The crystal structure of InSb [111] A/B surfaces shows that this structure is polarized. This means that the surfaces of InSb [111] A and InSb [1^-1^- 1^-] B contain two different crystallized directions and they have...The crystal structure of InSb [111] A/B surfaces shows that this structure is polarized. This means that the surfaces of InSb [111] A and InSb [1^-1^- 1^-] B contain two different crystallized directions and they have different physical and chemical properties. Experiments were carried out on the InSb [ 111 ] A/B surfaces, showing that tartaric acid etchant could create a very smooth surface on the InSb [1^-1^- 1^-] B without any traces of oxides and etch pit but simultaneously create etch pit on InSb [ 111 ] A surfaces. After lapping and polishing, some particles remained on the InSb [1^-1^- 1^-] B surface, they could not be removed easily by standard cleaning process and if these particles remain on the surface of the substrate, the growth layer was not uniform and some island-like regions were observed. The purpose of this work is to remove these particles on the lnSb [1^-1^- 1^-] B surface. Some morphology images of both surfaces, InSb [11 1] A/B, will be presented.展开更多
文摘The crystal structure of InSb [111] A/B surfaces shows that this structure is polarized. This means that the surfaces of InSb [111] A and InSb [1^-1^- 1^-] B contain two different crystallized directions and they have different physical and chemical properties. Experiments were carried out on the InSb [ 111 ] A/B surfaces, showing that tartaric acid etchant could create a very smooth surface on the InSb [1^-1^- 1^-] B without any traces of oxides and etch pit but simultaneously create etch pit on InSb [ 111 ] A surfaces. After lapping and polishing, some particles remained on the InSb [1^-1^- 1^-] B surface, they could not be removed easily by standard cleaning process and if these particles remain on the surface of the substrate, the growth layer was not uniform and some island-like regions were observed. The purpose of this work is to remove these particles on the lnSb [1^-1^- 1^-] B surface. Some morphology images of both surfaces, InSb [11 1] A/B, will be presented.
