φ200 mm silicon single crystals were grown in the φ450 mm hot zone of a Czochralski （CZ） furnace. By modifying the pattern and the velocity of the argon flow, the silicon single crystals with different oxygen conc...φ200 mm silicon single crystals were grown in the φ450 mm hot zone of a Czochralski （CZ） furnace. By modifying the pattern and the velocity of the argon flow, the silicon single crystals with different oxygen concentrations were obtained. Through numerical simulation, the velocity of the argon gas flow was plotted for the first time. The experiment resuits were analyzed and the optimum condition of the argon flow with the lowest oxygen concentration was obtained.展开更多
The pulling rate in czochralski silicon (CZSi) growth is important for reducing the cost of solar cell. In this paper, double-heater, heat shield and composite argon duct system were introduced in the Ф450 mm hot zon...The pulling rate in czochralski silicon (CZSi) growth is important for reducing the cost of solar cell. In this paper, double-heater, heat shield and composite argon duct system were introduced in the Ф450 mm hot zone of a Czochralski furnace. The pulling rate under different thermal system was recorded in experiments. Argon flow and temperature fields were simulated by finite element method(FEM). Experimental results and numerical simulation indicate that double-heater and composite argon duct system can enhance obviously the release rate of latent heat. In Φ 200 mm Czochralski silicon (CZSi) growth, average pulling rate can increase from 0.6 mm·min-1 in the conventional hot zone to 0.8 mm·min-1 in the modified hot zone.展开更多
During large diameter Czochralski silicon growth, heat zone and argon flow influence the formation of defects in silicon crystal by changing the distribution of temperature. Different silicon crys tals with various de...During large diameter Czochralski silicon growth, heat zone and argon flow influence the formation of defects in silicon crystal by changing the distribution of temperature. Different silicon crys tals with various density of grown-in defects were grown by replacing the popular heater with the com posite heater and changing the popular argon flow into a controlled flow. The experimental results have been explained well by the numeric simulation of argon flow.展开更多
基金This project is financially supported by the National Natural Science Foundation of China (No. 60576002).
文摘φ200 mm silicon single crystals were grown in the φ450 mm hot zone of a Czochralski （CZ） furnace. By modifying the pattern and the velocity of the argon flow, the silicon single crystals with different oxygen concentrations were obtained. Through numerical simulation, the velocity of the argon gas flow was plotted for the first time. The experiment resuits were analyzed and the optimum condition of the argon flow with the lowest oxygen concentration was obtained.
基金This project was financially supported by the National Natural Science Foundation of China(No.60576002).
文摘The pulling rate in czochralski silicon (CZSi) growth is important for reducing the cost of solar cell. In this paper, double-heater, heat shield and composite argon duct system were introduced in the Ф450 mm hot zone of a Czochralski furnace. The pulling rate under different thermal system was recorded in experiments. Argon flow and temperature fields were simulated by finite element method(FEM). Experimental results and numerical simulation indicate that double-heater and composite argon duct system can enhance obviously the release rate of latent heat. In Φ 200 mm Czochralski silicon (CZSi) growth, average pulling rate can increase from 0.6 mm·min-1 in the conventional hot zone to 0.8 mm·min-1 in the modified hot zone.
基金This work was supported by the National Natural Science Foundation of China (Grant No. 69876006) Hebei Province (Grant No. 002135020).
文摘During large diameter Czochralski silicon growth, heat zone and argon flow influence the formation of defects in silicon crystal by changing the distribution of temperature. Different silicon crys tals with various density of grown-in defects were grown by replacing the popular heater with the com posite heater and changing the popular argon flow into a controlled flow. The experimental results have been explained well by the numeric simulation of argon flow.
