针对双聚焦系统中的电分析器,利用CST Studio Suite进行了结构设计与电磁场仿真。主要工作包括理论计算、柱面结构电分析器设计、弥散电场优化与屏蔽、电-磁分析系统电磁场及粒子运动轨迹模拟。研究结果表明:接地极与绝缘垫片的安装能...针对双聚焦系统中的电分析器,利用CST Studio Suite进行了结构设计与电磁场仿真。主要工作包括理论计算、柱面结构电分析器设计、弥散电场优化与屏蔽、电-磁分析系统电磁场及粒子运动轨迹模拟。研究结果表明:接地极与绝缘垫片的安装能有效降低弥散场对粒子运动状态影响;束流聚焦点与理论计算相对偏差小于1%;在紧凑、易安装结构下,在电、磁分析系统束流引出口分别实现能量聚焦及速度聚焦,且放大系数小于1。展开更多
The special design of magnetic analyzer for a 400 keV ion implanter is described. An asymmetric double-focusing condition is used in the design. The transverse object point is real and the vertical object is virtual. ...The special design of magnetic analyzer for a 400 keV ion implanter is described. An asymmetric double-focusing condition is used in the design. The transverse object point is real and the vertical object is virtual. The electrostatic doublet is taken to realize the beam optics matching between the ion source, initial focusing system and magnetic analyzer. By this design the magnetic analyzer has been cut in size, and the mass resolution enhanced. The desired mass resolution equals 200, such that six mercury isotopes can be separated. The measured results for the mass resolution is in good agreement with the calculated values. This manifests the successful theoretical calculation.展开更多
文摘针对双聚焦系统中的电分析器,利用CST Studio Suite进行了结构设计与电磁场仿真。主要工作包括理论计算、柱面结构电分析器设计、弥散电场优化与屏蔽、电-磁分析系统电磁场及粒子运动轨迹模拟。研究结果表明:接地极与绝缘垫片的安装能有效降低弥散场对粒子运动状态影响;束流聚焦点与理论计算相对偏差小于1%;在紧凑、易安装结构下,在电、磁分析系统束流引出口分别实现能量聚焦及速度聚焦,且放大系数小于1。
文摘The special design of magnetic analyzer for a 400 keV ion implanter is described. An asymmetric double-focusing condition is used in the design. The transverse object point is real and the vertical object is virtual. The electrostatic doublet is taken to realize the beam optics matching between the ion source, initial focusing system and magnetic analyzer. By this design the magnetic analyzer has been cut in size, and the mass resolution enhanced. The desired mass resolution equals 200, such that six mercury isotopes can be separated. The measured results for the mass resolution is in good agreement with the calculated values. This manifests the successful theoretical calculation.
