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Crystalline Size Effects on Texture Coefficient,Electrical and Optical Properties of Sputter-deposited Ga-doped ZnO Thin Films 被引量:5
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作者 Yaqin Wang Wu Tang Lan Zhang 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2015年第2期175-181,共7页
C-axis oriented Ga-doped ZnO(GZO) films with various thicknesses were deposited on glass substrate by radio frequency(RF) magnetron sputtering. The dependence of crystal structure,electrical,and optical properties of ... C-axis oriented Ga-doped ZnO(GZO) films with various thicknesses were deposited on glass substrate by radio frequency(RF) magnetron sputtering. The dependence of crystal structure,electrical,and optical properties of the GZO films on crystalline size were systematically studied. The results showed that the texture coefficient of (002) peak (TC(002)) decreases with increasing crystalline size. The Hall mobility m was reciprocal to electron effective mass and the fitted relaxation time s was 0.11±0.01 ms. With the increase of average crystalline size,the resistivity increased slightly,which is caused by the competition of (002) and(101) plane,introducing in some defects and leading to carrier density reduction. The optical band gap was in the range from 3.454 to 3.319 eV with increasing crystalline size from 26.96 to 30.88 nm,showing a negative relationship. The dependence of optical band gap (Eopg) on the crystalline size(R) can be qualitatively explained by a quantum confinement effect. The relationship between Eopg and R of GZO films suggests that tuning up optical properties for desired applications can be achieved by controlling the crystalline size. 展开更多
关键词 ga-doped zno film Crystalline size Texture coeffic
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A Ga-doped ZnO transparent conduct layer for GaN-based LEDs
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作者 刘祯 王晓峰 +2 位作者 杨华 段垚 曾一平 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2010年第9期17-20,共4页
An 8μm thick Ga-doped ZnO(GZO) film grown by metal-source vapor phase epitaxy was deposited on a GaN-based light-emitting diode(LED) to substitute for the conventional ITO as a transparent conduct layer(TCL). E... An 8μm thick Ga-doped ZnO(GZO) film grown by metal-source vapor phase epitaxy was deposited on a GaN-based light-emitting diode(LED) to substitute for the conventional ITO as a transparent conduct layer(TCL). Electroluminescence spectra exhibited that the intensity value of LED emission with a GZO TCL is markedly improved by 23.6%as compared to an LED with an ITO TCL at 20 mA.In addition,the forward voltage of the LED with a GZO TCL at 20 mA is higher than that of the conventional LED.To investigate the reason for the increase of the forward voltage,X-ray photoelectron spectroscopy was performed to analyze the interface properties of the GZO/p-GaN heterojunction.The large valence band offset(2.24±0.21 eV) resulting from the formation of Ga_2O_3 in the GZO/p-GaN interface was attributed to the increase of the forward voltage. 展开更多
关键词 ga-doped zno film light-emitting diode electroluminescence spectra X-ray photoelectron spectroscopy
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磁控反应溅射直接生长绒面H化Ga掺杂ZnO-TCO薄膜及其特性研究 被引量:2
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作者 王斐 陈新亮 +6 位作者 耿新华 黄茜 张德坤 孙建 魏长春 张晓丹 赵颖 《光电子.激光》 EI CAS CSCD 北大核心 2012年第4期724-729,共6页
采用直流磁控溅射技术,在玻璃衬底上直接生长出了具有绒面结构的H化Ga掺杂ZnO(HGZO)薄膜。研究了H2流量对薄膜结构、表面形貌及光电特性的影响。实验表明,在溅射过程中引入H2明显改善HGZO薄膜电学性能,并且能够直接获得具有绒面结构的... 采用直流磁控溅射技术,在玻璃衬底上直接生长出了具有绒面结构的H化Ga掺杂ZnO(HGZO)薄膜。研究了H2流量对薄膜结构、表面形貌及光电特性的影响。实验表明,在溅射过程中引入H2明显改善HGZO薄膜电学性能,并且能够直接获得具有绒面结构的薄膜。在H2流量为2.0sccm时,所制备的HGZO薄膜具有特征尺寸约200nm的类金字塔状表面形貌,同时薄膜方阻为4.8Ω,电阻率达到8.77×10-4Ω.cm。H2的引入可以明显改善薄膜短波区域的光学透过,生长获得的HGZO薄膜可见光区域平均透过率优于85%,近红外区域波长到1 100nm时仍可达80%。为了进一步提高薄膜光散射能力和光学透过率,根据不同H2流量下HGZO薄膜性能的优点,提出了梯度H2技术生长HGZO薄膜;采用梯度H2工艺生长获得的HGZO薄膜长波区域透过率有了一定的提高,薄膜具有弹坑状表面形貌,并且其光散射能力有了明显提高。 展开更多
关键词 H化ga掺杂zno(HGZO)薄膜 磁控溅射 绒面结构 梯度H2技术 薄膜太阳能电池
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GaZnO透明导电层提高绿光LED发光效率
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作者 张李骊 刘战辉 +3 位作者 钟霞 修向前 张荣 谢自力 《半导体技术》 CAS CSCD 北大核心 2016年第1期51-56,62,共7页
详细研究了分别利用Ga Zn O薄膜和纳米级Ni/Au薄膜作为透明导电层(TCL)的绿光LED芯片的光电性能。利用扫描电子显微镜和透射光谱对Ga Zn O TCL和传统的纳米级Ni/Au TCL进行结构表征,结果表明,Ga Zn O透明导电层表面呈现为高密度、纳米... 详细研究了分别利用Ga Zn O薄膜和纳米级Ni/Au薄膜作为透明导电层(TCL)的绿光LED芯片的光电性能。利用扫描电子显微镜和透射光谱对Ga Zn O TCL和传统的纳米级Ni/Au TCL进行结构表征,结果表明,Ga Zn O透明导电层表面呈现为高密度、纳米尺度的突起,而纳米级Ni/Au TCL样品表面则较为平整;研究波长范围内,Ga Zn O薄膜具有较高的透射率(大于90%)。对两种LED芯片的光电特性进行测试,结果表明,Ga Zn O作为透明导电层的LED芯片发光均匀,具有较小的正向开启电压、等效串联电阻,发光峰中心波长变化仅有5.6 nm,而发光效率相对于传统的Ni/Au TCL LED提高40%,光电工作特性优异。 展开更多
关键词 绿光发光二极管(LED) 镓掺杂氧化锌(gazno)薄膜 发光效率 透明导电层(TCL) 多量子阱(MQW)
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Structural, Optical and Electrical Properties of Ga Doped ZnO/Cu grid/Ga Doped ZnO Transparent Electrodes 被引量:1
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作者 Cholho Jang Qingjun Jiang +1 位作者 Jianguo Lu Zhizhen Ye 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2015年第11期1108-1110,共3页
Ga doped ZnO (OZO)/Cu grid/GZO transparent conductive electrode (TCE) structures were fabricated at room temperature (RT) by using electron beam evaporation (EBE) for the Cu grids and RF magnetron sputtering f... Ga doped ZnO (OZO)/Cu grid/GZO transparent conductive electrode (TCE) structures were fabricated at room temperature (RT) by using electron beam evaporation (EBE) for the Cu grids and RF magnetron sputtering for the GZO layers. In this work, we investigated the electrical and optical characteristics of GZO/Cu grid/GZO multilayer electrode for thin film solar cells by using evaporated Cu grid and sputtered GZO thin films to enhance the optical transparency without significantly affecting their conductivity. The optical transmittance and sheet resistance of GZO/Cu grid/GZO multilayer are higher than those of GZO/Cu film/GZO multilayer independent of Cu grid separation distance and increase with increasing Cu grid separation distances. The calculation of both transmittance and sheet resistance of GZO/Cu grid] GZO multilayer was based on Cu filling factor correlated with the geometry of Cu grid. The calculated values for the transmittance and sheet resistance of the GZO/Cu grid/GZO multilayer were similar to the experimentally observed ones. The highest figure of merit ФTc is 5.18× 10^-3Ω^-1 for the GZO/Cu grid] GZO multilayer with Cu grid separation distance of 1 mm was obtained, in this case, the transmittance and resistivity were 82.72% and 2.17 × 10 ^-4Ωcm, respectively. The transmittance and resistivity are accentahle for nractical thin film snlar cell annlicatinn~ 展开更多
关键词 Transparent electrode Electron beam evaporation Cu grid ga doped zno Multilayer film
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