A new method for testing aspheric surfaces by annular subaperture stitching interferometry is introduced. It can test large-aperture and large-relative-aperture aspheric surfaces at high resolution, low cost, and high...A new method for testing aspheric surfaces by annular subaperture stitching interferometry is introduced. It can test large-aperture and large-relative-aperture aspheric surfaces at high resolution, low cost, and high efficiency without auxiliary null optics. The basic principle of the method is described, the synthetical optimization stitching model and effective algorithm are established based on simultaneous least-square fitting. A hyperboloid with an aperture of 350 mm is tested by this method. The obtained peak-to-valley (PV) and root-mean-square (RMS) values of the surface error after stitching are 0.433A and 0.052A (A is 632.8 nm), respectively. The reconstructed surface map is coincide with the entire surface map from null test, and the difference of PV and RMS errors between them are 0.031A and 0.005A, respectively. This stitching model provides another quantitive method for testing large aspheric surfaces besides null compensation.展开更多
In this paper, according to the features of easy distortion and scratch for aspheric plastic lens, a noncontact measuring method is raised to test error in shape of the lens. Namely, the distance between a template an...In this paper, according to the features of easy distortion and scratch for aspheric plastic lens, a noncontact measuring method is raised to test error in shape of the lens. Namely, the distance between a template and its image reflected with tested lens can be measured in nearly the vertical direction of the lens axis when the two-dimensional (2D) template is put near the measured surface. Then, the outline of the central cross-section could be obtained by calculating and curve fitting. Furthermore, three-dimensional (3D) surface can be imitated through rotating the component. A new fitting method of drift measurement is presented to prevent reducing precision when the lens and the template are fixed. The template is adjusted according to the position of the lens. The measurement precision is in the order of magnitued of sub-microns. Rotationally symmetric convex aspheric surface with any angle can be measured by this method.展开更多
文摘A new method for testing aspheric surfaces by annular subaperture stitching interferometry is introduced. It can test large-aperture and large-relative-aperture aspheric surfaces at high resolution, low cost, and high efficiency without auxiliary null optics. The basic principle of the method is described, the synthetical optimization stitching model and effective algorithm are established based on simultaneous least-square fitting. A hyperboloid with an aperture of 350 mm is tested by this method. The obtained peak-to-valley (PV) and root-mean-square (RMS) values of the surface error after stitching are 0.433A and 0.052A (A is 632.8 nm), respectively. The reconstructed surface map is coincide with the entire surface map from null test, and the difference of PV and RMS errors between them are 0.031A and 0.005A, respectively. This stitching model provides another quantitive method for testing large aspheric surfaces besides null compensation.
基金This work was supported by the National Natural Sci-ence Foundation of China under Grant No. 59875066.
文摘In this paper, according to the features of easy distortion and scratch for aspheric plastic lens, a noncontact measuring method is raised to test error in shape of the lens. Namely, the distance between a template and its image reflected with tested lens can be measured in nearly the vertical direction of the lens axis when the two-dimensional (2D) template is put near the measured surface. Then, the outline of the central cross-section could be obtained by calculating and curve fitting. Furthermore, three-dimensional (3D) surface can be imitated through rotating the component. A new fitting method of drift measurement is presented to prevent reducing precision when the lens and the template are fixed. The template is adjusted according to the position of the lens. The measurement precision is in the order of magnitued of sub-microns. Rotationally symmetric convex aspheric surface with any angle can be measured by this method.
基金Supported by Science,Technology&Innovation Project of Xiongan New Area (2022XAGG0181)Shenyang Young and Middle-aged Science and Technology Innovation Talent Support Program (RC220523)。