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A high performance InAIN/GaN HEMT with low Ron and gate leakage
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作者 马春雷 顾国栋 吕元杰 《Journal of Semiconductors》 EI CAS CSCD 2016年第2期94-96,共3页
InA1N/GaN high-electron mobility transistors (HEMTs) with a gate length of 100 nm and oxygen plasma treatment were fabricated. A Si/Ti/A1/Ni/Au ohmic contact was also used to reduce the contact resistance. DC and RF... InA1N/GaN high-electron mobility transistors (HEMTs) with a gate length of 100 nm and oxygen plasma treatment were fabricated. A Si/Ti/A1/Ni/Au ohmic contact was also used to reduce the contact resistance. DC and RF characteristics of the devices were measured. The fabricated devices show a maximum drain current density of 2.18 A/mm at VGs = 2 V, a low on-resistance (Ron) of 1.49 x2.mm and low gate leakage current. An excellent frequency response was also obtained. The current cut-off frequency (fT) is 81 GHz and the maximum oscillation frequency is 138 GHz, respectively. 展开更多
关键词 ina1n high-electron-mobility transistor (HEMT) drain current density on resistance gate leakagecurrent oxygen plasma treatment
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An extrinsic f_(max)>100 GHz InAlN/GaN HEMT with AlGaN back barrier
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作者 刘波 冯志红 +6 位作者 敦少博 张雄文 顾国栋 王元刚 徐鹏 何泽召 蔡树军 《Journal of Semiconductors》 EI CAS CSCD 2013年第4期46-49,共4页
We report the DC and RF performance of InAlN/GaN high-electron mobility transistors with AlGaN back barrier grown on SiC substrates. These presented results confirm the high performance that is reachable by InAlN-base... We report the DC and RF performance of InAlN/GaN high-electron mobility transistors with AlGaN back barrier grown on SiC substrates. These presented results confirm the high performance that is reachable by InAlN-based technology. The InAlN/GaN HEMT sample showed a high 2DEG mobility of 1550 cmE/(V-s) at a 2DEG density of 1.7 × 1013 cm-2. DC and RF measurements were performed on the unpassivated device with 0.2 μm "T" gate. The maximum drain current density at Vcs = 2 V is close to 1.05 A/mm in a reproducible way. The reduction in gate leakage current helps to increase the frequency performance of AlGaN back barrier devices. The power gain cut-off frequency of a transistor with an A1GaN back barrier is 105 GHz, which is much higher than that of the device without an A1GaN back barrier at the same gate length. These results indicate InAlN/GaN HEMT is a promising candidate for millimeter-wave application. 展开更多
关键词 AlGan back barrier ina1n high-electron-mobility transistors power gain cutoff frequency
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Anomalous temperature-dependent photoluminescence peak energy in InAlN alloys
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作者 李维 金鹏 +6 位作者 王维颖 毛德丰 刘贵鹏 王占国 王嘉铭 许福军 沈波 《Journal of Semiconductors》 EI CAS CSCD 2014年第9期16-20,共5页
InA1N has been studied by means of temperature-dependent time-integrated photoluminescence and time-resolved photoluminescence. The variation of PL peak energy did not follow the behavior predicted by Varshni formula,... InA1N has been studied by means of temperature-dependent time-integrated photoluminescence and time-resolved photoluminescence. The variation of PL peak energy did not follow the behavior predicted by Varshni formula, and a faster redshift with increasing temperature was observed. We used a model that took account of the thermal activation and thermal transfer of localized excitons to describe and explain the observed behavior. A good fitting to the experiment result is obtained. We believe the anomalous temperature dependence of PL peak energy shift can be attributed to the temperature-dependent redistribution of localized excitons induced by thermal activation and thermal transfer in the strongly localized states. V-shaped defects are thought to be a major factor causing the strong localized states in our ln0.153Al0.847N sample. 展开更多
关键词 ina1n PHOTOLUMInESCEnCE thermal activation V-defects
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基于再生长欧姆接触工艺的220 GHz InAlN/GaN场效应晶体管(英文) 被引量:1
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作者 尹甲运 吕元杰 +5 位作者 宋旭波 谭鑫 张志荣 房玉龙 冯志红 蔡树军 《红外与毫米波学报》 SCIE EI CAS CSCD 北大核心 2017年第1期6-9,34,共5页
在蓝宝石衬底上研制了具有高电流增益截止频率(f_T)的InAlN/GaN异质结场效应晶体管(HFETs).基于MOCVD外延n+-GaN欧姆接触工艺实现了器件尺寸的缩小,有效源漏间距(Lsd)缩小至600 nm.此外,采用自对准工艺制备了50 nm直栅.由于器件尺寸的缩... 在蓝宝石衬底上研制了具有高电流增益截止频率(f_T)的InAlN/GaN异质结场效应晶体管(HFETs).基于MOCVD外延n+-GaN欧姆接触工艺实现了器件尺寸的缩小,有效源漏间距(Lsd)缩小至600 nm.此外,采用自对准工艺制备了50 nm直栅.由于器件尺寸的缩小,Vgs=1 V下器件最大饱和电流(I_(ds))达到2.11 A/mm,峰值跨导达到609 mS/mm.根据小信号测试结果,外推得到器件的fT和最大振荡频率(fmax)分别为220 GHz和48 GHz.据我们所知,该f_T值是目前国内InAlN/GaN HFETs器件报道的最高结果. 展开更多
关键词 ina1n/Gan HFET FT 再生长n+-Gan欧姆接触
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70-nm-gated InAlN/GaN HEMTs grown on SiC substrate with f_T/f_(max)>160GHz 被引量:1
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作者 韩婷婷 敦少博 +5 位作者 吕元杰 顾国栋 宋旭波 王元刚 徐鹏 冯志红 《Journal of Semiconductors》 EI CAS CSCD 2016年第2期86-89,共4页
lnA1N/GaN high-electron-mobility transistors (HEMTs) on SiC substrate were fabricated and character- ized. Several techniques, consisting of high electron density, 70 nm T-shaped gate, low ohmic contacts and a short... lnA1N/GaN high-electron-mobility transistors (HEMTs) on SiC substrate were fabricated and character- ized. Several techniques, consisting of high electron density, 70 nm T-shaped gate, low ohmic contacts and a short drain-source distance, are integrated to gain high device performance. The fabricated InA1N/GaN HEMTs exhibit a maximum drain saturation current density of 1.65 A/ram at Vgs = 1 V and a maximum peak transconductance of 382 mS/rnm. In addition, a unity current gain cut-off frequency (fT) of 162 GHz and a maximum oscillation frequency (fmax) of 176 GHz are achieved on the devices with the 70 nm gate length. 展开更多
关键词 ina1n/Gan high-electron-mobility transistors (HEMTs) T-shaped gate current gain cut-off fre-quency (fT) maximum oscillation frequency (fmax)
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InAlN材料表面态性质研究 被引量:2
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作者 杨彦楠 王新强 +3 位作者 卢励吾 黄呈橙 许福军 沈波 《物理学报》 SCIE EI CAS CSCD 北大核心 2013年第17期439-445,共7页
运用电流-电压(I-V),变频电容-电压(C-V)和原子力显微镜(AFM)技术研究In组分分别为15%,17%和21%的Ni/Au/-InAlN肖特基二极管InAlN样品表面态性质(表面态密度、时间常数和相对于InAlN导带底的能级位置).I-V和变频C-V方法测量得到的实验... 运用电流-电压(I-V),变频电容-电压(C-V)和原子力显微镜(AFM)技术研究In组分分别为15%,17%和21%的Ni/Au/-InAlN肖特基二极管InAlN样品表面态性质(表面态密度、时间常数和相对于InAlN导带底的能级位置).I-V和变频C-V方法测量得到的实验结果表明,随着In组分增加,肖特基势垒高度逐渐降低,表面态密度依次增加.变频C-V特性还表明,随着测试频率降低,C-V曲线有序地朝正电压方向移动,该趋势随着In组分的增加而变得更加明显,这可能归结于InAlN表面态的空穴发射.AFM表面形貌研究揭示InAlN表面粗糙度增加可能是表面态密度增加的主要原因. 展开更多
关键词 不同In组分的inaln材料 表面态 电流 电压特性 变频电容 电压特性
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A 4.69-W/mm output power density InAlN/GaN HEMT grown on sapphire substrate
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作者 刘波 冯志红 +7 位作者 张森 敦少博 尹甲运 李佳 王晶晶 张效帏 房玉龙 蔡树军 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2011年第12期68-71,共4页
We report high performance InA1N/GaN HEMTs grown on sapphire substrates. The lattice-matched InA1N/GaN HEMT sample showed a high 2DEG mobility of 1210 cmZ/(V.s) under a sheet density of 2.6 × 10^13 cm^-2. Large... We report high performance InA1N/GaN HEMTs grown on sapphire substrates. The lattice-matched InA1N/GaN HEMT sample showed a high 2DEG mobility of 1210 cmZ/(V.s) under a sheet density of 2.6 × 10^13 cm^-2. Large signal load-pull measurements for a (2 × 100 μm) x 0.25 μm device have been conducted with a drain voltage of 24 V at 10 GHz. The presented results confirm the high performances reachable by InAIN- based technology with an output power density of 4.69 W/ram, a linear gain of 11.8 dB and a peak power-added efficiency of 48%. This is the first report of high performance InA1N/GaN HEMTs in China's Mainland. 展开更多
关键词 ina1n/Gan HEMT output power density metal-organic chemical vapor deposition
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DC and RF characteristics of enhancement-mode InAlN/GaN HEMT with fluorine treatment
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作者 宋旭波 顾国栋 +5 位作者 敦少博 吕元杰 韩婷婷 王元刚 徐鹏 冯志红 《Journal of Semiconductors》 EI CAS CSCD 2014年第4期52-55,共4页
We report an enhancement-mode InA1N/GaN HEMT using a fluorine plasma treatment. The threshold voltage was measured to be +0.86 V by linear extrapolation from the transfer characteristics. The transconductance is 0 mS... We report an enhancement-mode InA1N/GaN HEMT using a fluorine plasma treatment. The threshold voltage was measured to be +0.86 V by linear extrapolation from the transfer characteristics. The transconductance is 0 mS/mm at Vc, s = 0 V and VDS = 5 V, which shows a truly normal-offstate. The gate leakage current density of the enhancement-mode device shows two orders of magnitude lower than that of the depletion-mode device. The transfer characteristics of the E-mode InA1N/GaN HEMT at room temperature and high temperature are reported. The current gain cut-off frequency (fT) and the maximum oscillation frequency (fmax) of the enhancement-mode device with a gate length of 0.3 #m were 29.4 GHz and 37.6 GHz respectively, which is comparable with the depletion-mode device. A classical 16 elements small-signal model was deduced to describe the parasitic and the intrinsic parameters of the device. 展开更多
关键词 EnHAnCEMEnT-MODE ina1n/Gan HEMT threshold voltage fluorine treatment small-signal model
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InAlN/AlN/GaN HEMT电学特性仿真与分析 被引量:1
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作者 杨娟 张小玲 吕长志 《微电子学》 CAS CSCD 北大核心 2012年第3期411-414,共4页
研究了一种新型GaN基HEMT结构,即InAlN/AlN/GaN异质结层结构,并对其直流特性以及频率特性进行了仿真。通过理论分析,结合TCAD软件,与常规AlGaN/AlN/GaNHEMT进行对比。对栅长为1μm的器件进行仿真,结果表明,器件的最大跨导为450mS/mm,最... 研究了一种新型GaN基HEMT结构,即InAlN/AlN/GaN异质结层结构,并对其直流特性以及频率特性进行了仿真。通过理论分析,结合TCAD软件,与常规AlGaN/AlN/GaNHEMT进行对比。对栅长为1μm的器件进行仿真,结果表明,器件的最大跨导为450mS/mm,最大电流密度为2A/mm,电流增益截止频率fT=15GHz,最高振荡频率fmax=35GHz。 展开更多
关键词 inaln/Aln/Gan HEMT TCAD
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