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Preparation of DyPt_2 Films by Using Magneto Controlled Sputtering and Phase Transformation of Dy/Pt Alloy Films
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作者 成钢 顾正飞 +2 位作者 汪元亮 赵家成 周怀营 《Journal of Rare Earths》 SCIE EI CAS CSCD 2007年第S2期87-89,共3页
DyPt2 films were prepared by alternate deposition thin Dy and Pt layers on glass substrates by DC magneto controlled sputtering method. The XRD data indicated that for as-deposited Dy/Pt films, and the periodic layere... DyPt2 films were prepared by alternate deposition thin Dy and Pt layers on glass substrates by DC magneto controlled sputtering method. The XRD data indicated that for as-deposited Dy/Pt films, and the periodic layered structures along thickness direction were evidenced with low angle X-ray scattering. With increasing annealing temperature, the compounds of DyPt, DyPt2 and DyPt3 were formed successively at temperature ranging from 300 to 400 ℃. It was found that the composition reaction DyPt+DyPt3→2DyPt2 took place at 500 ℃. After annealing at 500 ℃ for 1 h, the compounds DyPt and DyPt3 transformed completely into the DyPt2 compound. 展开更多
关键词 dy/pt thin film microstructure heat treatment X-ray techniques rare earths
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