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氮分压对钕铁硼表面直流磁控溅射沉积AlN/Al防护涂层结构和性能的影响 被引量:10
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作者 李金龙 冒守栋 +1 位作者 孙科沸 宋振纶 《中国表面工程》 EI CAS CSCD 北大核心 2010年第3期80-83,共4页
采用直流磁控溅射在钕铁硼表面沉积AlN/Al双层防护薄膜来提高磁体的耐腐蚀性能。先在基体表面沉积纯Al薄膜,然后沉积外层AlN薄膜。沉积AlN薄膜时,改变氮气分压,研究氮分压对薄膜结构和耐腐蚀性能的影响。结果显示,AlN纳米颗粒形成于内... 采用直流磁控溅射在钕铁硼表面沉积AlN/Al双层防护薄膜来提高磁体的耐腐蚀性能。先在基体表面沉积纯Al薄膜,然后沉积外层AlN薄膜。沉积AlN薄膜时,改变氮气分压,研究氮分压对薄膜结构和耐腐蚀性能的影响。结果显示,AlN纳米颗粒形成于内层Al结晶体表面。氮氩分压比为1:1时,钕铁硼表面形成了更致密的AlN/Al薄膜。膜基界面存在元素的互扩散和冶金结合。氮氩分压为1:1的AlN/Al防护薄膜具有最好的耐腐蚀性能。 展开更多
关键词 NDFEB aln/al 结构 腐蚀性能
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Effect of AlN Thickness on Structure and Properties of AlN/Al Dual Protective Coatings on NdFeB by DC Magnetron Sputtering
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作者 Li Jinlong Mao Shoudong +3 位作者 Sun Kefei Song Zhenlun Huang Feng Xue Qunji 《稀有金属材料与工程》 SCIE EI CAS CSCD 北大核心 2012年第S1期89-92,共4页
In order to improve the corrosion resistance of NdFeB,AlN/Al dual protective coatings were prepared by DC magnetron sputtering in a home-made industrial apparatus.The inner Al layer with an excellent toughness was dep... In order to improve the corrosion resistance of NdFeB,AlN/Al dual protective coatings were prepared by DC magnetron sputtering in a home-made industrial apparatus.The inner Al layer with an excellent toughness was deposited onto NdFeB substrate firstly.And then the outmost AlN layer with a higher hardness was prepared with the nitrogen/argon mixture gas of the nitrogen partial pressure at 50%of the total pressure of 0.5 Pa and depositing time of 30,50 and 70 min,respectively.The denser outmost AlN layer was formed on the inner Al crystal layer.There is an occurrence of the interfacial reaction and metallurgy bonding in the interface layer between the coatings and NdFeB substrate.It has been found that the thickness of outmost AlN layer has a significant impact on corrosion resistance.For 50 min to deposit outmost AlN layer,AlN/Al coated NdFeB has the best corrosion resistance. 展开更多
关键词 NDFEB aln/al coatings MAGNETRON SPUTTERING corrosion
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