In the past decades,Moore’s law drives the semiconductor industry to continuously shrink the critical size of transistors down to 7 nm.As transistors further downscaling to smaller sizes,the law reaches its limitatio...In the past decades,Moore’s law drives the semiconductor industry to continuously shrink the critical size of transistors down to 7 nm.As transistors further downscaling to smaller sizes,the law reaches its limitation,and the increase of transistors density on the chip decelerates.Up to now,extreme ultraviolet lithography has been used in some key steps,and it is facing alignment precision and high costs for high-volume manufacturing.Meanwhile,the introduction of new materials and 3D complex structures brings serious challenges for top-down methods.Thus,bottom-up schemes are believed to be necessary methods combined with the top-down processes.In this article,atomic level deposition methods are reviewed and categorized to extend Moore’s law and beyond.Firstly,the deposition brings lateral angstrom resolution to the vertical direction as well as top-down etching,such as double patterning,transfer of nanowires,deposition of nanotubes,and so on.Secondly,various template-assisted selective deposition methods including dielectric templates,inhibitors and correction steps have been utilized for the alignment of 3D complex structures.Higher resolution can be achieved by inherently selective deposition,and the underlying selective mechanism is discussed.Finally,the requirements for higher precision and efficiency manufacturing are also discussed,including the equipment,integration processes,scale-up issues,etc.The article reviews low dimensional manufacturing and integration of 3D complex structures for the extension of Moore’s law in semiconductor fields,and emerging fields including but not limited to energy,catalysis,sensor and biomedicals.展开更多
Electron emission properties of single-walled carbon nanotubes (SWCNTs) assembled on a tungsten tip were investigated using field emission microscopy (FEM). The transmission electron microscopy (TEM) micrograph confir...Electron emission properties of single-walled carbon nanotubes (SWCNTs) assembled on a tungsten tip were investigated using field emission microscopy (FEM). The transmission electron microscopy (TEM) micrograph confirmed the existence of an SWCNT bundle on the W tip. Under appropriate experimental conditions,a series of FEM patterns with atomic resolution were obtained. These patterns arose possibly from the field emission of the open end of an individual (16,0) SWCNT protruding from the SWCNT bundle. The magnification factor and the resolution under our experimental conditions were calculated theoretically. If the value of the compression factor β was set at β= 1.76, the calculated value of the magnification factor was in agreement with the measured value. The resolving powerof FEM was determined by the resolution equation given by Gomer. The resolutionof 0.277 nm could be achieved under the typical electric field of 5.0×107 V/cm, which was close to the interatomic separation 0.246 nm between carbon atoms along the zigzag edge at the open end for the (16, 0) SWCNT. Consequently, our experimental results were further supported by our theoretical calculation.展开更多
The common ways to activate a chemical reaction are by heat,electric current,or light.However,mechanochemistry,where the chemical reaction is activated by applied mechanical force,is less common and only poorly unders...The common ways to activate a chemical reaction are by heat,electric current,or light.However,mechanochemistry,where the chemical reaction is activated by applied mechanical force,is less common and only poorly understood at the atomic scale.Here we report a tip-induced activation of chemical reaction of carbon monoxide to dioxide on oxidized rutile TiO_(2)(110)surface.The activation is studied by atomic force microscopy,Kelvin probe force microscopy under ultrahigh-vacuum and liquid nitrogen temperature conditions,and density functional theory(DFT)modeling.The reaction is inferred from hysteretic behavior of frequency shift signal further supported by vector force mapping of vertical and lateral forces needed to trigger the chemical reaction with torque motion of carbon monoxide towards an oxygen adatom.The reaction is found to proceed stochastically at very small tip-sample distances.Furthermore,the local contact potential difference reveals the atomic-scale charge redistribution in the reactants required to unlock the reaction.Our results open up new insights into the mechanochemistry on metal oxide surfaces at the atomic scale.展开更多
One of the major innovations awaiting in electron microscopy is full three-dimensional imaging at atomic resolution.Despite the success of aberration correction to deep sub-angstrom lateral resolution,spatial resoluti...One of the major innovations awaiting in electron microscopy is full three-dimensional imaging at atomic resolution.Despite the success of aberration correction to deep sub-angstrom lateral resolution,spatial resolution in depth is still far from atomic resolution.In scanning transmission electron microscopy(STEM),this poor depth resolution is due to the limitation of the illumination angle.To overcome this physical limitation,it is essential to implement a next-generation aberration corrector in STEM that can significantly improve the depth resolution.This review discusses the capability of depth sectioning for three-dimensional imaging combined with large-angle illumination STEM.Furthermore,the statistical analysis approach remarkably improves the depth resolution,making it possible to achieve three-dimensional atomic resolution imaging at oxide surfaces.We will also discuss the future prospects of three-dimensional imaging at atomic resolution by STEM depth sectioning.展开更多
The high-resolution and nondestructive co-reference measurement of the inner and outer threedimensional(3D)surface profiles of laser fusion targets is difficult to achieve.In this study,we propose a laser differential...The high-resolution and nondestructive co-reference measurement of the inner and outer threedimensional(3D)surface profiles of laser fusion targets is difficult to achieve.In this study,we propose a laser differential confocal(LDC)–atomic force probe(AFP)method to measure the inner and outer 3D surface profiles of laser fusion targets at a high resolution.This method utilizes the LDC method to detect the deflection of the AFP and exploits the high spatial resolution of the AFP to enhance the spatial resolution of the outer profile measurement.Nondestructive and co-reference measurements of the inner profile of a target were achieved using the tomographic characteristics of the LDC method.Furthermore,by combining multiple repositionings of the target using a horizontal slewing shaft,the inner and outer 3D surface profiles of the target were obtained,along with a power spectrum assessment of the entire surface.The experimental results revealed that the respective axial and lateral resolutions of the outer profile measurement were 0.5 and 1.3 nm,while the respective axial and lateral resolutions of the inner profile measurement were 2.0 nm and approximately 400.0 nm.The repeatabilities of the rootmean-square deviation measurements for the outer and inner profiles of the target were 2.6 and 2.4 nm,respectively.We believe our study provides a promising method for the high-resolution and nondestructive co-reference measurement of the inner and outer 3D profiles of laser fusion targets.展开更多
A highly distorted chiral nanographene structure composed of triple corannulene-fused[5]helicenes is prepared with the help of the Heck reaction and oxidative photocyclization with an overall isolated yield of 28%.The...A highly distorted chiral nanographene structure composed of triple corannulene-fused[5]helicenes is prepared with the help of the Heck reaction and oxidative photocyclization with an overall isolated yield of 28%.The complex three-dimensional(3D)structure of the bowl-helix hybrid nanostructure is studied by a combination of noncontact atomic force microscopy(AFM)and scanning tunneling microscopy(STM)on the Cu(111)surface,density functional theory calculations,AFM/STM simulations,and high-performance liquid chromatography-electronic circular dichroism analysis.This examination reveals a molecular structure in which the three bowl-shaped corannulene bladesd position themselves in a C3-symmetric fashion around a highly twisted triphenylene core.The molecule appears to be shaped like a propeller in which the concave side of the bowls face away from the connected[5]helicene motif.The chirality of the nanostructure is confirmed by the direct visualization of both MMM and PPP enantiomers at the single-molecule level by scanning probe microscopies.These results underline that submolecular resolution imaging by AFM/STM is a powerful real-space tool for the stereochemical characterization of 3D curved chiral nanographene structures.展开更多
Heterogeneous catalysts are the most important catalysts in industrial reactions. Nanocatalysts, with size ranging from hundreds of nanometers to the atomic scale, possess activities that are closely connected to thei...Heterogeneous catalysts are the most important catalysts in industrial reactions. Nanocatalysts, with size ranging from hundreds of nanometers to the atomic scale, possess activities that are closely connected to their structural characteristics such as particle size, surface morphology, and three-dimensional topography. Recently, the development of advanced analytical transmission electron microscopy(TEM) techniques, especially quantitative high-angle annular darkfield(HAADF) imaging and high-energy resolution spectroscopy analysis in scanning transmission electron microscopy(STEM) at the atomic scale, strengthens the power of(S)TEM in analyzing the structural/chemical information of heterogeneous catalysts. Three-dimensional reconstruction from two-dimensional projected images and the real-time recording of structural evolution during catalytic reactions using in-situ(S)TEM methods further broaden the scope of(S)TEM observation. The atomic-scale structural information obtained from high-resolution(S)TEM has proven to be of significance for better understanding and designing of new catalysts with enhanced performance.展开更多
Cryogenic electron microscopy(cryo-EM)has extensively boosted structural biology research since the“resolution revolution”in the year of 2013 which was soon awarded the Nobel Prize in Chemistry in 2017.The advances ...Cryogenic electron microscopy(cryo-EM)has extensively boosted structural biology research since the“resolution revolution”in the year of 2013 which was soon awarded the Nobel Prize in Chemistry in 2017.The advances in camera techniques and software algorithms enabled cryoEM to routinely characterize the three-dimensional structures of biomolecules at near-atomic resolution.Biomolecules are basically sensitive to electron irradiation damage,which can be minimized at cryo-temperature.This principle has inspired material scientists to characterize electron beam-or air-sensitive materials by cryo-EM,such as the electrodes in the lithium-ion battery,metal-organic frameworks(MOFs),covalent-organic frameworks(COFs)and zeolites.In addition,the reaction systems can be fast-frozen at vitreous ice in cryoEM,which correspondingly preserves the materials at the close-to-native state.Herein,we summarized the development and applications of both the cryo-EM technique and other emerging cryo-techniques in materials science,and energy storage and conversion.Cryo-EM techniques,capable of the direct observation of sensitive materials and electrochemical reaction processes,will greatly renew our understanding of materials science and related mechanisms.展开更多
Electrochemical Scanning TUnneling Microscopy (ECSTM) has been extended to characterizc polycrystalline silver electrode surfaces in iodide solution. Potential-dependcnt ordered and disordered structures of the silver...Electrochemical Scanning TUnneling Microscopy (ECSTM) has been extended to characterizc polycrystalline silver electrode surfaces in iodide solution. Potential-dependcnt ordered and disordered structures of the silver electrode as well as the iodine adsorption layer have been obscrved to coexist on polycrystalline silver electrode surfaces, for the first time. A very special column arrangement of the iodine adsorption layer, similar to the so called "ndssing row" type of structure has been obseryed. Some columns of the iodine adsorption layer roll over from one place to another along with the time and changing potential. A proposed model has been given to better describe the structure. The highly corrugated and loose surface structure of the polycrystalline surface are responsible for this special phenomenon.展开更多
Amorphous materials such as glass,polymer and amorphous alloy have broad applications ranging from daily life to extreme conditions due to their unique properties in elasticity,strength and electrical resistivity.A be...Amorphous materials such as glass,polymer and amorphous alloy have broad applications ranging from daily life to extreme conditions due to their unique properties in elasticity,strength and electrical resistivity.A better understanding of atomic structure of amorphous materials will provide invaluable information for their further engineering and applications.However,experimentally determining the three-dimensional(3D)atomic structure of amorphous materials has been a long-standing problem.Due to the disordered atomic arrangement,amorphous materials do not have any translational and rotational symmetry at long-range scale.Conventional characterization methods,such as the scattering and the microscopy imaging,can only provide the statistic structural information which is averaged over the macroscopic region.The knowledge of the 3D atomic structure of amorphous materials is limited.Recently atomic resolution electron tomography(AET)has proven an increasingly powerful tool for atomic scale structural characterization without any crystalline assumptions,which opens a door to determine the 3D structure of various amorphous materials.In this review,we summarize the state-of-art characterization methods for the exploration of atomic structures of amorphous materials in the past few decades,including X-ray/neutron diffraction,nano-beam and angstrom-beam electron diffraction,fluctuation electron microscopy,high-resolution scanning/transmission electron microscopy,and atom probe tomography.From experimental data and theoretical descriptions,3D structures of various amorphous materials have been built up.Particularly,we introduce the principles and recent progress of AET,and highlight the most recent groundbreaking feat accomplished by AET,i.e.,the first experimental determination of all 3D atomic positions in a multi-component glass-forming alloy and the 3D atomic packing in amorphous solids.We also discuss the new opportunities and challenges for characterizing the chemical and structural defects in amorphous materials.展开更多
基金the National Natural Science Foundation of China(51835005,51702106,51911540476,and 51575217)HUST state key lab project(DMETKF2019003)。
文摘In the past decades,Moore’s law drives the semiconductor industry to continuously shrink the critical size of transistors down to 7 nm.As transistors further downscaling to smaller sizes,the law reaches its limitation,and the increase of transistors density on the chip decelerates.Up to now,extreme ultraviolet lithography has been used in some key steps,and it is facing alignment precision and high costs for high-volume manufacturing.Meanwhile,the introduction of new materials and 3D complex structures brings serious challenges for top-down methods.Thus,bottom-up schemes are believed to be necessary methods combined with the top-down processes.In this article,atomic level deposition methods are reviewed and categorized to extend Moore’s law and beyond.Firstly,the deposition brings lateral angstrom resolution to the vertical direction as well as top-down etching,such as double patterning,transfer of nanowires,deposition of nanotubes,and so on.Secondly,various template-assisted selective deposition methods including dielectric templates,inhibitors and correction steps have been utilized for the alignment of 3D complex structures.Higher resolution can be achieved by inherently selective deposition,and the underlying selective mechanism is discussed.Finally,the requirements for higher precision and efficiency manufacturing are also discussed,including the equipment,integration processes,scale-up issues,etc.The article reviews low dimensional manufacturing and integration of 3D complex structures for the extension of Moore’s law in semiconductor fields,and emerging fields including but not limited to energy,catalysis,sensor and biomedicals.
基金the National Natural Science Foundation of China(Grant Nos.69890221 and 69971003)the MOST of China(No.2001CB610503)+1 种基金Key Foundation for Science and Technology Research of Education Ministry of China(No.00005)Scientific Research Foundation for Returned Oversea Chinese Scholars,State Education Commission
文摘Electron emission properties of single-walled carbon nanotubes (SWCNTs) assembled on a tungsten tip were investigated using field emission microscopy (FEM). The transmission electron microscopy (TEM) micrograph confirmed the existence of an SWCNT bundle on the W tip. Under appropriate experimental conditions,a series of FEM patterns with atomic resolution were obtained. These patterns arose possibly from the field emission of the open end of an individual (16,0) SWCNT protruding from the SWCNT bundle. The magnification factor and the resolution under our experimental conditions were calculated theoretically. If the value of the compression factor β was set at β= 1.76, the calculated value of the magnification factor was in agreement with the measured value. The resolving powerof FEM was determined by the resolution equation given by Gomer. The resolutionof 0.277 nm could be achieved under the typical electric field of 5.0×107 V/cm, which was close to the interatomic separation 0.246 nm between carbon atoms along the zigzag edge at the open end for the (16, 0) SWCNT. Consequently, our experimental results were further supported by our theoretical calculation.
基金supported by a Grant-in-Aid for Scientific Research from Japan Society for the Promotion of Science(JSPS)from the Ministry of Education,Culture,Sports,Science,and Technology of Japan(Nos.JP16H06327,JP17H01061,A21J103560,and JP22H00282)supported by the International Joint Research Promotion Program of Osaka University(Nos.J171013014,J171013007,J181013004,J181013006,Ja1999001,Ja19990011,and A21J103560)+1 种基金JSPSthe National Natural Science Foundation of China(No.J191053055)supported by APVV-21-0272,VEGA-2/0070/21,VEGA-2/0125/20,VEGA-2/0131/23,and H2020 TREX GA No.952165 projects。
文摘The common ways to activate a chemical reaction are by heat,electric current,or light.However,mechanochemistry,where the chemical reaction is activated by applied mechanical force,is less common and only poorly understood at the atomic scale.Here we report a tip-induced activation of chemical reaction of carbon monoxide to dioxide on oxidized rutile TiO_(2)(110)surface.The activation is studied by atomic force microscopy,Kelvin probe force microscopy under ultrahigh-vacuum and liquid nitrogen temperature conditions,and density functional theory(DFT)modeling.The reaction is inferred from hysteretic behavior of frequency shift signal further supported by vector force mapping of vertical and lateral forces needed to trigger the chemical reaction with torque motion of carbon monoxide towards an oxygen adatom.The reaction is found to proceed stochastically at very small tip-sample distances.Furthermore,the local contact potential difference reveals the atomic-scale charge redistribution in the reactants required to unlock the reaction.Our results open up new insights into the mechanochemistry on metal oxide surfaces at the atomic scale.
基金Project supported by JST-PRESTO (Grant No.JPMJPR1871)JST-FOREST (Grant No.JPMJFR2033)+2 种基金JST-ERATO (Grant No.JPMJER2202)KAKENHI JSPS (Grant Nos.JP19H05788,JP21H01614,and JP24H00373)“Next Generation Electron Microscopy”social cooperation program at the University of Tokyo。
文摘One of the major innovations awaiting in electron microscopy is full three-dimensional imaging at atomic resolution.Despite the success of aberration correction to deep sub-angstrom lateral resolution,spatial resolution in depth is still far from atomic resolution.In scanning transmission electron microscopy(STEM),this poor depth resolution is due to the limitation of the illumination angle.To overcome this physical limitation,it is essential to implement a next-generation aberration corrector in STEM that can significantly improve the depth resolution.This review discusses the capability of depth sectioning for three-dimensional imaging combined with large-angle illumination STEM.Furthermore,the statistical analysis approach remarkably improves the depth resolution,making it possible to achieve three-dimensional atomic resolution imaging at oxide surfaces.We will also discuss the future prospects of three-dimensional imaging at atomic resolution by STEM depth sectioning.
基金supported by the National Natural Science Foundation of China(52327806 and U22A6006).
文摘The high-resolution and nondestructive co-reference measurement of the inner and outer threedimensional(3D)surface profiles of laser fusion targets is difficult to achieve.In this study,we propose a laser differential confocal(LDC)–atomic force probe(AFP)method to measure the inner and outer 3D surface profiles of laser fusion targets at a high resolution.This method utilizes the LDC method to detect the deflection of the AFP and exploits the high spatial resolution of the AFP to enhance the spatial resolution of the outer profile measurement.Nondestructive and co-reference measurements of the inner profile of a target were achieved using the tomographic characteristics of the LDC method.Furthermore,by combining multiple repositionings of the target using a horizontal slewing shaft,the inner and outer 3D surface profiles of the target were obtained,along with a power spectrum assessment of the entire surface.The experimental results revealed that the respective axial and lateral resolutions of the outer profile measurement were 0.5 and 1.3 nm,while the respective axial and lateral resolutions of the inner profile measurement were 2.0 nm and approximately 400.0 nm.The repeatabilities of the rootmean-square deviation measurements for the outer and inner profiles of the target were 2.6 and 2.4 nm,respectively.We believe our study provides a promising method for the high-resolution and nondestructive co-reference measurement of the inner and outer 3D profiles of laser fusion targets.
基金Financial support from the Ministry of Education Singapore under the AcRF Tier 1(MOE T1 RG11/21)and AcRF Tier 2(MOE-T2EP10221-0002)The Deutsche Forschungsgemeinschaft via grants(nos.SCHI 619/13 and EB535/1-1)+5 种基金the GRK(Research Training Group)2204“Substitute Materials for Sustainable Energy Technologies”the LOEWE Program of Excellence of the Federal State of Hesse(LOEWE Focus Group PriOSS“Principles of On-Surface Synthesis”)the National Natural Science Foundation of China(grant nos.21790053,51821002,and 22072103)the National Major State Basic Research Development Program of China(grant nos.2017YFA0205000 and 2017YFA0205002)the Collaborative Innovation Center of Suzhou Nano Science&Technologythe 111 Project are also acknowledged for their financial support.
文摘A highly distorted chiral nanographene structure composed of triple corannulene-fused[5]helicenes is prepared with the help of the Heck reaction and oxidative photocyclization with an overall isolated yield of 28%.The complex three-dimensional(3D)structure of the bowl-helix hybrid nanostructure is studied by a combination of noncontact atomic force microscopy(AFM)and scanning tunneling microscopy(STM)on the Cu(111)surface,density functional theory calculations,AFM/STM simulations,and high-performance liquid chromatography-electronic circular dichroism analysis.This examination reveals a molecular structure in which the three bowl-shaped corannulene bladesd position themselves in a C3-symmetric fashion around a highly twisted triphenylene core.The molecule appears to be shaped like a propeller in which the concave side of the bowls face away from the connected[5]helicene motif.The chirality of the nanostructure is confirmed by the direct visualization of both MMM and PPP enantiomers at the single-molecule level by scanning probe microscopies.These results underline that submolecular resolution imaging by AFM/STM is a powerful real-space tool for the stereochemical characterization of 3D curved chiral nanographene structures.
基金Project supported by the Natural Science Foundation of China(Grant No.51622211)the Pioneer Hundred Talents Program of Chinese Academy of Sciences
文摘Heterogeneous catalysts are the most important catalysts in industrial reactions. Nanocatalysts, with size ranging from hundreds of nanometers to the atomic scale, possess activities that are closely connected to their structural characteristics such as particle size, surface morphology, and three-dimensional topography. Recently, the development of advanced analytical transmission electron microscopy(TEM) techniques, especially quantitative high-angle annular darkfield(HAADF) imaging and high-energy resolution spectroscopy analysis in scanning transmission electron microscopy(STEM) at the atomic scale, strengthens the power of(S)TEM in analyzing the structural/chemical information of heterogeneous catalysts. Three-dimensional reconstruction from two-dimensional projected images and the real-time recording of structural evolution during catalytic reactions using in-situ(S)TEM methods further broaden the scope of(S)TEM observation. The atomic-scale structural information obtained from high-resolution(S)TEM has proven to be of significance for better understanding and designing of new catalysts with enhanced performance.
基金supported by the National Natural Science Foundation of China(52171219 and 91963113)。
文摘Cryogenic electron microscopy(cryo-EM)has extensively boosted structural biology research since the“resolution revolution”in the year of 2013 which was soon awarded the Nobel Prize in Chemistry in 2017.The advances in camera techniques and software algorithms enabled cryoEM to routinely characterize the three-dimensional structures of biomolecules at near-atomic resolution.Biomolecules are basically sensitive to electron irradiation damage,which can be minimized at cryo-temperature.This principle has inspired material scientists to characterize electron beam-or air-sensitive materials by cryo-EM,such as the electrodes in the lithium-ion battery,metal-organic frameworks(MOFs),covalent-organic frameworks(COFs)and zeolites.In addition,the reaction systems can be fast-frozen at vitreous ice in cryoEM,which correspondingly preserves the materials at the close-to-native state.Herein,we summarized the development and applications of both the cryo-EM technique and other emerging cryo-techniques in materials science,and energy storage and conversion.Cryo-EM techniques,capable of the direct observation of sensitive materials and electrochemical reaction processes,will greatly renew our understanding of materials science and related mechanisms.
文摘Electrochemical Scanning TUnneling Microscopy (ECSTM) has been extended to characterizc polycrystalline silver electrode surfaces in iodide solution. Potential-dependcnt ordered and disordered structures of the silver electrode as well as the iodine adsorption layer have been obscrved to coexist on polycrystalline silver electrode surfaces, for the first time. A very special column arrangement of the iodine adsorption layer, similar to the so called "ndssing row" type of structure has been obseryed. Some columns of the iodine adsorption layer roll over from one place to another along with the time and changing potential. A proposed model has been given to better describe the structure. The highly corrugated and loose surface structure of the polycrystalline surface are responsible for this special phenomenon.
基金supported by the National Natural Science Foundation of China(22172003)High-performance Computing Platform of Peking University.
文摘Amorphous materials such as glass,polymer and amorphous alloy have broad applications ranging from daily life to extreme conditions due to their unique properties in elasticity,strength and electrical resistivity.A better understanding of atomic structure of amorphous materials will provide invaluable information for their further engineering and applications.However,experimentally determining the three-dimensional(3D)atomic structure of amorphous materials has been a long-standing problem.Due to the disordered atomic arrangement,amorphous materials do not have any translational and rotational symmetry at long-range scale.Conventional characterization methods,such as the scattering and the microscopy imaging,can only provide the statistic structural information which is averaged over the macroscopic region.The knowledge of the 3D atomic structure of amorphous materials is limited.Recently atomic resolution electron tomography(AET)has proven an increasingly powerful tool for atomic scale structural characterization without any crystalline assumptions,which opens a door to determine the 3D structure of various amorphous materials.In this review,we summarize the state-of-art characterization methods for the exploration of atomic structures of amorphous materials in the past few decades,including X-ray/neutron diffraction,nano-beam and angstrom-beam electron diffraction,fluctuation electron microscopy,high-resolution scanning/transmission electron microscopy,and atom probe tomography.From experimental data and theoretical descriptions,3D structures of various amorphous materials have been built up.Particularly,we introduce the principles and recent progress of AET,and highlight the most recent groundbreaking feat accomplished by AET,i.e.,the first experimental determination of all 3D atomic positions in a multi-component glass-forming alloy and the 3D atomic packing in amorphous solids.We also discuss the new opportunities and challenges for characterizing the chemical and structural defects in amorphous materials.