向热流法"、"稳态法"测试了4J29可伐合金在77—300 K温区的热导率和比热容,采用弹性模量试验机测试了77—300 K温区的弹性模量系数。通过标准样品材料TC4对比及误差分析,证明热导率测量误差在9%以内,其它误差均控制在6%以内。 展开更多
关键词 4J29 可伐合金 低温 热导率 比热容 弹性模量
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工艺因素对玻璃与可伐合金浸润性的影响 被引量:5
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作者 朱奇农 马莒生 唐祥云 《电子元件与材料》 CAS CSCD 1995年第2期54-56,共3页
测定了在不同工艺条件下DM-305及BH-G/K两种玻璃与可伐合金之间的浸润角大小。对浸润角受气氛和金属表面氧化膜成分的影响进行了研究。为合理选择该种玻璃与可伐合金的封接工艺提供了理论依据。
关键词 封接 可伐合金 玻璃 集成电路 浸润性
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X射线对Kovar封装材料的剂量增强效应的Monte-Carlo计算 被引量:5
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作者 郭红霞 张义门 +5 位作者 陈雨生 周辉 龚建成 吴国荣 林东升 韩福斌 《核电子学与探测技术》 CAS CSCD 北大核心 2001年第5期392-396,共5页
用 Monte- Carlo光子 -电子耦合输运程序计算了真实半导体封装 Kovar结构对不同能量 X射线在硅中的剂量增强因子 ,并与内层不涂金的 Kovar结构进行比较 ,计算了界面处两种结构进入硅的净电子数 ,结果证实了界面处产生的剂量增强主要来... 用 Monte- Carlo光子 -电子耦合输运程序计算了真实半导体封装 Kovar结构对不同能量 X射线在硅中的剂量增强因子 ,并与内层不涂金的 Kovar结构进行比较 ,计算了界面处两种结构进入硅的净电子数 ,结果证实了界面处产生的剂量增强主要来自界面处高 Z材料二次电子的贡献 。 展开更多
关键词 剂量增强效应 MONTE-CARLO方法 平衡剂量 损伤增强 半导体 kovar 封装材料 集成电路 X射线
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Matched glass-to-Kovar seals in N_2 and Ar atmospheres 被引量:2
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作者 Cheng-hsien Kuo Pi-ying Cheng Chang-pin Chou 《International Journal of Minerals,Metallurgy and Materials》 SCIE EI CAS CSCD 2013年第9期874-882,共9页
The oxidation of Kovar alloy was investigated, the wetting and spreading behavior of hard and soft glasses on Kovar alloy were studed by using the sessile drop method, and the quality and the seal strength of glass-Ko... The oxidation of Kovar alloy was investigated, the wetting and spreading behavior of hard and soft glasses on Kovar alloy were studed by using the sessile drop method, and the quality and the seal strength of glass-Kovar seals were tested. The experimental results indicated that the preoxidation of Kovar alloy for approximately 10 min at 700℃ in air resulted in excellent adherence in glass-Kovar seals. The wetting and spreading behavior of glass on preoxidized Kovar alloy were superior to that on nonoxidized Kovar alloy. The wetting ability of ASF110 glass, at 950℃ and 980℃ in Ar and N2 atmospheres, was significantly superior to that of ASF200R and ASF700 glasses. The seal quality of the glass-preoxidized Kovar seal was superior to that of the glass-nonoxidized Kovar seal. The shear strength of the ASFll0 glass-preoxidized Kovar seal, which was prepared at 980℃ for 20 min in an Ar atmosphere, was approximately 3.9 MPa. 展开更多
关键词 kovar alloy glass SEALING ARGON nitrogen oxidation WETTING
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Comparison in interfacial phenomena in electric-field assisted anodic bonding of Kovar-glass and Kovar/Al film-glass 被引量:1
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作者 陈铮 《China Welding》 EI CAS 2001年第2期38-43,共6页
Anodic bonding of Kovar-glass and Kovar/Al film-glass were performed at temperatures of 513 K to 663 K under the static electric voltage of 500 V, in order to compare the interfacial phenomena in electric-field assist... Anodic bonding of Kovar-glass and Kovar/Al film-glass were performed at temperatures of 513 K to 663 K under the static electric voltage of 500 V, in order to compare the interfacial phenomena in electric-field assisted anodic bonding of Kovar-glass and Al-glass . SEM and EPMA were used to observe and analyzed the interfacial region. The growth rate of the alkali ions depletion layers in Kovar/Al-glass joint was slower than that in Kovar-glass joint. But the activation energies for the growth of depletion layers are about the same for both kinds of joint. 展开更多
关键词 anodic bonding GLASS kovar alloy ALUMINUM depletion layer growth rate
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Interfacial microstructure and mechanical properties of diffusion-bonded joints of titanium TC4 (Ti-6Al-4V) and Kovar (Fe-29Ni-17Co) alloys 被引量:1
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作者 Ting-feng Song Xiao-song Jiang +5 位作者 Zhen-yi Shao De-feng Mo De-gui Zhu Min-hao Zhu Christina H.Young Zhi-ping Luo 《Journal of Iron and Steel Research International》 SCIE EI CAS CSCD 2017年第10期1023-1031,共9页
Diffusion bonding is a near net shape forming process that can join dissimilar materials through atomic diffusion under a high pressure at a high temperature.Titanium alloy TC4(Ti-6 Al-4 V)and 4 J29 Kovar alloy(Fe-... Diffusion bonding is a near net shape forming process that can join dissimilar materials through atomic diffusion under a high pressure at a high temperature.Titanium alloy TC4(Ti-6 Al-4 V)and 4 J29 Kovar alloy(Fe-29 Ni-17 Co)were diffusely bonded by a vacuum hot-press sintering process in the temperature range of 700-850°C and bonding time of 120 min,under a pressure of 34.66 MPa.Interfacial microstructures and intermetallic compounds of the diffusion-bonded joints were characterized by optical microscopy,scanning electron microscopy,X-ray diffraction(XRD)and energy dispersive spectroscopy(EDS).The elemental diffusion across the interface was revealed by electron probe microanalysis.Mechanical properties of joints were investigated by micro Vickers hardness and tensile strength.Results of EDS and XRD indicated that(Fe,Co,Ni)-Ti,TiNi,Ti_2Ni,TiNi_2,Fe_2 Ti,Ti_(17) Mn_3 and Al_6 Ti_(19) were formed at the interface.When the bonding temperature was raised from 700 to 850°C,the voids of interface were reduced and intermetallic layers were widened.Maximum tensile strength of joints at 53.5 MPa was recorded by the sintering process at 850°C for 120 min.Fracture surface of the joint indicated brittle nature,and failure took place through interface of intermetallic compounds.Based on the mechanical properties and microstructure of the diffusion-bonded joints,diffusion mechanisms between Ti-6 Al-4 Vtitanium and Fe-29 Ni-17 Co Kovar alloys were analyzed in terms of elemental diffusion,nucleation and growth of grains,plastic deformation and formation of intermetallic compounds near the interface. 展开更多
关键词 Titanium alloy kovar alloy Diffusion-bonded joint Microstructure Mechanical property
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一种红外探测器用电子束焊接技术研究 被引量:3
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作者 刘森 张洪瑀 李硕 《激光与红外》 CAS CSCD 北大核心 2020年第3期305-309,共5页
针对当前制冷型红外探测器所使用的冷指零件材料(TC4)、冷台零件材料(可伐合金)开展真空电子束焊接技术研究。TC4合金和可伐合金在熔化焊接时,焊缝组织内会出现Fe—Ti金属间化合物,该类型的金属间化合物属于脆性材料。在焊接完成后温度... 针对当前制冷型红外探测器所使用的冷指零件材料(TC4)、冷台零件材料(可伐合金)开展真空电子束焊接技术研究。TC4合金和可伐合金在熔化焊接时,焊缝组织内会出现Fe—Ti金属间化合物,该类型的金属间化合物属于脆性材料。在焊接完成后温度降低的过程中,会因TC4和可伐合金的热膨胀系数差异导致焊缝开裂。本文通过在焊缝区域添加过渡金属,将Fe、Ti元素进行物理隔离,实现了TC4/可伐合金之间的熔化焊接。 展开更多
关键词 TC4 可伐合金 电子束焊接 过渡金属
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Al_2O_3/Ni-Ti/Kovar钎焊接头热循环试验 被引量:2
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作者 乔冠军 张春光 金志浩 《过程工程学报》 CAS CSCD 北大核心 2002年第1期71-74,共4页
对采用活性钎焊的Al2O3/Ni-Ti/Kovar(可伐)接头进行了考察,实验结果显示,接头经热循环后强度异常增加. 对此结果从材料的热膨胀特性、焊料微观结构、循环温度等方面进行了详细分析. 结果表明,本实验条件下热循环能显著降低焊接残余应力... 对采用活性钎焊的Al2O3/Ni-Ti/Kovar(可伐)接头进行了考察,实验结果显示,接头经热循环后强度异常增加. 对此结果从材料的热膨胀特性、焊料微观结构、循环温度等方面进行了详细分析. 结果表明,本实验条件下热循环能显著降低焊接残余应力,导致接头强度提高. 展开更多
关键词 活性钎焊 热循环 氧化铝陶瓷 可伐合金 焊接接头
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Direct microwelding of dissimilar glass and Kovar alloy without optical contact using femtosecond laser pulses 被引量:1
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作者 JI Chang-hao HUANG Yu-jia +3 位作者 CHEN Xu JIANG Ji-yan GUO Zhi-jun LONG Yu 《Journal of Central South University》 SCIE EI CAS CSCD 2022年第10期3422-3435,共14页
In the current microwelding process using femtosecond(fs) laser between dissimilar materials,surface polishing and pressure assistance,so-called optical contact,are believed necessary.In this paper,direct welding of s... In the current microwelding process using femtosecond(fs) laser between dissimilar materials,surface polishing and pressure assistance,so-called optical contact,are believed necessary.In this paper,direct welding of soda lime glass and Kovar alloy using a fs laser is investigated to overcome the limit of optical contact.The processing of fs laser welding is comprehensively studied by varying the laser power,welding velocity and the number of welding.The shear joining strength is as high as 2 MPa.The cross-section of glass-Kovar alloy joints,the elemental diffusion and the fracture behavior of welded joints were studied.The results show that the fs laser irradiates the surface of Kovar alloy,micron/nanometer-sized metal particles are generated.These particles perform the role as an adhesive part in the welding process.It is believed that the Si atoms diffuses to Kovar alloy from the glass and partially replaces the Fe^(2+) ions on the surface of Kovar alloy,indicating that the mixing and interdiffusion of materials have occurred during the welding process.Finally,the welded sample was tested and has excellent water resistance and sealing property.Furthermore,to justify that this method can be applied to other stack ups,the glass-copper,the glass-Al6063 and sapphire-ceramic are also welded together.This work greatly simplifies the fs laser microwelding process and promotes its industrial applications,such as optoelectronic devices,medical devices and MEMS. 展开更多
关键词 femtosecond laser microwelding GLASS kovar alloy optical contact
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Effects of oxidation pretreatment temperature on Kovar used as CO_2 reforming catalyst 被引量:1
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作者 Sharon Rose de la Rama Hiroshi Yamada Tomohiko Tagawa 《燃料化学学报》 EI CAS CSCD 北大核心 2014年第5期573-581,共9页
The effect of oxidation pretreatment temperature(500 ~ 1 000 ℃) on the catalytic activity of Kovar applied on hydrocarbon CO2reforming was examined. Catalytic performance evaluation using tetradecane at 800 ℃ with ... The effect of oxidation pretreatment temperature(500 ~ 1 000 ℃) on the catalytic activity of Kovar applied on hydrocarbon CO2reforming was examined. Catalytic performance evaluation using tetradecane at 800 ℃ with 70 μmol/s CO2revealed 700 and 1 000 ℃ as the best pre-oxidation temperature in producing CO and H2,respectively. XRD and SEM-EDX analyses showed that a separate metal oxide layer composed of iron oxide(Fe2O3and F3O4),nickel,cobalt,and possibly their respective oxides started to form when oxidation was conducted at 700 ℃ or higher.The presence of iron enhanced the stability of nickel in the structure while the compact structure of Fe3O4resulted into the formation of a thick and rigid metal oxide layer on the surface of the Kovar tube. The strong physical bond between the metal oxide layer and Kovar tube provided the catalyst good mechanical strength and consequently good catalytic activity. 展开更多
关键词 燃烧化学 化学原理 理论 研究
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金属可伐帽制釉质量研判(上) 被引量:1
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作者 胡平瑞 《中国照明电器》 2010年第1期24-26,共3页
本文从金属可伐帽制釉质量、工艺方面进行阐述,确定了部件检验标准,给出了操作注意事项。
关键词 可伐 质量 工艺 检验
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Al_2O_3/Kovar钎焊接头裂纹冶金因素分析 被引量:1
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作者 杨沛 于治水 +2 位作者 祁凯 余春 李瑞峰 《华东船舶工业学院学报》 北大核心 2005年第1期86-89,共4页
为了研究Al2O3陶瓷/Kovar钎焊时出现的裂纹问题,本试验采用Ti-Cu-Ni活性钎料钎焊Al2O3陶瓷/Kovar(可伐合金),通过扫描电镜观察钎焊接头的微观组织并对所含成分进行分析,得出裂纹处的成分组成。分析结果表明:Al2O3/Ti-Cu-Ni/Kovar钎焊接... 为了研究Al2O3陶瓷/Kovar钎焊时出现的裂纹问题,本试验采用Ti-Cu-Ni活性钎料钎焊Al2O3陶瓷/Kovar(可伐合金),通过扫描电镜观察钎焊接头的微观组织并对所含成分进行分析,得出裂纹处的成分组成。分析结果表明:Al2O3/Ti-Cu-Ni/Kovar钎焊接头产生裂纹的主要原因是Kovar中的Fe元素与钎料中的Ti元素相互反应,在界面形成了FexTiy金属间化合物,导致接头产生裂纹,并提出了减少裂纹的2种方法。 展开更多
关键词 AL2O3陶瓷 可伐合金 Ti—Cu—Ni活性钎料
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