A new laser direct writing system is introduced and the potential application of the diffractive optical elements (DOE’s) fabricated by applying laser direct writing system are presented. The fabrication techniques b...A new laser direct writing system is introduced and the potential application of the diffractive optical elements (DOE’s) fabricated by applying laser direct writing system are presented. The fabrication techniques by applying the laser direct writing are developed. Experimental results have been obtained by applying laser direct writing machine with line width of 5μm and 10μm.展开更多
文摘A new laser direct writing system is introduced and the potential application of the diffractive optical elements (DOE’s) fabricated by applying laser direct writing system are presented. The fabrication techniques by applying the laser direct writing are developed. Experimental results have been obtained by applying laser direct writing machine with line width of 5μm and 10μm.
