To improve overall equipment efficiency(OEE) of a semiconductor wafer wet-etching system,a heuristic tabu search scheduling algorithm is proposed for the wet-etching process in the paper,with material handling robot c...To improve overall equipment efficiency(OEE) of a semiconductor wafer wet-etching system,a heuristic tabu search scheduling algorithm is proposed for the wet-etching process in the paper,with material handling robot capacity and wafer processing time constraints of the process modules considered.Firstly,scheduling problem domains of the wet-etching system(WES) are assumed and defined,and a non-linear programming model is built to maximize the throughput with no defective wafers.On the basis of the model,a scheduling algorithm based on tabu search is presented in this paper.An improved Nawaz,Enscore,and Ham(NEH) heuristic algorithm is used as the initial feasible solution of the proposed heuristic algorithm.Finally,performances of the proposed algorithm are analyzed and evaluated by simulation experiments.The results indicate that the proposed algorithm is valid and practical to generate satisfied scheduling solutions.展开更多
目前全球在水力、石油和天然气领域的专业防腐蚀防护技术正在走向系统化方案管理，而且防腐产品和科技经常跨学科跨领域应用，基于以上情况，美国腐蚀工程师协会（National Association of Corrosion Engineers，简称NACE）西部组织举...目前全球在水力、石油和天然气领域的专业防腐蚀防护技术正在走向系统化方案管理，而且防腐产品和科技经常跨学科跨领域应用，基于以上情况，美国腐蚀工程师协会（National Association of Corrosion Engineers，简称NACE）西部组织举办防腐蚀技术交流会，主要介绍目前主流的管道防腐蚀系统方案和防腐蚀控制，针对水力、石油和天然气工业领域。同时参会者还将了解“油水混合”的工艺，掌握更多的防护防腐技术。展开更多
基金Supported by the National Natural Science Foundation of China(No.71071115,61273035)
文摘To improve overall equipment efficiency(OEE) of a semiconductor wafer wet-etching system,a heuristic tabu search scheduling algorithm is proposed for the wet-etching process in the paper,with material handling robot capacity and wafer processing time constraints of the process modules considered.Firstly,scheduling problem domains of the wet-etching system(WES) are assumed and defined,and a non-linear programming model is built to maximize the throughput with no defective wafers.On the basis of the model,a scheduling algorithm based on tabu search is presented in this paper.An improved Nawaz,Enscore,and Ham(NEH) heuristic algorithm is used as the initial feasible solution of the proposed heuristic algorithm.Finally,performances of the proposed algorithm are analyzed and evaluated by simulation experiments.The results indicate that the proposed algorithm is valid and practical to generate satisfied scheduling solutions.
文摘目前全球在水力、石油和天然气领域的专业防腐蚀防护技术正在走向系统化方案管理，而且防腐产品和科技经常跨学科跨领域应用，基于以上情况，美国腐蚀工程师协会（National Association of Corrosion Engineers，简称NACE）西部组织举办防腐蚀技术交流会，主要介绍目前主流的管道防腐蚀系统方案和防腐蚀控制，针对水力、石油和天然气工业领域。同时参会者还将了解“油水混合”的工艺，掌握更多的防护防腐技术。
