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直拉法单晶制造中的直径检测技术 被引量:15
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作者 田达晰 蒋科坚 《半导体技术》 CAS CSCD 北大核心 2003年第3期25-27,31,共4页
自动直径控制(ADC)是直拉法单晶制造中的重要环节。本文详细介绍了直拉单晶的直径检测技术,分析其性能差异,对目前单晶炉设备的设计制造有参考作用。
关键词 单晶制造 直径检测 直拉法 自动直径控制 Ircon ADC
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La_3Ga_5SiO_(14)单晶的生长、性能及SAW应用 被引量:14
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作者 武安华 徐家跃 《人工晶体学报》 EI CAS CSCD 北大核心 2002年第6期559-564,共6页
本文综述了新型压电晶体La3 Ga5SiO14 的最新研究进展 ,详细讨论了该晶体的生长问题 ,简单介绍了该晶体的性能及其在SAW和BAW方面的应用 ,分析了该晶体在压电应用方面的优势。
关键词 单晶 应用 SAW La3Ga5SiO14 Gzochralski LPE 晶体生长 压电性能 声表面波
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大尺寸TGG晶体生长与性能研究 被引量:11
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作者 龙勇 石自彬 +3 位作者 丁雨憧 王佳 徐扬 付昌禄 《压电与声光》 CAS CSCD 北大核心 2016年第3期433-436,共4页
铽镓石榴石(Tb_3Ga_5O_(12),TGG)晶体具有大的Verdet常数、低的透射损耗、高的热导率及高的激光损伤阈值,是制作高功率全固态激光器中法拉第隔离器的最佳磁光材料。采用自主研发的JGD-800型上称重自动提拉炉,成功生长出φ53mm×80mm... 铽镓石榴石(Tb_3Ga_5O_(12),TGG)晶体具有大的Verdet常数、低的透射损耗、高的热导率及高的激光损伤阈值,是制作高功率全固态激光器中法拉第隔离器的最佳磁光材料。采用自主研发的JGD-800型上称重自动提拉炉,成功生长出φ53mm×80mm,外观完整,无开裂、无螺旋的TGG晶体。加工了用于高功率隔离器、尺寸为φ40mm×30mm的TGG样品,通过可见及近红外分光光度计测试,晶体透过率约为80.6%;测试晶体的室温热导率为4.566 W/(m·K),其热导率随温度升高而下降。热膨胀测试结果表明,在26.5~200℃时,热膨胀系数为-2.682 0×10-6 K^(-1);在200~500℃时,热膨胀系数为15.090 4×10^(-6) K^(-1)。通过正交消光法测试1 064nm波长晶体的Verdet常数为39.9rad/(mT);经ZYGO干涉仪测试晶体的光学均匀性为4.3×10^(-6),透射波前为λ/5(波长λ=632.8nm);采用波长1 064nm,10Hz、9ns激光测试晶体的激光损伤阈值为3.5GW/cm^2。结果表明,本实验方法生长的大尺寸TGG晶体质量较好,在高功率全固态激光器领域中具有广泛的应用前景。 展开更多
关键词 铽镓石榴石(TGG)晶体 提拉法 透过率 光学均匀性 激光损伤阈值 Verdet常数
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Pulling growth technique towards rare earth single crystals 被引量:10
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作者 SUN CongTing XUE DongFeng 《Science China(Technological Sciences)》 SCIE EI CAS CSCD 2018年第9期1295-1300,共6页
Pulling growth technique serves as a popular method to grow congruent melting single crystals with multiscale sizes ranging from micrometers to centimeters.In order to obtain high quality single crystals,the crystal c... Pulling growth technique serves as a popular method to grow congruent melting single crystals with multiscale sizes ranging from micrometers to centimeters.In order to obtain high quality single crystals,the crystal constituents would be arranged at the lattice sites by precisely controlling the crystal growth process.Growing interface is the position where the phase transition of crystal constituents occurs during pulling growth process.The precise control of energy at the growing interface becomes a key technique in pulling growth.In this work,we review some recent advances of pulling technique towards rare earth single crystal growth.In Czochralski pulling growth,the optimized growth parameters were designed for rare earth ions doped Y_3Al_5O_(12)and Ce:(Lu_(1-x)Y_x)_2Si O_5on the basis of anisotropic chemical bonding and isotropic mass transfer calculations at the growing interface.The fast growth of high quality rare earth single crystals is realized by controlling crystallization thermodynamics and kinetics in different size zones.On the other hand,the micro pulling down technique can be used for high throughput screening novel rare earth optical crystals.The growth interface control is realized by improving the crucible bottom and temperature field,which favors the growth of rare earth crystal fibers.The rare earth laser crystal fiber can serve as another kind of laser gain medium between conventional bulk single crystal and glass fiber.The future work on pulling technique might focus on the mass production of rare earth single crystals with extreme size and with the size near that of devices. 展开更多
关键词 pulling growth technique rare earth single crystals czochralski pulling growth micro pulling down growth Y3Al5O12 Ce:(Lu1-xYx)2SiO5 chemical bonding theory of single crystal growth
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Experiment and numerical simulation of melt convection and oxygen distribution in 400-mm Czochralski silicon crystal growth 被引量:6
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作者 Ran Teng Yang Li +3 位作者 Bin Cui Qing Chang Qing-Hua Xiao Guo-Hu Zhang 《Rare Metals》 SCIE EI CAS CSCD 2017年第2期134-141,共8页
Single-crystalline silicon materials with large dimensions have been widely used as assemblies in plasma silicon etching machines.However,information about large-diameter low-cost preparation technology has not been s... Single-crystalline silicon materials with large dimensions have been widely used as assemblies in plasma silicon etching machines.However,information about large-diameter low-cost preparation technology has not been sufficiently reported.In this paper,it was focused on the preparation of 400-mm silicon(100) crystal lightly doped with boron from 28-in.hot zones.Resistivity uniformity and oxygen concentration of the silicon crystal were investigated by direct-current(DC) four-point probes method and Fourier transform infrared spectroscopy(FTIR),respectively.The global heat transfer,melt flow and oxygen distribution were calculated by finite element method(FEM).The results show that 28-in.hot zones can replace conventional 32 in.ones to grow 400-mm-diameter silicon single crystals.The change in crucible diameter can save energy,reduce cost and improve efficiency.The trend of oxygen distribution obtained in calculations is in good agreement with experimental values.The present model can well predict the 400-mm-diameter silicon crystal growth and is essential for the optimization of furnace design and process condition. 展开更多
关键词 Silicon crystal preparation Computer simulation czochralski method Heat transfer Melt flow Oxygen distribution
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Impact of Heat Shield Structure in the Growth Process of Czochralski Silicon Derived from Numerical Simulation 被引量:6
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作者 ZHANG Jing LIU Ding +1 位作者 ZHAO Yue JIAO Shangbin 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2014年第3期504-510,共7页
Further development of the photovoltaic industry is restricted by the productivity of mono-crystalline silicon technology due to its requirements of low cost and high efficient photocells. The heat shield is not only ... Further development of the photovoltaic industry is restricted by the productivity of mono-crystalline silicon technology due to its requirements of low cost and high efficient photocells. The heat shield is not only the important part of the thermal field in Czochralski(Cz) mono-crystalline silicon furnace, but also one of the most important factors influencing the silicon crystal growth. Large-diameter Cz-Si crystal growth process is taken as the study object, Based on FEM numerical simulation, different heat shield structures are analyzed to investigate the heater power, the melt-crystal interface shape, the argon flow field, and the oxygen concentration at the melt-crystal interface in the process of large Cz-Si crystal growth. The impact of these factors on the growth efficiency and crystal quality are analyzed. The results show that the oxygen concentration on the melt-crystal interface and the power consumption of the heater stay high due to the lack of a heat shield in the crystal growth system. Argon circumfluence is generated on the external side of the right angle heat shield. By the right-angle heat shield, the speed of gas flow is lowered on the melt free surface, and the temperature gradient of the free surface is increased around the melt-crystal interface. It is not conducive for the stable growth of crystal. The shape of the melt-crystal interface and the argon circulation above the melt free surface are improved by the inclined heat shield. Compared with the others, the system pulling rate is increased and the lowest oxygen concentration is achieved at the melt-crystal interface with the composite heat shield. By the adoption of the optimized composite heat shield in experiment, the real melt-crystal interface shapes and its deformation laws obtained by Quick Pull Separation Method at different pulling rates agree with the simulation results. The results show that the method of simulation is feasible. The proposed research provides the theoretical foundation for the thermal field design of t 展开更多
关键词 czochralski mono-crystalline silicon heat shield thermal field numerical simulation
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100mm直径低位错密度InSb单晶生长研究 被引量:5
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作者 赵超 彭志强 +3 位作者 柏伟 程波 陈元瑞 贺利军 《红外》 CAS 2018年第3期9-12,17,共5页
InSb是一种重要的中波红外探测器材料。为了满足更大规模、更高质量红外焦平面探测器的发展要求,对100mm直径低位错密度InSb单晶的生长进行了研究。通过改良生长方法、优化籽晶、改进缩颈工艺、优化热场,最终获得位错密度小于等于100cm-... InSb是一种重要的中波红外探测器材料。为了满足更大规模、更高质量红外焦平面探测器的发展要求,对100mm直径低位错密度InSb单晶的生长进行了研究。通过改良生长方法、优化籽晶、改进缩颈工艺、优化热场,最终获得位错密度小于等于100cm-2、直径大于等于100mm的大尺寸低位错密度InSb晶体。晶体沿晶棒从头到尾部的位错密度分布均匀,可用率高,能够满足大规模高质量红外焦平面探测器的使用需求。 展开更多
关键词 INSB 100 MM czochralski 缩颈 籽晶
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TGG晶体偏心生长研究 被引量:7
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作者 龙勇 徐扬 +3 位作者 石自彬 丁雨憧 王佳 付昌禄 《压电与声光》 CSCD 北大核心 2015年第2期277-279,共3页
目前高功率全固态激光器急需使用大尺寸、高质量的铽镓石榴石晶体(Tb3Ga5O12,TGG)。采用提拉法生长(111)方向TGG晶体时,极易发生偏心生长,影响晶体质量与使用效率。针对偏心生长,通过分析TGG晶体组分挥发和熔体特性,解释了其形成机理,... 目前高功率全固态激光器急需使用大尺寸、高质量的铽镓石榴石晶体(Tb3Ga5O12,TGG)。采用提拉法生长(111)方向TGG晶体时,极易发生偏心生长,影响晶体质量与使用效率。针对偏心生长,通过分析TGG晶体组分挥发和熔体特性,解释了其形成机理,并提出了相应的解决方法,最后成功生长出外观完整(44 mm×70mm)的TGG晶体。通过对比圆柱状和螺旋状晶体透过率的不同,进一步解释了偏心生长的原因。 展开更多
关键词 铽镓石榴石(Tb3Ga5O12 TGG)晶体 偏心生长 Ga2O3挥发 热辐射 提拉法
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Numerical analysis of solid–liquid interface shape during largesize single crystalline silicon with Czochralski method 被引量:4
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作者 Ran Teng Qing Chang +3 位作者 Yang Li Bin Cui Qing-Hua Xiao Guo-Hu Zhang 《Rare Metals》 SCIE EI CAS CSCD 2017年第4期289-294,共6页
Numerical analysis is an effective tool to research the industrial Czochralski (CZ) crystal growth aiming to improve crystal quality and reduce manufactur- ing costs. In this study, a set of global simulations were ... Numerical analysis is an effective tool to research the industrial Czochralski (CZ) crystal growth aiming to improve crystal quality and reduce manufactur- ing costs. In this study, a set of global simulations were carried out to investigate the effect of crystal-crucible rotation and pulling rate on melt convection and solid- liquid (SL) interface shape. Through analyses of the sim- ulation data, it is found that the interface deformation and inherent stress increase during the crystal growth process. The interface deflection increases from 7.4 to 51.3 mm with an increase in crystal size from 150 to 400 mm. In addition, the SL interface shape and flow pattern are sen- sitive to pulling rate and rotation rate. Reducing pulling rate can flat SL interface shape and add energy-consuming. Interface with low deflection can be achieved by adopting certain combination of crystal and crucible rotation rates. The effect of crystal rotation on SL interface shape is less significant at higher crucible rotation rates. 展开更多
关键词 czochralski method Numerical analysis Pullrate Crucible rotation Crystal rotation Solid/liquidinterface shape
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Growth and Characterization of High-quality LiAlO2 Single Crystal 被引量:2
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作者 Taohua HUANG Shengming ZHOU +4 位作者 Hao TENG Hui LIN Jun ZOU Jianhua ZHOU Jun WANG 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2008年第2期145-148,共4页
γ-LiAlO2 single crystal is a promising substrate for GaN heteroepitaxy. In this paper, we present the growth of large-sized LiAlO2 crystal by modified Czochralski method. The crystal quality was characterized by high... γ-LiAlO2 single crystal is a promising substrate for GaN heteroepitaxy. In this paper, we present the growth of large-sized LiAlO2 crystal by modified Czochralski method. The crystal quality was characterized by high-resolution X-ray diffraction and chemical etching. The results show that the as-grown crystal has perfect quality with the full width at half maximum (FWHM) of 17.7-22.6 arcsec and etch pits density of (0.3- 2.2)×10^4 cm^-2 throughout the crystal boule. The bottom of the crystal boule shows the best quality. The optical transmission spectra from UV to IR exhibits that the crystal is transparent from 0.2 to 5.5μm and becomes completely absorbing around 6.7μm wavelength, The optical absorption edge in near UV region is about 191 nm. 展开更多
关键词 γ-LiAlO2 crystal czochralski method Chemical etching Transmission spectra
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Numerical study of heat transport and fluid flow during the silicon crystal growth process by the Czochralski method 被引量:3
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作者 金超花 《Journal of Semiconductors》 EI CAS CSCD 2013年第6期38-43,共6页
A global analysis of heat transfer and fluid flow in a real Czochralski single silicon crystal furnace is developed using the FLUENT package.Good agreement was obtained for comparisons of the power and crystal growth ... A global analysis of heat transfer and fluid flow in a real Czochralski single silicon crystal furnace is developed using the FLUENT package.Good agreement was obtained for comparisons of the power and crystal growth speed between the simulation and experimental data,and the effect of the length of the crystal on heat transfer and fluid flow was analyzed.The results showed that T_(max) increases and its location moves downward as the crystal length increases.The flow pattern in the melt does not change until the crystal grows to 900 mm.As the crystal length increases,the flow pattern in the first gas area only changes when the crystal length is less than 700 mm,but the flow pattern in the second area changes throughout the growth process. 展开更多
关键词 czochralski crystal growth SILICON fluid flow numerical study
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直拉单晶硅中的缺陷形成机理及控制方法 被引量:1
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作者 芮阳 王黎光 +3 位作者 熊欢 曹启刚 闫龙 杨少林 《山东化工》 CAS 2023年第17期101-103,106,共4页
半导体级单晶硅作为半导体产业链中的重要原材料,其杂质、缺陷等品质对电子器件和集成电路的性能起着至关重要的作用。单晶硅生长和加工过程都不可避免地会形成各种缺陷。鉴于直拉法是目前主流的单晶硅制造方法,针对直拉法半导体级单晶... 半导体级单晶硅作为半导体产业链中的重要原材料,其杂质、缺陷等品质对电子器件和集成电路的性能起着至关重要的作用。单晶硅生长和加工过程都不可避免地会形成各种缺陷。鉴于直拉法是目前主流的单晶硅制造方法,针对直拉法半导体级单晶硅制造技术中的晶体缺陷工程问题进行了探讨。简要介绍了半导体级单晶硅中各种晶体缺陷以及它们的形成机理。最后,总结了控制缺陷形成的主要方法。 展开更多
关键词 直拉法 半导体级单晶硅 缺陷 形成机理 控制方法
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热场结构对直拉硅单晶生长能耗影响分析 被引量:5
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作者 邓树军 高宇 +3 位作者 姜舰 戴小林 吴志强 刘冰 《半导体技术》 CAS CSCD 北大核心 2010年第12期1183-1185,共3页
结合多年热场使用经验和计算机模拟技术分析了在热场结构中影响能耗的主要因素,并提出了降低能耗的有效措施,其中包括使用热屏、紧凑的热场结构及使用低热导率的保温材料。使用小口径热屏对降低能耗有显著的效果。改进热场结构:减小加... 结合多年热场使用经验和计算机模拟技术分析了在热场结构中影响能耗的主要因素,并提出了降低能耗的有效措施,其中包括使用热屏、紧凑的热场结构及使用低热导率的保温材料。使用小口径热屏对降低能耗有显著的效果。改进热场结构:减小加热器与石墨坩埚的间距或减小加热器与保温层的间距都能有效降低直拉硅单晶生长能耗。分析了温场中其他热量的损失,提出了包括减少热场部件与炉体直连,选用低热导率的保温材料的方法可以有效降低能耗。 展开更多
关键词 模拟 硅单晶 能耗 热场 直拉
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Structure and properties of Li-rich Zn-doped LiNbO_3 Crystal
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作者 甄西合 Wang Rui +1 位作者 Qiang Liangsheng Zhao Liancheng 《High Technology Letters》 EI CAS 2001年第2期95-96,共2页
The Li-rich Zn-doped LiNbO 3 (LN) crystals were grown by the Czochralski method. The structure of the crystals was measured by ultraviolet-visible absorption spectra. The results indicated that the Li-rich Zn-doped LN... The Li-rich Zn-doped LiNbO 3 (LN) crystals were grown by the Czochralski method. The structure of the crystals was measured by ultraviolet-visible absorption spectra. The results indicated that the Li-rich Zn-doped LN crystals had the same characteristics as the pure LN crystal. After Zn 2+ entered into the lattice of Li-rich Zn-doped LN crystal, it replaced Nb Li firstly. When there was no Nb Li , Zn 2+ replaced Li + then. The second harmonic generation (SHG) property of Li-rich Zn-doped LiNbO 3 crystal was measured. The results showed that the SHG conversation efficiency of Li-rich Zn-doped LiNbO 3 crystals was higher than that of Zn-doped LiNbO 3 crystals. 展开更多
关键词 Li-rich Zn-doped LN crystal the czochralski method Crystal structure Second harmonic generation
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Optimal Control of Oxygen Concentration in a Magnetic Czochralski Crystal Growth by Response Surface Methodology 被引量:1
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作者 Huiping YU Yunkan SUI +2 位作者 Jing WANG Fengyi ZHANG Xiaolin DAI 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2006年第2期173-178,共6页
Concepts and techniques of response surface methodology have been widely applied in many branches of engineering, especially in the chemical and manufacturing areas. This paper presents an application of the methodolo... Concepts and techniques of response surface methodology have been widely applied in many branches of engineering, especially in the chemical and manufacturing areas. This paper presents an application of the methodology in a magnetic crystal Czochralski growth system for single crystal silicon to optimize the oxygen concentration at the crystal growth interface in a cusp magnetic field. The simulation demonstrates that the response surface methodology is a feasible algorithm for the optimization of the Czochralski crystal growth process. 展开更多
关键词 czochralski Magnetic field OPTIMIZATION Response surface methodology
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Growth and Spectroscopic Characteristics of Yb^3+:LiGd(WO_4)_2 Crystal 被引量:2
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作者 黄新阳 王国富 《Chinese Journal of Structural Chemistry》 SCIE CAS CSCD 2012年第6期809-820,共12页
The Yb3+:LiGd(WO4)2 crystal with the dimension of Ф15×35 mm3 was grown by Czochralski technique. The spectroscopic characterization and fluorescence dynamics of Yb3+ in yb3+:LiGd(WO4)2 crystal were inve... The Yb3+:LiGd(WO4)2 crystal with the dimension of Ф15×35 mm3 was grown by Czochralski technique. The spectroscopic characterization and fluorescence dynamics of Yb3+ in yb3+:LiGd(WO4)2 crystal were investigated. The yb3+:LiGd(WO4)2 crystal exhibits a broad absorption band centered near 975 nm with the linewidths of 16 and 11 nm and maximal absorption cross-section of 3.60 × 10-20 and 2.90× 10-20 cm2 for π- and σ-polarization, respectively. The emission broadband has an FWHM of 47 and 45 nm with the emission cross sections of 3.92 × 10-20 and 3.34× 10-2o cm2 at 1020 nm for re- and or-polarization, respectively. The measured fluorescence lifetime is 398 gs. The blue light emission around 480 nm through cooperative upconversion from the de-excitation of excited Yb3+-Yb3+ pairs at 4 K was observed under 932-nm excitation and demonstrated. 展开更多
关键词 Yb3+:LiGd(WO4)2 crystal czochralski technique spectroscopic characteristics coopertive upconversion
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High Purity Germanium, a Review on Principle Theories and Technical Production Methodologies 被引量:2
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作者 Danilo C. Curtolo Semiramis Friedrich Bernd Friedrich 《Journal of Crystallization Process and Technology》 2017年第4期65-84,共20页
Since the early 1950’s the use of Germanium has been continuously growing as new applications are being developed. Its first commercial usage as the main material, from which the semiconductors were made, was later r... Since the early 1950’s the use of Germanium has been continuously growing as new applications are being developed. Its first commercial usage as the main material, from which the semiconductors were made, was later replaced by Silicon. The applications were then shifted to a key component in fiber optics, infrared night vision devices and space solar cells, as well as a polymerization catalyst for polyethylene terephthalate (PET). With the advance development in new technologies, the attentions have been brought back to Germanium due to its excellent semiconductor properties. New applications on the field of high efficiency solar cells, SiGe based chips, LED technologies, etc., are being developed and show a great potential. According to DERA (Deutsche Rohstoffagentur/German Mineral Resources Agency), the demand for Ge will grow considerably by 2030, pushed mostly by the increase in the fiber optics market and advanced materials sector [1]. Therefore, this paper focuses on an overview of the production chain of Germanium, especially from its concentrate up to the single crystal growth of its valuable ultra-pure metallic form to be used in high technological applications. 展开更多
关键词 GERMANIUM Fractional CRYSTALLIZATION CRYSTALLIZATION REFINING High PURITY Zone MELTING czochralski
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大直径直拉硅单晶等径的PID参数优化 被引量:4
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作者 姜舰 邓树军 +3 位作者 戴小林 吴志强 朱秦发 刘冰 《稀有金属》 EI CAS CSCD 北大核心 2010年第6期945-949,共5页
随着国内硅材料应用技术不断发展,在大直径单晶的直径生长控制方面除了在设备上采用更加先进的双CCD系统,同时也对单晶生长的直径PID提出了更加严格的要求,因此研究单晶生长的直径PID参数设置有着重要意义。以等径阶段PID参数设置为研... 随着国内硅材料应用技术不断发展,在大直径单晶的直径生长控制方面除了在设备上采用更加先进的双CCD系统,同时也对单晶生长的直径PID提出了更加严格的要求,因此研究单晶生长的直径PID参数设置有着重要意义。以等径阶段PID参数设置为研究对象,采用晶体生长的实验方法研究了不同PID参数控制对晶体生长的影响,分析了不同参数的作用,最终获得了大直径CZ硅等径生长的优化PID控制参数。实验选用TDR-150型单晶炉,Φ700 mm热场系统,一次性投入200 kg多晶硅,拉制目标直径400 mm的大直径硅单晶。从实验中可以分别得到4条晶体生长等径过程中直径波动曲线以及4张等径过程中实际拉速及晶体生长速率波动图。通过对比分析,实验确认了PID 3个参数(P值比例增益,D值微分,I值积分)的合理取值范围及其作用效果:应使P值在系统具备较高灵敏度和稳定控制的平衡点;使D部分在系统频率特性的中频段,以改善系统的动态性能;而使I值在系统频率特性的较低频段,以提高系统的稳态性能,同时又能够作用于长期控制。 展开更多
关键词 大直径 直拉 单晶直径 PID参数
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大尺寸掺钕和掺铥铝酸钇晶体的生长和退火技术 被引量:3
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作者 莫小刚 王永国 +4 位作者 朱建慧 徐学珍 何占斌 桂尤喜 王克强 《人工晶体学报》 EI CAS CSCD 北大核心 2007年第3期520-525,共6页
通过分析铝酸钇(YAP)晶体产生孪晶、开裂、色心和弥散性散射的原因,探讨了克服这些缺陷和问题的技术途径。采用提拉法生长了b轴方向的掺钕和掺铥铝酸钇(Nd:YAP和Tm:YAP)晶体,通过温场系统、生长工艺参数和切割工艺的优化,克服了晶体开... 通过分析铝酸钇(YAP)晶体产生孪晶、开裂、色心和弥散性散射的原因,探讨了克服这些缺陷和问题的技术途径。采用提拉法生长了b轴方向的掺钕和掺铥铝酸钇(Nd:YAP和Tm:YAP)晶体,通过温场系统、生长工艺参数和切割工艺的优化,克服了晶体开裂的问题,晶体直径达到46mm;通过真空退火工艺,既显著减轻了紫外和可见区的色心吸收,又减小了晶体的应力,有助于克服晶体在加工过程中的开裂问题。晶体生长实验和晶体的显微观察表明:YAP晶体中的弥散状散射很可能同熔体中组分的均匀性有关,通过增大晶体的直径,增强强迫对流有助于减轻晶体中的弥散状散射。高质量b轴Nd:YAP和a轴Tm:YAP晶体已分别实现二极管泵浦大于140W的1.079μm和大于10W的1.99μm激光输出。 展开更多
关键词 ND:YAP TM:YAP 提拉法 晶体生长 退火
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大直径单晶硅垂直磁场下的数值模拟 被引量:2
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作者 宇慧平 隋允康 安国平 《北京工业大学学报》 CAS CSCD 北大核心 2006年第S1期68-73,共6页
为了研究磁场对晶体生长界面的形状、温度、氧的质量分数分布等的影响,本文采用低雷诺数的κ-ε湍流模型,对直径为200 mm、哈特曼数分别为0、500、1000和2000的大直径单晶硅进行了数值模拟.结果表明,垂直磁场能抑制熔体中的径向对流,... 为了研究磁场对晶体生长界面的形状、温度、氧的质量分数分布等的影响,本文采用低雷诺数的κ-ε湍流模型,对直径为200 mm、哈特曼数分别为0、500、1000和2000的大直径单晶硅进行了数值模拟.结果表明,垂直磁场能抑制熔体中的径向对流,并在一定程度上使子午面的流动减弱,氧的轴向减小,等温线变得更为平坦.当磁场强度过高时,熔体中氧的轴向增加,湍流程度也增加. 展开更多
关键词 直拉法 磁场 数值模拟
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